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Laser Precision Microfabrication pp 63–89Cite as

Laser Devices and Optical Systems for Laser Precision Microfabrication

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Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 135))

Abstract

This chapter provides introductory explanation on various laser devices and optical systems for laser precision microfabrication regarding their basic operation principles and examples of performance capability. Emphasis is placed on compact and efficient diode-pumped high-brightness solid-state lasers capable of a variety of lasing operations from continuous wave to ultrafast pulse generation. The following optical systems are discussed: beam shaping optics, beam scanning optics, spatial light modulators, optical frequency convertors, and optics for beam characterization and process control.

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References

  1. O. Svelto, in Principles of Lasers, 4th edn. (translated from Italian), ed. by D.C. Hanna (Plenum Press, New York, 1998) pp. 1–15

    Google Scholar 

  2. T.R. Kugler, in LIA Handbook of Laser Materials Processing, ed. by J.F. Ready, D.F. Farson (Laser Institute of America, Orland, FL, 2001), pp. 27–44

    Google Scholar 

  3. W.J. Witterman, in Handbook of Laser Technology and Applications, ed. by C. Webb, J. Jones. Laser Design and Laser Systems, vol. 2 (Institute of Physics Publishing, Bristol, Philadelphia, 2004), p. 791

    Google Scholar 

  4. H. von Bergmann, U. Rebhan, U. Stamm, in Excimer Laser Technology, ed. by D. Basting, G. Marowsky (Springer, Berlin, Heidelberg, New York, 2005), p. 48

    Google Scholar 

  5. M. Wehner, J. Ihlemann, in Excimer Laser Technology, ed. by D. Basting, G. Marowsky (Springer, Berlin, Heidelberg, New York, 2005), p. 155

    Google Scholar 

  6. L. Herbst, I. Klaft, K. Schmidt, I. Bragin, H.-S. Albrecht, Proc. SPIE 6459, 64590I (2007)

    Article  ADS  Google Scholar 

  7. W. Koechner, Solid-State Laser Engineering, 6th edn. (Springer, Berlin, Heidelberg, New York, 2006), pp. 38–101

    Google Scholar 

  8. R. Iffländer, Solid-State Lasers for Materials Processing (Springer, Berlin, Heidelberg, New York, 2001), pp. 257–318

    Google Scholar 

  9. D.R. Hall, in Handbook of Laser Technology and Applications, ed. by C. Webb, J. Jones. Laser Design and Laser Systems, vol. 2 (Institute of Physics Publishing, Bristol, Philadelphia, 2004), p. 751

    Google Scholar 

  10. F. Villarreal, P.R. Murray, H.J. Baker, D.R. Hall, Appl. Phys. Lett. 78, 2276 (2001)

    Article  ADS  Google Scholar 

  11. C.J. Moorhouse, F. Villarreal, J.J. Wendland, H.J. Baker, D.R. Hall, D.P. Hand, Proc. SPIE, 5339, 276 (2004)

    Article  ADS  Google Scholar 

  12. C.J. Moorhouse, F. Villarreal, J.J. Wendland, H.J. Baker, D.R. Hall, D.P. Hand, Proc. SPIE, 5827, 438 (2005)

    Article  ADS  Google Scholar 

  13. D.L. Sipes, Appl. Phys. Lett. 47, 74 (1985)

    Article  ADS  Google Scholar 

  14. R.L. Byer, Science 239, 742 (1988)

    Article  ADS  Google Scholar 

  15. W. Koechner, Solid-State Laser Engineering, 6th edn. (Springer, Berlin, Heidelberg, New York, 2006), pp. 423–487

    Google Scholar 

  16. L. McDonagh, R. Knappe, A. Nebel, R. Wallenstein, Proc. SPIE 6451, 64510F (2007)

    Article  ADS  Google Scholar 

  17. W.F. Krupke, IEEE J. Sel. Top. Quant. Electron. 6, 1287 (2000)

    Article  Google Scholar 

  18. A. Brenier, G. Boulon, J. Alloy. Comp. 323–324, 210 (2001)

    Article  Google Scholar 

  19. A. Giesen, J. Speiser, IEEE J. Sel. Top. Quant. Electron. 13, 598 (2007)

    Article  Google Scholar 

  20. J. Dong, A. Shirakawa, K. Ueda, H. Yagi, T. Yanagitani, A.A. Kaminskii, Proc. SPIE 6451, 645118 (2007)

    Article  Google Scholar 

  21. A. Tünnermann, H. Zellmer, in Handbook of Laser Technology and Applications, ed. by C. Webb, J. Jones. Laser Design and Laser Systems, vol. 2 (Institute of Physics Publishing, Bristol, Philadelphia, 2004), p. 977

