Abstract
We review a recent invention of single-layer one-dimensional high-index-contrast subwavelength grating (HCG) and its incorporation into a VCSEL structure. The HCG is approximately 50 times thinner than a conventional distributed Bragg reflector (DBR), but offers higher reflectivity with a much broader spectral width. It provides lithographically defined control of polarization, transverse mode and emission wavelength. Using this ultrathin reflector, the tunable mirror in a micro-mechanical HCG-VCSELs are fabricated with a \(10^{4}\) times volume reduction and more than two orders of magnitude improved tuning speed.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
K. Iga, Surface-emitting laser—its birth and generation of new optoelectronics field. IEEE J. Select. Topics Quantum Electron. 6, 1201–1215 (2000)
F. Koyama, H. Uenohara, T. Sakaguchi, K. Iga, GaAlAs/GaAs MOCVD growth for surface emitting laser. Jpn. J. Appl. Phys. Part 1 26, 1077–1081 (1987)
J.L. Jewell, S.L. McCall, Y.H. Lee, A. Scherer, A.C. Gossard, J.H. English, Lasing characteristics of GaAs microresonators. Appl. Phys. Lett. 54,1400 (1989)
L.A. Coldren, R.S. Geels, S.W. Corzine, J.W. Scott, Efficient vertical-cavity lasers. Opt. Quantum Electron. 24, 105–119 (1992)
M. Orenstein, A. Von Lehmen, C.J. Chang-Hasnain, N.G. Stoffel, L.T. Florez, J.P. Harbison, J. Wullert, A. Scherer, Matrix addressable vertical cavity surface emitting laser array. Electron. Lett. 27(5), 437–438 (1991)
C.J. Chang-Hasnain, J.P. Harbison, C.E. Zah, M.W. Maeda, L.T. Florez, N.G. Stoffel, T.P. Lee, Multiple wavelength tunable surface emitting laser arrays. IEEE J. Quantum Electron. 27(6), 1368–1376 (1991)
C.J. Chang-Hasnain, J.P. Harbison, G. Hasnain, A. Von Lehmen, L.T. Florez, N.G. Stoffel, Dynamic, polarization, and transverse mode characteristics of vertical cavity surface emitting lasers. IEEE J. Quantum Electron. 27(6), 1402–1409 (1991)
M.W. Maeda, C.J. Chang-Hasnain, J.S. Patel, C. Lin, H.A. Johnson, J.A. Walker, Use of a multi-wavelength surface-emitting laser array in a 4-channel wavelength-division-multiplexed system experiment. IEEE Photon. Technol. Lett. 3(3), 268–269 (1991)
K.H. Hahn, M.R. Tan, S.Y. Wang, Intensity noise of large area vertical cavity surface emitting lasers in multimode optical fibre links. Electron. Lett. 30(2), 139–140 (1994)
C.F.R. Mateus, M.C.Y. Huang, Y. Deng, A.R. Neureuther, C.J. Chang-Hasnain, Ultrabroadband mirror using low-index cladded subwavelength grating. IEEE Photon. Technol. Lett. 16(2), 518–520 (2004)
C.F.R. Mateus, M.C.Y. Huang, L. Chen, C.J. Chang-Hasnain, Y. Suzuki, Broadband mirror (1.12–1.62 \(\upmu {\rm m}\)) using single-layer sub-wavelength grating. IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004)
C.J. Chang-Hasnain, C.F.R. Mateus, M.C.Y. Huang, Ultra broadband mirror using subwavelength grating, US Patent 7,304,781
M.C.Y. Huang, Y. Zhou, C.J. Chang-Hasnain, A surface-emitting laser incorporating a high-index-contrast subwavelength grating. Nat. Photon. 1, 119–122 (2007)
