Skip to main content
SpringerLink
Log in

Typical Applications of AES and XPS

  • Chapter
  • First Online:
Book cover Auger- and X-Ray Photoelectron Spectroscopy in Materials Science

Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 49))

  • 6095 Accesses

Abstract

A survey of the analysis of surfaces, interfaces, and thin films in typical fields of materials science is shown in Table 1.1 (Chap. 1). In practice, the analytical task and strategy (Sect. 8.1) decide about sample preparation and handling (Sect. 8.3) [8.1,8.11,8.12,9.1,9.2]. Sample preparation can be performed either outside the UHV environment of the analysis system (ex situ preparation, Sect. 8.3.1) or inside the UHV system (in situ, Sect. 8.3.2). Summarized under these two categories, a survey of the main phenomena that are studied with surface analysis methods is given in Table 9.1.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 259.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 329.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 329.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. J.C. Rivière, S. Myrha, Handbook of Surface and Interface Analysis (Marcel Dekker, New York, 1998)

    Google Scholar 

  2. M. Grasserbauer, H.J. Dudek, M.F. Ebel, Angewandte Oberflächenanalyse mit SIMS, AES und XPS (Springer, Berlin-Heidelberg, 1987)

    Google Scholar 

  3. S. Suzuki, High Temp. Mater. Process. 17, 1 (1998)

    Google Scholar 

  4. J. Iijima, J.-W. Lim, S.-H. Hong, S. Suzuki, K. Mimura, A. Isshiki, Appl. Surf. Sci. 253, 2825 (2006)

    ADS  Google Scholar 

  5. S. Hofmann, Thin Solid Films191, 335 (1990)

    Google Scholar 

  6. H.A. Jehn, U. Kopacz, S. Hofmann, J. Vac. Sci. Technol. A3, 2406 (1985)

    ADS  Google Scholar 

  7. S. Hofmann, H.A. Jehn, Surf. Coat. Technol. 41, 167 (1990)

    Google Scholar 

  8. H.A. Jehn, J.-H. Kim, S. Hofmann, Surf. Coat. Technol. 36, 715 (1988)

    Google Scholar 

  9. S. Hofmann, J. Vac. Sci. Technol. A 4, 2789 (1986)

    ADS  Google Scholar 

  10. P.Y. Jouan, M.C. Peignon, C. Cardinaud, G. Lemperiere, Appl. Surf Sci. 68, 595 (1993)

    ADS  Google Scholar 

  11. S. Hofmann, Rep. Prog. Phys. 61, 827 (1998)

    ADS  Google Scholar 

  12. D.G. Watson, W.F. Stickle, A.C. Diebold, Thin Solid Films 193/194, 305 (1990)

    Google Scholar 

  13. Physical Electronics Application Note 812 (2005).

    Google Scholar 

  14. I.leR. Strydom, S. Hofmann, J. Electron Spectrosc. Relat. Phenom. 56, 85 (1991)

    Google Scholar 

  15. I. Bertóti, M. Mohai, J.L. Sullivan, S.O. Saied, Appl. Surf. Sci. 84, 357 (1995)

    ADS  Google Scholar 

  16. I.leR. Strydom, S. Hofmann, Vacuum 41, 1619 (1990)

