Abstract
Only when indoor airborne particles move towards the nearby of the precision product and then deposit onto the sensitive area, damage may be caused for the product. So it is important to understand the mechanism of particle movement and deposition for the control of environment.
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Xu, Z. (2014). Movement of Indoor Fine Particle. In: Fundamentals of Air Cleaning Technology and Its Application in Cleanrooms. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-39374-7_6
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DOI: https://doi.org/10.1007/978-3-642-39374-7_6
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