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Bio and Nano Packaging Techniques for Electron Devices

pp 119-137

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Uncertainty-Based Design Optimization of MEMS/NEMS

  • Holger NeubertAffiliated withInstitute of Electromechanical and Electronic Design, Technische Universität Dresden Email author 

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Abstract

In designing micro-electromechanical systems (MEMS), model-based design and design optimization is inevitable. This is due to the complexity of the working principles and the manufacturing technology associated with high initial costs for experimental investigations. Uncertainty-based design optimization enables stochastic variables, such as scattering material properties, manufacturing tolerances, stochastic time dependent loads, aging, or wear, to be considered in the design. In this chapter, the fundamental concept of reliability or failure probability is introduced and probabilistic approximation and simulation methods are described. These methods are used for robust design optimization (RDO) and reliability-based design optimization (RBDO) as well. Applications and examples for of both approaches are also provided.