    Google Scholar 

  17. H.A. Jehn, E. Huber, S. Hofmann, Surf. Interface Anal. 22, 156 (1994)

    Google Scholar 

  18. S. Hofmann, H.A. Jehn, Surf. Interface Anal. 12, 329 (1988)

    Google Scholar 

  19. H.A. Jehn, S Hofmann, W.-D. Muenz, Thin Solid Films 153, 45 (1987)

    Google Scholar 

  20. S. Hofmann, Thin Solid Films 193/194, 648 (1990)

    Google Scholar 

  21. Y. Otani, S. Hofmann, Thin Solid Films 287, 188 (1996)

    ADS  Google Scholar 

  22. J.E. Castle, J. Adhesion 84, 368 (2008)

    Google Scholar 

  23. P. Bruesch, K. Mueller, A. Atrens, H. Neff, Appl. Phys. A 38, 1 (1985)

    ADS  Google Scholar 

  24. H. Mischler, H.J. Mathieu, D. Landolt, Surf. Interface Anal. 11,182 (1988)

    Google Scholar 

  25. J. Steffen, S. Hofmann, Fres. Z. Anal. Chem. 333, 408 (1989)

    Google Scholar 

  26. R. Kirchheim, B. Heine, H. Fischmeister, S. Hofmann, H. Knote, U. Stolz, Corrosion Sci. 29, 899 (1989)

    Google Scholar 

  27. W. Fredriksson, K. Edstrom, C.-O. Olsson, Corrosion Sci. 52, 2505 (2010)

    Google Scholar 

  28. A. Zalar, S. Hofmann, P. Panjan, Vacuum 48, 625 (1997)

    Google Scholar 

  29. A. Zalar, S. Hofmann, F. Pimentel, P. Panjan, Thin Solid Films 253, 293 (1994)

    ADS  Google Scholar 

  30. A. Zalar, J.Y. Wang, Y.H. Zhao, E.J. Mittemeijer, P. Panjan, Vacuum 71, 11 (2003)

    Google Scholar 

  31. J.Y. Wang, D. He, Y.H. Zhao, E.J. Mittemeijer, Appl. Phys. Lett. 88, 061910 (2006)

    ADS  Google Scholar 

  32. D.He, J.Y. Wang, E.J. Mittemeijer, Appl. Surf. Sci.252, 5470 (2006)

    Google Scholar 

  33. J.Y. Wang, Z.M. Wang, L.P.H. Jeurgens, E.J. Mittemeijer, J. Nanosci. Nanotechnol. 9, 3364 (2009)

    Google Scholar 

  34. P. Lejček, Grain Boundary Segregation in Metals (Springer, Berlin-Heidelberg, 2010)

    Google Scholar 

  35. P. Lejček, S. Hofmann, Crit. Rev. Solid State Mater. Sci. 33, 133 (2008)

    Google Scholar 

  36. S. Hofmann, P. Lejček, Int. J. Mater. Res. 100, 1167 (2009)

    Google Scholar 

  37. P. Lejček, Anal. Chim. Acta 297, 165 (1994)

    Google Scholar 

  38. P. Lejček, S. Hofmann, Surf. Sci. 307-309, 798 (1994)

    Google Scholar 

  39. A. Joshi, D.F. Stein, J. Inst. Metals 99, 178 (1971)

    Google Scholar 

  40. M.P. Seah, J. Phys. F Metal Phys. 10, 1043 (1980)

    ADS  Google Scholar 

  41. S. Szuki, K. Abiko, H. Kimura, Scr. Metall. 15, 1139 (1981)

    Google Scholar 

  42. S. Hofmann, Vacuum 40, 9 (1990)

    Google Scholar 

  43. S. Hofmann, Segregation at Grain Boundaries, in Surface Segregation Phenomena, ed. by P.A. Dowben, A. Miller (CRC Press, Boca Raton, 1990), pp. 107–134

