Abstract
This chapter describes LIBS investigations for a spatially resolved microanalysis of samples using the capability to focus laser radiation to spot sizes below 10μm. Applications of the developed method will be presented in Sect.18.3.
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Noll, R. (2012). Spatially Resolved Analysis. In: Laser-Induced Breakdown Spectroscopy. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-20668-9_15
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