Abstract
Due to the nonuniform distributions of airflow and dust particles, particles in cleanroom are actually not evenly distributed. This chapter will focus on the calculation theory of three-zone nonuniform distribution.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsReferences
Hayakawa K, Aoki H (1974) Study of cleanroom (2). J SHASE Jpn 48(2):13–88 (In Japanese)
Xu ZL, Shen JM (1989) Application of air cleaning technology. China Architecture & Building Press, Beijing, p 99 (In Chinese)
Suzuki K (1988) Study of characteristics of air supply outlet in conventional cleanroom. In Proceeding of the 7th international symposium on contamination control, Paris, France, pp 97–102 (In Japanese)
Xu ZL (1979) Calculation method for the non-uniform distribution in cleanroom. J HV&AC 4:15–21 (In Chinese)
Hayakawa K et al (1974) Air conditioning and air cleaning. Soft Science Co. Ltd., Tokyo, Japan (In Japanese)
Кочерин ИД (1978) Air cleaning technology in production of semiconductor and integrated circuits. Translated by the 10th Design Research Institute of the Former Fourth Machinery Industry Department (In Chinese)
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 2014 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Xu, Z. (2014). Calculation Theory of Nonuniform Distribution in Cleanroom. In: Fundamentals of Air Cleaning Technology and Its Application in Cleanrooms. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-39374-7_11
Download citation
DOI: https://doi.org/10.1007/978-3-642-39374-7_11
Published:
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-39373-0
Online ISBN: 978-3-642-39374-7
eBook Packages: EngineeringEngineering (R0)