    Google Scholar 

  44. T. Muschik, S. Hofmann, W. Gust, Scr. Metall. 22, 349 (1988)

    Google Scholar 

  45. T. Muschik, S. Hofmann, W. Gust, B. Predel, Appl. Surf. Sci 37, 349 (1989)

    Google Scholar 

  46. T. Muschik, W. Gust, S. Hofmann, B. Predel, Acta Metall. 37, 2917 (1989)

    Google Scholar 

  47. A. Fraczkiewicz, M. Biscondi, J. Phys. 46, C4–497 (1985)

    Google Scholar 

  48. M. Menyhard, B. Blum, C.J. McMahon, Acta Metall. 37, 549 (1989)

    Google Scholar 

  49. L.-S. Chang, E. Rabkin, B. Straumal, P. Lejček, S. Hofmann, W. Gust, Scr. Mater. 37, 729 (1997)

    Google Scholar 

  50. L.-S. Chang, C.-H. Yeh, B.B. Straumal, Rev. Adv. Mater. Sci. 21, 1 (2009)

    Google Scholar 

  51. M.P. Seah, E.D. Hondros, Scr. Metall. 7, 735 (1973)

    Google Scholar 

  52. T. Watanabe, S. Kitamura, S. Karashima, Acta Metall. 28, 455 (1980)

    Google Scholar 

  53. S. Hofmann, P. Lejček, Scr. Metall. Mater. 25, 2259 (1991)

    Google Scholar 

  54. P. Lejček, S. Hofmann, Interface Sci. 1, 161 (1993)

    Google Scholar 

  55. T. Watanabe, Res. Mech. 11, 47 (1984)

    Google Scholar 

  56. S. Kobayashi, S. Tsurekawa, T. Watanabe, G. Palumbo, Scr. Mater. 62, 294 (2010)

    Google Scholar 

  57. P. Lejček, S. Hofmann, V. Paidar, Acta Mater. 51, 3951 (2003)

    Google Scholar 

  58. M.S. Dhlamini, H.C. Swart, J.J. Terblans, C.J. Terreblanche, Surf. Interface Anal. 38, 339 (2005)

    Google Scholar 

  59. U. Otterbein, S. Hofmann, Surf. Interface Anal. 24, 263 (1996)

    Google Scholar 

  60. T. Itoh (ed.), Ion Beam Assisted Film Growth (Elsevier, Amsterdam, 1989)

    Google Scholar 

  61. C. Morant, P. Prieto, M.J. Hernandez, M. Cervera, E. Elizalde, J.M. Sanz, Surf. Interface Anal. 36, 849 (2004)

    Google Scholar 

  62. G.G. Fuentes, E. Elizalde, J.M. Sanz, Surf. Interface Anal. 34, 257 (2002)

    Google Scholar 

  63. H.J. Steffen, S. Hofmann, J. Surf. Anal. 3, 464 (1997)

    Google Scholar 

  64. H.J. Steffen, Surf. Interface Anal. 26, 825 (1998)

    Google Scholar 

  65. R.F. Egerton, Electron Energy-Loss Spectroscopy in the Electron Microscope, 3rd edn. (Springer, Berlin, 2011)

    Google Scholar 

  66. J.F. Watts, Adhesion Science and Technology, in Handbook of Surface and Interface Analysis, ed. by J.C. Rivière, S. Myrha (Marcel Dekker, New York, 1998), pp. 781–834

