Abstract
Micro-Raman spectroscopy is a method that has been used since the 1960s in solid state physics to investigate orientation of crystals, mechanical stresses, phase changes as well as dopant concentrations in semiconductor materials. Raman spectroscopy measures these effects in crystals via an inelastic interaction of laser light with lattice vibrations. The method probes the material of interest nondestructively without requiring any complex sample preparations. Another beneficial aspect of Micro-Raman spectroscopy is that, compared to many other methods, no expensive vacuum equipment is needed for the measurements.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsReferences
T. Ambridge, M.M. Faktor, J. Appl. Electrochem. 5, 319 (1975)
E. Anastassakis, A. Pinczuck, E. Burstein, F.H. Pollack, M. Cardona, Solid State Commun. 8, 133 (1970)
E. Anastassakis, E. Burstein, J. Phys. Chem. Solids 32, 563 (1971)
E. Anastassakis, E. Burstein, J. Phys. Chem. Solids 32, 313 (1971)
E. Anastassakis, A. Cantarero, M. Cardona, Phys. Rev. B 41, 7529 (1990)
E. Anastassakis, J. Appl. Phys. 86, 249 (1999)
M. Balkanski, K.P. Jain, R. Beserman, M. Jouanne, Phys. Rev. B 12, 4328 (1975)
M. Balkanski, R.F. Wallis, E. Haro, Phys. Rev. B 28, 1928 (1983)
P.A. Basore, D.A. Clugston, G. Thorson, A. Smith, D. Rover, B. Hansen, G. Anderson, Solar Cells Simulation Software, University of New South Wales, (2003)
M. Becker, H. Scheel, S. Christiansen, H.P. Strunk, J. Appl. Phys. 101, 0635135 (2007)
M. Becker, U. Gösele, A. Hofmann, S. Christiansen, J. Appl. Phys. 106, 074515 (2009)
A. Benninghoven, Z. Phys. 230, 403 (1970)
K.A. Bezjian, H.I. Smith, J.M. Carter, M.W. Geis, J. Electrochem. Soc. 129, 1848 (1982)
P. Blood, Semicond. Sci. Technol. 1, 7 (1986)
X.-Z. Bo, N. Yao, S.R. Shieh, T.S. Duffy, J.C. Sturm, J. Appl. Phys. 91, 2910 (2002)
E. Bonera, M. Fanciulli, D.N. Batchelder, Appl. Phys. Lett. 81, 3377 (2002)
E. Bonera, M. Fanciulli, D.N. Batchelder, J. Appl. Phys. 94, 2729 (2003)
S.D. Brotherton, J.R. Ayres, M.J. Edwards, C.A. Fisher, C. Glaister, J.P. Gowers, D.J. McCulloch, M. Trainor, Thin Solid Films 337, 188 (1999)
H.H. Burke, I.P. Herman, Phys. Rev. B 48, 15016 (1993)
H. Callen, Am. J. Phys. 36, 735 (1968)
R. Castaign, B. Jouffrey, G. Slodzian, Compt. Rend. 251, 1010 (1960)
F. Cerdeira, M. Cardona, Phys. Rev. B 5, 1440 (1972)
F. Cerdeira, T. A. Fjeldly, M. Cardona, Solid State Comm. 13, 325
F. Cerdeira, T.A. Fjeldly, M. Cardona, Phys. Rev. B 8, 4734 (1973)
M. Chandrasekhar, M. Cardona, O.E. Kane, Phys. Rev. B 16, 3579 (1977)
M. Chandrasekhar, J.B. Renucci, M. Cardona, Phys. Rev. B 17, 1623 (1978)
J. Chen, T. Sekiguchi, Jpn. J. Appl. Phys. 46, 6489 (2007)
S. Christiansen, P. Lengsfeld, J. Krinke, M. Nerding, J. Appl. Phys. 89, 5348 (2001)
L. Clément, R. Pantel, L.F.T. Kwakman, J.L. Rouvière, Appl. Phys. Lett. 85, 651 (2004)
T.C. Damen, S.P.S. Porto, B. Tell, Phys. Rev. 142, 570
A. Debernardi, S. Baroni, E. Molinari, Phys. Rev. Lett. 75, 1819 (1995)
A. Debernardi, Phys. Rev. B 57, 12847 (1998)
T.P. Devereaux, R. Hackl, Rev. Mod. Phys. 79, 175 (2007)
I. De Wolf, Semicond. Sci. Technol. 11, 139 (1996)
