Abstract
The increased use of areal surface topography measuring instruments in the past ten years has led to a range of optical instruments being developed and becoming commercially available. Such instruments make use of sophisticated mathematical algorithms to process the raw height information and transform it into topography data that are used for visualisation and calculation of areal surface texture parameters. Optical areal surface topography measuring instruments are powerful and flexible tools of a complex design, which makes them difficult to calibrate. Because the calibration process is an essential part of quality control during production it is very difficult for an industrial user to exploit the benefits of these instruments. This chapter endeavours to provide some guidance on calibrating optical areal surface topography measuring instruments according to the ISO 25178 suite of specification standards on areal surface topography measurement. Mainly the calibration of the geometrical characteristics of the instruments is discussed with the addition of some brief comments on the effect of filtration and areal surface texture parameters calculation.
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References
BIPM, IEC, IFCC, ISO, IUPAC, IUPAP and OIML, International Vocabulary of Metrology – Basic and General Concepts and Associated Terms VIM. In: JCGM 200, 3rd edn. (2008a)
BIPM, IEC, IFCC, ISO, IUPAC, IUPAP and OIML, Guide to the expression of uncertainty in measurement, Bureau International des Poids et Mesures JCGM 100 (2008b)
Blunt, L., Jiang, X., Leach, R.K., Harris, P.M., Scott, P.: The development of user-friendly software measurement standards for surface topography software assessment. Wear 264, 389–393 (2008)
Bui, S., Vorburger, T.V.: Surface metrology algorithm testing system. Precision Engineerin 31, 218–225 (2006)
Coupland, J.M., Lobera, J.: Holography, tomography and 3D microscopy as linear filtering operations. Meas. Sci. Technol. 19, 74012 (2008)
Danzl, R., Helmli, F., Rubert, P., Prantl, M.: Optical roughness measurements on specially designed roughness standards. In: Proc. SPIE, vol. 7102, p. 71020M (2008)
Fujii, A., Suzuki, H., Yanagi, K.: A study on response properties of surface texture measuring instruments in terms of surface wavelength. In: Proc. ASPE Summer Topical Meeting on Precision Interferometric Metrology, Ashville, USA (2010)
Gao, F., Leach, R.K., Petzing, J., Coupland, J.M.: Surface measurement errors using commercial scanning white light interferometers. Meas. Sci. Technol. 19, 015303 (2008)
Giusca, C., Forbes, A.B., Leach, R.K.: A virtual machine-based uncertainty evaluation for a traceable areal surface texture measuring instrument. Measurement (accepted for publication 2011)
Giusca, C., Leach, R.K.: The calibration of stylus instruments for measuring areal surface texture. NPL Good practice guide. National Physical Laboratory (2011)
Haitjema, H., Morel, M.A.A.: Noise bias removal in profile measurements. Measurement 38, 21–29 (2005)
ISO 5436-1, Geometrical product specifications (GPS) - Surface texture: Profile method; Measurement standards – Part 1: Material measures. International Organization for Standardization (2000)
ISO 25178-601, Geometrical product specifications (GPS) - Surface texture: Areal - Part 601: Nominal characteristics of contact (stylus) instruments. International Organization for Standardization (2010)
ISO/FDIS 25178-3, Geometrical product specifications (GPS) - Surface texture: Areal - Part 3: Specification operators. International Organization for Standardization (2011)
ISO/DIS 25178-603, Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase shifting interferometric microscopy) instruments. International Organization for Standardization (2011)
ISO/CD 25178-70, Geometrical product specifications (GPS) - Surface texture: Areal - Part 70: Material measures. International Organization for Standardization (2011)