    Google Scholar 

  67. P.K. Chu, L.H. Li, Mater. Chem. Phys. 96, 253 (2006)

    Google Scholar 

  68. T. Mathew, N.R. Shiju, K. Sreekumar, B.S. Rao, C.S. Gopinath, J. Catal. 210, 405 (2002)

    Google Scholar 

  69. G.S.A.M. Theunissen, A.J.A. Winnbust, A.J. Burggraaf, J. Mater. Sci. 27, 5057 (1992)

    ADS  Google Scholar 

  70. L. Srisombat, O. Khamman, R. Yimnirun, S. Ananta, T.R. Lee, Key Eng. Mater. 421–422, 415 (2010)

    Google Scholar 

  71. L. Sabbatini, P.G. Zambonin, J. Electron Spectrosc. Relat. Phenom. 81, 285 (1996)

    Google Scholar 

  72. C. O’Connell, R. Sherlock, M.D. Ball, B. Aszalos-Kiss, U. Prendergast, T.J. Glynn, Appl. Surf. Sci. 255, 4405 (2009)

    ADS  Google Scholar 

  73. S. Bernath, T. Wagner, S. Hofmann, M. Ruehle, Surf. Sci. 400, 335 (1998)

    Google Scholar 

  74. J.S. Solomon, W.L. Baun, Surf. Sci.51, 228 (1975)

    Google Scholar 

  75. Y. Nakanishi, T. Nagatomi, Y. Takai, Surf. Sci. 602, 3696 (2008)

    ADS  Google Scholar 

  76. P.H. Holloway, J.B. Hudson, Surf. Sci. 43, 123 (1974)

    ADS  Google Scholar 

  77. J.M. Sanz, S. Hofmann, J. Less Common Met. 92, 317 (1983)

    Google Scholar 

  78. J. Steffen, S. Hofmann, Fres. Z. Anal. Chem. 329, 250 (1987)

    Google Scholar 

  79. J.M. Sanz, C. Palacio, Y. Casas, J.M. Martinez-Duart, Surf. Interface Anal. 10, 177 (1987)

    Google Scholar 

  80. J. Steffen, S. Hofmann, Surf. Interface Anal. 11, 617 (1988)

    Google Scholar 

  81. J. Steffen, S. Hofmann, Surf. Sci. 202, L 607 (1988)

    Google Scholar 

  82. S. Hofmann, J. Steffen, Surf. Interface Anal. 14, 59 (1989)

    Google Scholar 

  83. C. Palacio, H.J. Mathieu, Surf. Interface Anal. 16, 178 (1990)

    Google Scholar 

  84. J.-G.Yang, X.-L. Wang, Ch-L. Jiang, H. Xiao, L. Lu, Surf. Interface Anal. 38, 498 (2006)

    Google Scholar 

  85. J.M. Sanz, S. Hofmann, J. Electron Spectrosc. Relat. Phenom. 34, 149 (1984)

    Google Scholar 

  86. K. Nishita, K. Saiki, A. Koma, Appl. Surf. Sci. 169, 180 (2001)

    ADS  Google Scholar 

  87. L. Lu, B. Bai, J.S. Zou, Rare Met. Mater. Eng. 33, 839 (2004)

    Google Scholar 

  88. C. Morant, L. Galan, J. M. Sanz, Surf. Interface Anal. 16, 304 (1990)

    Google Scholar 

  89. A. Lyapin, L.P.H. Jeurgens, P.C.J. Graat, E.J. Mittemeijer, Surf. Interface Anal. 36, 989 (2004)

    Google Scholar 

  90. V. Maurice, G. Despert, S. Zanna, P. Josso, M.-P. Bacos, P. Marcus, Acta Mater. 55, 3315 (2007)

    Google Scholar 

  91. E. Panda, L.P.H. Jeurgens, E. Mittemeijer, J. Appl. Phys. 106, 114913 (2009)

    ADS  Google Scholar 

  92. T. Do, S.J. Splinter, C. Chen, N.S. McIntyre, Surf. Sci. 387, 192 (1997)

    ADS  Google Scholar 

  93. E. Fromm, Kinetics of Metal–Gas Interactions at Low Temperatures (Springer, Berlin-Heidelberg, 1998)

    Google Scholar 

  94. N. Cabrera, N.F. Mott, Rep. Prog. Phys. 12, 163 (1948)

    ADS  Google Scholar 

  95. F.P. Fehlner, J. Electrochem. Soc. 131, 1645 (1984)

    Google Scholar 

  96. G.B. Hoflund, G.R. Corallo, Phys. Rev. B 46, 7110 (1992)

    ADS  Google Scholar 

  97. G.B. Hoflund, H.A.E. Hagelin, J.F. Weaver, G.N. Salaita, Appl. Surf. Sci. 205, 102 (2003)

    ADS  Google Scholar 

  98. Z. Tokei, H. Viefhaus, H.J. Grabke, Appl. Surf. Sci. 165, 23 (2000)

    ADS  Google Scholar 

  99. H.J. Steffen, S. Hofmann, Surf. Interface Anal. 19, 157 (1992)

    Google Scholar 

  100. S. Oswald, F. Oswald, Anal. Bioanal. Chem. 396, 2805 (2010)

    Google Scholar 

  101. C. Palacio, A. Arranz, Surf. Interface Anal. 40, 676 (2008)

    Google Scholar 

  102. S. Hofmann, J.M. Sanz, J. Trace Microprobe Techn. 1, 213 (1982–1983)

    Google Scholar 

  103. S. Hofmann, J.M. Sanz, Fres. Z. Anal. Chem. 314, 215 (1983)

    Google Scholar 

  104. S. Hofmann, J.M. Sanz, Mikrochim. Acta Suppl. 10, 135 (1983)

    Google Scholar 

  105. D.R. Baer, M.H. Engelhard, A.S. Lea, P. Nachimuthu, T.C. Droubay, J. Kim, B. Lee, C. Mathews, R.L. Opila, L.V. Saraf, W.F. Stickle, R.M. Wallace, B.S. Wright, J. Vac. Sci. Technol. A 28, 1060 (2010)

