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Femtosecond Laser Micromachining pp 421–441Cite as

Microstructuring of Photosensitive Glass

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Part of the book series: Topics in Applied Physics ((TAP,volume 123))

Abstract

Femtosecond laser direct writing followed by thermal treatment and successive wet etching can form three-dimensional (3D) hollow microstructures inside photosensitive glass. The principles and procedures of this process are explained. Next, the fabrication of 3D microfluidic structures and optical microcomponents is reviewed. Finally, the manufacture of functional microchip devices such as a microfluidic dye laser, optofluidics, and a nano-aquarium by integrating the microcomponents in a single glass chip is demonstrated.

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Author information

Authors and Affiliations

  1. Laser Technology Laboratory, RIKEN – Advanced Science Institute, Wako, Saitama, 351–0198, Japan

    Koji Sugioka

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  1. Koji Sugioka
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Correspondence to Koji Sugioka .

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Editors and Affiliations

  1. , IFN-CNR, Politecnico di Milano, P.zza L. da Vinci 32, Milano, 20133, Italy

    Roberto Osellame

  2. , Department of Physics, Politecnico di Milano, Piazza Leonardo da Vinci 32, Milano, 20133, Italy

    Giulio Cerullo

  3. , Department of Physics, Politecnico di Milano, P.zza L. Da Vinci 32, Milano, 20133, Italy

    Roberta Ramponi

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© 2012 Springer-Verlag Berlin Heidelberg

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Sugioka, K. (2012). Microstructuring of Photosensitive Glass. In: Osellame, R., Cerullo, G., Ramponi, R. (eds) Femtosecond Laser Micromachining. Topics in Applied Physics, vol 123. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-23366-1_15

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  • DOI: https://doi.org/10.1007/978-3-642-23366-1_15

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-23365-4

  • Online ISBN: 978-3-642-23366-1

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