Chapter

Auger- and X-Ray Photoelectron Spectroscopy in Materials Science

Volume 49 of the series Springer Series in Surface Sciences pp 11-41

Date:

Instrumentation

  • Siegfried HofmannAffiliated withMax-Planck-Institute for Intelligent Systems (formerly Max-Planck-Institute for Metals Research) Email author 

* Final gross prices may vary according to local VAT.

Get Access

Abstract

The general arrangement of the elements of any surface analysis instrument (here electron spectrometer) is shown in Fig.1.2. Figure 2.1a shows a cross section of a typical XPS instrument and Fig.2.1b that of a typical AES spectrometer. The main parts are (1) the specimen on a sample holder with x–y–z movement stage, (2) an excitation source (X-ray source for XPS, electron gun for AES), (3) the electron energy analyzer with detector, and (4) an auxiliary ion gun. Whereas these elements are mounted within a vacuum chamber, the detection and steering electronics are placed outside in the laboratory room.