    Google Scholar 

  106. P. Mack, R.G. White, J. Wolstenholme, T. Conard, Appl. Surf. Sci. 252, 8270 (2006)

    ADS  Google Scholar 

  107. S. Oswald, Surf. Interface Anal. 42, 1289 (2010)

    Google Scholar 

  108. O. Renault, L.G. Gosset, D. Rouchon, A. Ermolieff, J. Vac. Sci. Technol. A 20, 1867 (2002)

    ADS  Google Scholar 

  109. R.L. Opila, J. Eng, Prog. Surf. Sci. 69, 125 (2002)

    ADS  Google Scholar 

  110. S. Hofmann, J. Erlewein, Scr. Metall. 10, 857 (1976)

    Google Scholar 

  111. J. Erlewein, S. Hofmann, Surf. Sci. 68, 71 (1977)

    ADS  Google Scholar 

  112. S. Hofmann, J. Erlewein, Surf. Sci. 77, 591 (1978)

    ADS  Google Scholar 

  113. S. Hofmann, Mater. Sci. Eng. 42, 55 (1980)

    Google Scholar 

  114. R. Frech, Ph.D. thesis, University of Suttgart, Stuttgart, 1983

    Google Scholar 

  115. S. Hofmann, R. Frech, Anal. Chem. 57, 716 (1985)

    Google Scholar 

  116. J. duPlessis, E.C.Viljoen, Appl. Surf. Sci. 59, 71 (1992)

    Google Scholar 

  117. M. Militzer, S. Hofmann, Scr. Metall. Mater. 31, 1501 (1994)

    Google Scholar 

  118. M. Militzer, S. Hofmann, J. Vac. Sci. Technol. A 13, 1493 (1995)

    ADS  Google Scholar 

  119. J.Y. Wang, J. duPlessis, J.J. Terblans, G.N. vanWyk, Surf. Sci. 423, 12 (1999)

    Google Scholar 

  120. B. Egert, G. Panzner, Surf. Sci. 118, 345 (1982)

    ADS  Google Scholar 

  121. G. Hetzendorf, P. Varga, Nucl. Instr. Meth. Phys. Res. B 18, 501 (1987)

    Google Scholar 

  122. N. Tabet, J. Electron Spectrosc. Relat. Phenom. 114, 415 (2001)

    Google Scholar 

  123. D.G. Swartzfager, S.B. Ziemecki, M.J. Kelly, J. Vac. Sci Technol. 19, 185 (1981)

    ADS  Google Scholar 

  124. I. Jaeger, Surf. Sci 366, 166–176 (1996)

    ADS  Google Scholar 

  125. W.F. Stickle, The Use of Chemometrics in AES and XPS Data Treatment, in Surface Analysis by Auger and X–ray Photoelectron Spectroscopy, ed. by D. Briggs, J.T. Grant (IM Publications, Chichester, 2003), pp. 377–396

    Google Scholar 

  126. A. Arranz, C. Palacio, Surf. Interface Anal. 22, 93 (1994)

    Google Scholar 

  127. E.R. Malinowski, D.G. Howery, Factor Analysis in Chemistry, 3rd edn. (Wiley, New York, 2002)

    Google Scholar 

  128. S.W. Gaarenstroom, J. Vac. Sci. Technol. 16, 600 (1979)

    ADS  Google Scholar 

  129. ISO/TR 18394:2006, Surface Chemical Analysis – Auger Electron Spectroscopy – Derivation of Chemical Information (Int. Org. for Standardization, Geneva, 2006)

    Google Scholar 

  130. Perkin-Elmer Application Note 9201, 2/92 (1992)

    Google Scholar 

  131. I. Gilmore, M. Wagner, P. Trevorrow, Surf. Interface Anal. 41, 634 (2009)

    Google Scholar 

  132. I. Bertóti, Catalysis Today 181, 95 (2012)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Max-Planck-Institute for Intelligent Systems (formerly Max-Planck-Institute for Metals Research), Heisenbergstrasse 3, 70569, Stuttgart, Germany

    Professor Dr. Siegfried Hofmann

Authors
  1. Professor Dr. Siegfried Hofmann
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Siegfried Hofmann .

Rights and permissions

Reprints and permissions

Copyright information

© 2013 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Hofmann, S. (2013). Typical Applications of AES and XPS. In: Auger- and X-Ray Photoelectron Spectroscopy in Materials Science. Springer Series in Surface Sciences, vol 49. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-27381-0_9

Download citation

Publish with us

Policies and ethics

Search

Navigation