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Springer Handbook of Lasers and Optics pp 1255–1283Cite as

Interferometry

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Abstract

The intention of this chapter is to provide a fast and comprehensive overview of the principles of interferometry and the various types of interferometer, including interferogram evaluation and applications. Due to the age and the importance of the subject, you can find a number of monographs [16.1,2,3,4] and book chapters [16.5] in the literature. The number of original papers on optical interferometry is far too large to even attempt complete coverage in this chapter. Whenever possible, review papers are cited. Original papers are cited according to their aptness as starting points into the subject. This, however, reflects my personal judgment. Even if you do not share my opinion, you should find the references therein useful.

Section 16.1 presents a short introduction to the interference of light covering two-beam and multiple-beam interference, vector interference, and partial coherence. Section 16.2 is devoted to the various types of interferometry, divided into wavefront-division and amplitude-division interferometers, including polarization interferometry. The last Sect. 16.3 covers the various methods of obtaining quantitative phase values.

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Abbreviations

2-D:

two-dimensional

AD:

analog-to-digital

AOM:

acoustooptic modulator

CCD:

charge-coupled device

DIC:

differential interference contrast

DUV:

deep ultraviolet

EUV:

extreme ultraviolet

FROG:

frequency-resolved optical gating

FWHM:

full width at half-maximum

HR:

highly reflecting

IR:

infrared

LCD:

liquid-crystal display

NA:

numerical aperture

PSI:

phase-shifting interferometry

UV:

ultraviolet

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  1. Corporate Research & Technology, Carl Zeiss AG, Carl-Zeiss-Str. 22, 73447, Oberkochen, Germany

    Michael Totzeck

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  1. Michael Totzeck
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Correspondence to Michael Totzeck .

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  1. Department of Physics, University of Kassel, Heinrich-Plett-Str. 40, 34132, Kassel, Germany

    Frank Träger

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Totzeck, M. (2012). Interferometry. In: Träger, F. (eds) Springer Handbook of Lasers and Optics. Springer Handbooks. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-19409-2_16

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