I. De Wolf, H.E. Maes, S.K. Jones, J. Appl. Phys. 79, 7148 (1996)
I. De Wolf, J. Jimenez, J. Landesman, C. Frigeri, P. Braun, E. Da Silva, E (Calvet, New developments in optical spectroscopy for the characterization of semiconductor devices (Nostradamus), European Commission, 1998). ISBN 92-828-5011-0
I. De Wolf, J. Raman Spectrosc. 30, 877 (1999)
B. Dietrich, K.F. Dombrowski, J. Raman Spectrosc. 30, 893 (1999)
Fano U., Pupillu G., Zannoni A., Clark C. W., J. Res. Natl. Inst. Stand. Technol. 110, 583 (2005)(engl. Translation of: Fano U., Nuovo Cimento 12, 154 (1935))
U. Fano, Phys. Rev. 124, 1866 (1961)
U. Fano, Phys. Rev. 137, 1364 (1965)
S. Ganesan, A.A. Maradudin, J. Oitmaa, Annals of Physics 56, 556 (1970)
M.W. Geis, H.I. Smith, B.Y. Tsaur, J.C.C. Fan, E.W. Maby, D.A. Antoniadis, Appl. Phys. Lett. 40, 158 (1982)
R. Gereth, H. Fischer, E. Link, S. Mattes, W. Pschunder, Energy Conversion 12, 103 (1972)
M. P. Godlewski, C. R. Baraona, H. W. Brandhorst, Proceedings of the 10\(^{th}\) IEEE Photovoltaic Specialists Conf., Palo Alto, 40 (1969)
M.A. Green, Silicon Solar Cells: Advanced Principles& Practice (University of New South Wales, Centre for Photovoltaic Devices and Systems, 1995)
J.I. Hanoka, R.O. Bell, Ann. Rev. Mat. Sci. 11, 353 (1981)
K.H. Hellwege, Einführung in die Festkörperphysik (Springer, Berlin, 1988). (in german)
M. Herms, J. Cryst. Growth 210, 172 (2000)
R. K. Herzog, H. Liebl H., J. Appl. Phys. 34, 2893 (1963)
J.B. Hopkins, L.A. Farrow, J. Appl. Phys. 59, 1103 (1986)
D. Hull, D. J. Bacon, Introduction to Dislocations, Butterworth- Heinemann, Chapters 4 and 9 (2001)
F. Huster, Proceedings of the 20th European Photovoltaic Solar Energy Conference and Exhibition, Barcelona, 635 (2005)
F. Huster, Proceedings of the 20th European Photovoltaic Solar Energy Conference and Exhibition, Barcelona, 1462 (2005)
F. Huster, Proceedings of the 20th European Photovoltaic Solar Energy Conference and Exhibition, Barcelona, 1466 (2005)
T. Ito, H. Azuma, S. Noda, Jpn. J. Appl. Phys. 33, 171 (1994)
M. Jouanne, R. Beserman, I. Ipatova, A. Subashiev, Solid State Comm. 16, 1047 (1975)
D.C. Joy, D.E. Newbury, D.L. Davidson, J. Appl. Phys. 53, R81 (1982)
D. Karg, K. Roy, W. Koch, Proceedings of the 19th European Photovoltaic Solar Energy Conference, Paris, 923 (2004)
D.L. Kendall, Ann. Rev. Mater. Sci. 9, 373 (1979)
C. Kittel, Introduction to Solid State Physics (Wiley, New York, 1996)
M. V. Klein, Light Scattering in Solids Vol. 8, Ed. M. Cardona, p. 147 Springer (1975)
P. Lengsfeld, N.H. Nickel, Ch. Genzel, W. Fuhs, J. Appl. Phys. 91, 9128 (2002)
G.H. Loechelt, N.G. Cave, J. Menendez, J. Appl. Phys. 86, 616 (1999)
R. Loudon, Adv. Phys. 13, 423 (1964)
H.J. Schulze, A. Lüdge, H. Riemann, J. Electrochem. Soc. 143, 4105 (1998)
V. Magidson, R. Beserman, Phys. Rev. B 66, 195206 (2002)
J. Mandelkorn, J.H. Lamneck, J. Appl. Phys. 44, 4785 (1973)
M. Melendez-Lira, J. Menendez, W. Windl, O.F. Sankey, G.S. Spencer, S. Sego, R.B. Culbertson, A.E. Bair, T.L. Alford Phys, Rev. B 54, 12866 (1997)
J. Menendez, W. H. Weber (Ed), Merlin R. (Ed.), Raman Scattering in Materials Science, Springer, Berlin (2000)
J. Michler, Y. Kaenel, J. Stiegler, E. Blank, J. Appl. Phys. 83, 187 (1998)