C. Chang-Hasnain, Y. Zhou, M. Huang, C. Chase, High-contrast grating VCSELs. IEEE J. Select. Topics Quantum Electron. 15, 869–878 (2009)
C. Chase, Y. Zhou, C. Chang-Hasnain, Size effect of high contrast gratings in VCSELs. Opt. Express 17, 24002–24007 (2009)
C. Chase, Y. Rao, W. Hofmann, C.J. Chang-Hasnain, 1550 nm high contrast grating VCSEL. Opt. Express 18(15), 15461–15466 (2010)
V. Karagodsky, B. Pesala, C. Chase, W. Hofmann, F. Koyama, C.J. Chang-Hasnain, Monolithically integrated multi-wavelength VCSEL arrays using high-contrast gratings. Opt. Express 18(2), 694–699 (2010)
F. Lu, F.G. Sedgwick, V. Karagodsky, C. Chase, C.J. Chang-Hasnain, Planar high-numerical-aperture low-loss focusing reflectors and lenses using subwavelength high contrast gratings. Opt. Express 18(12), 12606–12614 (2010)
D. Fattal, J. Li, Z. Peng, M. Fiorentino, R.G. Beausoleil, Flat dielectric grating reflectors with focusing abilities. Nat. Photon. 4, 466–470 (2010)
M.C.Y. Huang, Y. Zhou, C.J. Chang-Hasnain, A nanoelectromechanical tunable laser. Nat. Photon. 2, 180–184 (2008)
P. Gilet, N. Olivier, P. Grosse, K. Gilbert, A. Chelnokov, I.-S. Chung, J. Mørk, High-index-contrast subwavelength grating, in Vertical-Cavity Surface-Emitting Lasers XIV, Proceedings of SPIE, vol. 7615 (2010), p. 76150-1
S. Boutami, B. Ben Bakir, J.-L. Leclercq, P. Viktorovitch, Compact and polarization controlled \(1.55\,\upmu\hbox{m}\) vertical-cavity surface emitting laser using single-layer photonic crystal mirror. Appl. Phys. Lett. 91(7), 071105-1–071105-3 (2007)
S. Boutami, B. Benbakir, X. Letartre, J.L. Leclercq, P. Regreny, P. Viktorovitch, Ultimate vertical Fabry-Perot cavity based on single-layer photonic crystal mirrors. Opt. Express 15(19), 12443–12449 (2007)
I.-S. Chung, J. Mørk, P. Gilet, A. Chelnokov, Subwavelength grating-mirror VCSEL with a thin oxide gap. IEEE Photon. Technol. Lett. 20(2), 105–107 (2008)
A. Haglund, S.J. Gustavsson, J. Vukusic, P. Jedrasik, A. Larsson, High-power fundamental-mode and polarisation stabilised VCSELs using sub-wavelength surface grating. Electron Lett. 41, 805–807 (2005)
S. Goeman, S. Boons, B. Dhoedt, K. Vandeputte, K. Caekebeke, P.V. Daele, R. Baets, First demonstration of highly reflective and highly polarization selective diffraction gratings (GIRO-gratings) for long-wavelength VCSELs. IEEE Photon. Technol. Lett. 10, 1205–1207 (1998)
L. Zhuang, S. Schablitsky, R.C. Shi, S.Y. Chou, Fabrication and performance of thin amorphous Si subwavelength transmission grating for controlling vertical cavity surface emitting laser polarization. J. Vac. Sci. Technol. B 14, 4055–4057 (1996)
M.G. Moharam, T.K. Gaylord, Rigorous coupled-wave analysis of planar-grating diffraction. J. Opt. Soc. Am. 71, 811–818 (1981)
V. Karagodsky, F. Sedgwick, C.J. Chang-Hasnain, Theoretical analysis of subwavelength high contrast grating reflectors. Opt. Express 18(16), 16973–16988 (2010)
V. Karagodsky, C. Chase, C.J. Chang-Hasnain, Matrix Fabry–Perot resonance mechanism in high-contrast gratings. Opt. Lett. 36(9), 1704–1706 (2011)