Ismail, M.F., Yanagi, K., Fujii, A.: An outlier correction procedure and its application to areal surface data measured by optical instruments. Meas. Sci. Technol. 21, 105105 (2010)
Jung, L., Spranger, B., Krüger-Sehm, R., Krystek, M.: Reference software for roughness analysis – features and results. In: Proc. XI Int. Colloq. Surfaces, Chemnitz, Germany, vol. 170, pp. 164–170 (February 2004)
Krüger-Sehm, R., Krystek, M.: Uncertainty analysis of roughness measurement. In: Proc. X Int. Colloq. Surfaces, Chemnitz, Germany (January/February 2000) (in additional papers)
Leach, R.K.: Calibration, traceability and uncertainty issues in surface texture metrology. NPL Report CLM 7 (1999)
Leach, R.K.: Traceable measurement of surface texture at the National Physical Laboratory using NanoSurf IV. Meas. Sci. Technol. 11, 1162–1172 (2000)
Leach, R.K.: The measurement of surface texture using stylus instruments. NPL Good practice guide No. 37. National Physical Laboratory (2001)
Leach, R.K., Chetwynd, D., Blunt, L., Haycocks, J., Harris, P., Jackson, K., Oldfied, S., Reilly, D.: Recent advances in traceable nanoscale dimension and force metrology in the UK. Meas. Sci. Technol. 17, 467–476 (2006)
Leach, R.K.: Fundamental principles of engineering nanometrology. Elsevier, Amsterdam (2009)
Leach, R.K., Giusca, G., Naoi, K.: Development and characterization of a new instrument for the traceable measurement of areal surface texture. Meas. Sci. Technol. 20, 125102 (2009)
Leach, R.K., Haitjema, H.: Limitations and comparisons of surface texture measuring instruments. Meas. Sci. Technol. 21, 032001 (2010)
Muralikrishnan, B., Raja, J.: Computational surface and roundness metrology. Springer, Heidelberg (2008)
Palodhi, K., Coupland, J.M., Leach, R.K.: A linear model of fringe generation and analysis in coherence scanning interferometry. In: Proc. ASPE Summer Topical Meeting on Precision Interferometric Metrology, Ashville, USA (2010)
Ritter, M., Dziomba, T., Kranzmann, A., Koenders, L.: A landmark-based 3D calibration strategy for SPM. Meas. Sci. Technol. 18, 404–414 (2007)
Thompsen-Schmidt, P., Krüger-Sehm, R., Wolff, H.: Development of a new stylus contacting system for roughness measurement. In: Proc. XI Int. Colloq. Surfaces, Chemnitz, Germany, February 2004, pp. 79–86 (2004)
Thomsen-Schmidt, P., Krüger-Sehm, R.: Calibration of an electromagnetic force compensation system. In: Proc. XII Int. Colloq. Surf., Chemnitz, Germany, January 28-29, pp. 323–327 (2008)
VDI/VDE 2617 Part 6.2. Accuracy of coordinate measuring machines. Characteristics and their testing. Guideline for the application of DIN EN ISO 10360 to coordinate measuring machines with optical distance sensors (October 2004)
Whitehouse, D.J.: Some theoretical aspects of error separation techniques in surface metrology. J. Phys. E: Sci. Instrum. 9, 531 (1976)
Weckenmann, A., Tan, Ö., Hoffmann, J., Sun, Z.: Practice-oriented evaluation of lateral resolution for micro- and nanometre measurement techniques. Meas. Sci. Technol. 20, 65103 (2009)
Wilkening, G., Koenders, L.: Nanoscale calibration standards and methods. Wiley-VCH, Chichester (2005)
Yashchuk, V.V., McKinney, W.R., Takacs, P.Z.: Binary psuedorandom grating standard for calibration of surface profilometers. Opt. Eng. 47, 073602 (2008)
Xu, M., Dziomba, T., Dai, G., Koenders, L.: Self-calibration of scanning probe microscope: mapping the errors of the instrument. Meas. Sci. Technol. 19, 025105 (2008)
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Leach, R., Giusca, C. (2011). Calibration of Optical Surface Topography Measuring Instruments. In: Leach, R. (eds) Optical Measurement of Surface Topography. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-12012-1_4
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DOI: https://doi.org/10.1007/978-3-642-12012-1_4
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