D. C. Miller, G. A. Rozgony, Handbook on Semiconductors 3, S. P. Keller, ed., 217 (1980)
K. Mizoguchi, S. Nakashima, J. Appl. Phys. 65, 2583 (1989)
S. Narayanan, S.R. Kalidindi, L.S. Schadler, J. Appl. Phys. 82, 2595 (1997)
N.H. Nickel, P. Lengsfeld, I. Sieber, Phys. Rev. B 61, 15558 (2000)
Ch. Niederberger, J. Michler, A. Jacot, Acta Materialia 56, 4002–4011 (2008)
T. Nishioka, Y. Shinoda, Y. Ohmachi, Appl. Phys. Lett. 43, 92 (1983)
M.-W. Pan, R. E. Benner, L. M. Smith in: Handbook of Vibrational Spectroscopy, Vol. 1, 490, Wiley, Chichester (2002)
G. Pezzotti, H. Ichimaru, L.P. Ferroni, K. Hirao, O. Sbaizero, J. Am. Ceram. Soc. 84, 1785 (2001)
G. Pezzotti, Y. Okamato, T. Nishida, M. Sakai, Acta Mater. 44, 899 (1996)
G. Pezzotti, J. Raman Spectrosc. 30, 867 (1999)
G. Pezzotti, N. Muraki, N. Maeda, K. Satou, Y. Nishida, J. Am. Ceram. Soc. 82, 1249 (1999)
P. Puech, S. Pinel, R.G. Jasinevicius, P.S. Pizani, J. Appl. Phys. 88, 4582 (2000)
J. Raptis, E. Liarokap, E. Anastassakis, Appl. Phys. Lett. 44, 125 (1984)
J.R. Sandercock, Phys. Rev. Lett 28, 237 (1972)
G. Sarau, M. Becker, A. Bochmann, A.Gawlik, G. Andrä, S.Christiansen, Proceedings of the 24th European Photovoltaic Solar Energy Conference, Hamburg, p 2494 (2009)
G. Sarau, M. Becker, S. Christiansen, M. Holla, W. Seifert, Proceedings of the 24th European Photovoltaic Solar Energy Conference, Hamburg, p. 969 (2009)
M. Schreck, H. Roll, J. Michler, E. Blank, B. Stritzker, J. Appl. Phys. 88, (2000)
D.K. Schroder, in “ Semiconductor material and device characterization”, \(2^{nd}\) Edition (Wiley, New York, 1998), pp. 683–689
F. Secco D’ Aragona, J. Electrochem. Soc. 119, 948 (1972)
A.W. Simonian, A.B. Sproul, Z. Shi, E. Gauja, Phys. Rev. B 52, 5672 (1995)
P.A. Temple, C.E. Hathaway, Phys. Rev. B 7, 3685 (1973)
S. Tochino, G. Pezzotti, J. Raman Spectrosc. 33, 709 (2002)
Z. Iqbal, S. Veprek, A.P. Webb, P. Capezzuto, Solid State Commun. 37, 993 (1981)
P. Verma, S.C. Abbi, K.P. Jain, Phys. Rev. B 51, 16660 (1995)
G.D. Watkins, W.B. Fowler, Phys. Rev. B 16, 4524 (1977)
W. H. Weber, R. Merlin (Eds.), Raman Scattering in Materials Science, Berlin Heidelberg New York: Springer Verlag, Chapter 3 (2000)
C. Weißmantel, C.C Hamann , Grundlagen der Festkörperphysik, Springer, Berlin, 1979). (in german)
D.B. Williams, C (Transmission Electron Microsopy Plenum Press, New York, B. Carter, 1996)
R. Wittmann, C. Parzinger, D. Gerthsen, Ultramicroscopy 70, 145 (1998)
P.Y. Yu, M. Cardona, Fundamentals of Semiconductors (Springer, Berlin, 1996)
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2012 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Becker, M., Sarau, G., Strunk, H., Christiansen, S. (2012). Raman Imaging of Grain Orientation, Strain, Crystallinity and Doping Levels in Solar Silicon. In: Zoubir, A. (eds) Raman Imaging. Springer Series in Optical Sciences, vol 168. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-28252-2_9
Download citation
DOI: https://doi.org/10.1007/978-3-642-28252-2_9
Published:
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-28251-5
Online ISBN: 978-3-642-28252-2
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)