V. Karagodsky, F.G. Sedwick, C.J. Chang-Hasnain, New physics of subwavelength high contrast gratings. in Proceedings of Conf. on Lasers and Electro-Optics, CLEO ’11. Baltimore, MD, May 2011, paper QThD2
Y. Zhou, M.C.Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F.G. Sedgwick, C.J. Chang-Hasnain, High-index-contrast grating (HCG) and its applications in optoelectronic devices. IEEE J. Select. Topics Quantum Electron. 15(5), 1485–1499 (2009)
C.J. Chang-Hasnain, VCSEL for metro communications, Chap. 13 in Optical Fiber Communications IV A: Components, ed. by I. Kaminow, T. Li (Academic Press, New York, 2002), pp. 666–698
A. Mizutani, N. Hatori, N. Nishiyama, F. Koyama, K. Iga, InGaAs/GaAs vertical-cavity surface emitting laser on GaAs (311)B substrate using carbon auto-doping. Jpn. J. Appl. Phys. 37, 1408–1412 (1998)
S.J. Schablitsky, Z. Lei, R.C. Shi, S.Y. Chou, Controlling polarization of vertical-cavity surface-emitting lasers using amorphous silicon subwavelength transmission gratings. Appl. Phys. Lett. 69, 7–9 (1996)
J.M. Ostermann, P. Debernardi, R. Michalzik, Optimized integrated surface grating design for polarization-stable VCSELs. IEEE J. Quantum Electron. 42, 690–698 (2006)
A. Haglund, J.S. Gustavsson, J. Bengtsson, P. Jedrasik, A. Larsson, Design and evaluation of fundamental-mode and polarization-stabilized VCSELs with a subwavelength surface grating. IEEE J. Quantum Electron. 42, 231–240 (2006)
R. Michalzik, J.M. Ostermann, P. Debernardi, Polarization-stable monolithic VCSELs, in Vertical-Cavity Surface-Emitting Lasers XII, ed. by C. Lei, J.K. Guenter, Proceedings of SPIE, vol. 6908 (2008), pp. 69080A-1–69080A-16
K.D. Choquette, K.M. Geib, C.I.H. Ashby, R.D. Twesten, O. Blum, H.Q. Hou, D.M. Follstaedt, B.E. Hammons, D. Mathes, R. Hull, Advances in selective wet oxidation of AlGaAs alloys. IEEE J. Select. Topics Quantum Electron. 3, 916–926 (1997)
Y.A. Wu, G.S. Li, W. Yuen, C.J. Chang-Hasnain, C. Caneau, High-yield processing and single-mode operation of passive antiguide region vertical-cavity lasers. IEEE J. Select. Topics Quantum Electron. 3, 429–434 (1997)
A.J. Danner, J.J. Raftery Jr., N. Yokouchi, K.D. Choquette, Transverse modes of photonic crystal vertical-cavity lasers. Appl. Phys. Lett. 84, 1031 (2004)
M.C.Y. Huang, Y. Zhou, C.J. Chang-Hasnain, Single mode high-contrast subwavelength grating vertical cavity surface emitting lasers. Appl. Phys. Lett. 92, 171108 (2008)
Y. Zhou, M.C.Y. Huang, C.J. Chang-Hasnain, Large fabrication tolerance for VCSELs using high-contrast grating. IEEE Photon. Technol. Lett. 20, 434–436 (2008)
C. Chang-Hasnain, M. Maeda, N. Stoffel, J. Harbison, L. Florez, J. Jewell, Surface emitting laser arrays with uniformly separated wavelengths. Electron. Lett. 26, 940–941 (1990)
L. Eng, K. Bacher, W. Yuen, J. Harris Jr., C. Chang-Hasnain, Multiple wavelength vertical cavity laser arrays on patterned substrates. IEEE J. Quantum Electron. 1, 624–628 (1995)
F. Koyama, T. Mukaihara, Y. Hayashi, N. Ohnoki, N. Hatori, K. Iga, Wavelength control of vertical cavity surface-emitting lasers by using nonplanar MOCVD. IEEE Photon. Technol. Lett. 7, 10–12 (1995)
