Abstract
In the following some basic aspects of power device production technology will be described. The selection was done with the aim to describe the process steps which are important for the understanding of the power device operation and limitations.
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Lutz, J., Schlangenotto, H., Scheuermann, U., De Doncker, R. (2010). Short Introduction to Power Device Technology. In: Semiconductor Power Devices. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-11125-9_4
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