T. Wipiejewski, M. Peters, E. Hegblom, L. Coldren, Vertical-cavity surface-emitting laser diodes with post-growth wavelength adjustment. IEEE Photon. Technol. Lett. 7, 727–729 (1995)
W. Hofmann, E. Wong, G. Böhm, M. Ortsiefer, N.H. Zhu, M.C. Amann, \(1.55\,\upmu\hbox{m}\) VCSEL arrays for high-bandwidth WDM-PONs. IEEE Photon. Technol. Lett. 20, 291–293 (2008)
M.S. Wu, E.C. Vail, G.S. Li, W. Yuen, C.J. Chang-Hasnain, Widely and continuously tunable micromachined resonant cavity detector with wavelength tracking. IEEE Photon. Technol. Lett. 8(1), 98–100 (1996)
C.J. Chang-Hasnain, Tunable VCSEL. IEEE J. Select. Topics Quantum Electron. 6, 978–987 (2000)
S. Decai, W. Fan, P. Kner, J. Boucart, T. Kageyama, Z. Dongxu, R. Pathak, R.F. Nabiev, W. Yuen, Long wavelength-tunable VCSELs with optimized MEMS bridge tuning structure. IEEE Photon. Technol. Lett. 16, 714–716 (2004)
F. Riemenschneider, M. Maute, H. Halbritter, G. Boehm, M.C. Amann, P. Meissner, Continuously tunable long-wavelength MEMS-VCSEL with over 40 nm tuning range. IEEE Photon. Technol. Lett. 16, 2212–2214 (2004)
M.C.Y. Huang, K.B. Cheng, Y. Zhou, B. Pesala, C.J. Chang-Hasnain, A.P. Pisano, Demonstration of piezoelectric actuated GaAs-based MEMS tunable VCSEL. IEEE Photon. Technol. Lett. 18, 1197–1199 (2006)
B. Kögel, H. Halbritter, S. Jatta, M. Maute, G. Böhm, M.-C. Amann, M. Lackner, M. Schwarzott, F. Winter, P. Meissner, Simultaneous spectroscopy of \(\hbox{NH}_{3} \) and CO using a \(>50\,\hbox{nm}\) continuously tunable MEMS-VCSEL. IEEE Sens. J. 7(11), 1483–1489 (2007)
H. Halbritter, C. Sydlo, B. Kögel, F. Riemenschneider, H.L. Hartnagel, P. Meissner, Impact of micromechanics on the linewidth and chirp performance of MEMS-VCSELs. IEEE J. Select. Topics Quantum Electron. 13(2), 367–373 (2007)
S. Jatta, B. Kögel, M. Maute, K. Zogal, F. Riemenschneider, G. Böhm, M.-C. Amann, P. Meißner, Bulk-micromachined VCSEL at \(1.55\,\upmu\hbox{m}\) with 76 nm single-mode continuous tuning range. IEEE Photon. Technol. Lett. 21(24), 1822–1824 (2009)
Acknowledgments
The author wishes to acknowledge major contributions from former and current graduate students at UC Berkeley, C. Mateus, M. Huang, Y. Zhou, C. Chase, V. Karagodsky and Y. Rao; and fruitful collaborations with Profs. Fumio Koyama and Markus Amann. She also thanks the support of a National Security Science and Engineering Faculty Fellowship and National Science Foundation through CIAN NSF ERC under grant #EEC-0812072.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2013 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Chang-Hasnain, C.J. (2013). High-Contrast Grating VCSELs. In: Michalzik, R. (eds) VCSELs. Springer Series in Optical Sciences, vol 166. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-24986-0_9
Download citation
DOI: https://doi.org/10.1007/978-3-642-24986-0_9
Published:
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-24985-3
Online ISBN: 978-3-642-24986-0
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)