    Google Scholar 

  22. S. Maryashin, A. Unt, V.P. Gapontsev, Proc. SPIE 6102, 61020O (2006)

    Article  ADS  Google Scholar 

  23. R. Horley, S. Norman, M.N. Zervas, Proc. SPIE 6738, 67380K (2007)

    Article  ADS  Google Scholar 

  24. R.B. Chesler, M.A. Karr, J.E. Geusic, Proc. IEEE 58, 1899 (1970)

    Article  Google Scholar 

  25. C.X. Wang, G.Y. Wang, A.V. Hicks, D.R. Dudley, H.Y. Pang, N. Hodgson, Proc. SPIE 6100, 610019 (2006)

    Article  Google Scholar 

  26. M. Roth, M. Tseitlin, N. Angert, Glass Phys. Chem. 31, 86 (2005)

    Article  Google Scholar 

  27. A.I. Bishop, P.F. Barker, Rev. Sci. Instrum. 77, 044701 (2006)

    Article  ADS  Google Scholar 

  28. D. Maydan, R.B. Chesler, J. Appl. Phys. 42, 1031 (1971)

    Article  ADS  Google Scholar 

  29. C. Stolzenburg, A. Voss, T. Graf, M. Larinov, A. Giesen, Proc. SPIE 6871, 68710H (2008)

    Article  ADS  Google Scholar 

  30. A. Killi, J. Dörrening, U. Morgner, M. Lederer, J. Frei, D. Kopf, Optic. Express 13, 1916 (2005)

    Article  ADS  Google Scholar 

  31. W. Koechner, Solid-State Laser Engineering, 6th edn. (Springer, Berlin, Heidelberg, New York, 2006), pp. 534–586

    Google Scholar 

  32. D.T. Reid, in Handbook of Laser Technology and Applications, ed. by C. Webb, J. Jones. Laser Design and Laser Systems, vol. 2 (Institute of Physics Publishing, Bristol, Philadelphia, 2004), p. 1273

    Google Scholar 

  33. U. Keller, K.J. Weingarten, F.X. Kärtner, D. Kopf, B. Braun, I.D. Jung, R. Fluck, C. Hönninger, N. Matuschek, A. Aus der Au, IEEE J. Sel. Top. Quant. Electron. 2, 455 (1996)

    Google Scholar 

  34. J.V. Rudd, G. Korn, S. Kane, J. Squier, G. Mourou, Opt. Lett. 18, 2044 (1993)

    Article  ADS  Google Scholar 

  35. T.B. Norris, Opt. Lett. 17, 1009 (1992)

    Article  ADS  Google Scholar 

  36. K.-H. Hong, S. Kostritsa, T.J. Yu, J.H. Sung, I.W. Choi, Y.-C. Boh, D.-K. Ko, J. Lee, Optic. Express 14, 970 (2006)

    Article  ADS  Google Scholar 

  37. G. Matras, N. Huot, E. Baubeau, E. Audouard, Optic. Express 15, 7528 (2007)

    Article  ADS  Google Scholar 

  38. J. Kleinbauer, R. Knappe, R. Wallenstein, Appl. Phys. B 81, 163 (2005)

    Article  ADS  Google Scholar 

  39. D.A. Clubley, A.S. Bell, G. Friel, Proc. SPIE 6871, 68711D (2008)

    Article  ADS  Google Scholar 

  40. R. Knappe, A. Nebel, Proc. SPIE 6871, 687121 (2008)

    Article  Google Scholar 

  41. J. Kleinbauer, D. Eckert, S. Weiler, D.H. Sutter, Proc. SPIE 6871, 68711B (2008)

    Article  ADS  Google Scholar 

  42. S.V. Marchese, C.R.E. Baer, A.G. Engqvist, S. Hashimoto, D.J.H.C. Maas, M. Golling, T. Südmeyer, U. Keller, Optic. Express 16, 6397 (2008)

    Article  ADS  Google Scholar 

  43. J. Neuhau, J. Kleinbauer, A. Kikki, S. Weiler, D. Sutter, T. Dekorsy, Opt. Lett. 33, 726 (2008)

    Article  ADS  Google Scholar 

  44. F. Röser, D. Schimpf, O. Schmidt, B. Ortac, K. Rademaker, J. Limpert, A. Tünnermann, Opt. Lett. 32, 2230 (2007)

    Article  ADS  Google Scholar 

  45. A. Arai, J. Bovatsek, F. Yoshino, Z. Liu, G.C. Cho, L. Shah, M.E. Fermann, Y. Uehara, Proc. SPIE 6343, 63430S (2006)

    Article  Google Scholar 

  46. J.C. Ion, Laser Processing of engineering materials (Elsevier Butterworth-Heinemann, Burlington, MA, 2005), pp. 104–138

    Google Scholar 

  47. J. Jones, in Handbook of Laser Technology and Applications, ed. by C. Webb, J. Jones. Laser Design and Laser Systems, vol. 2 (Institute of Physics Publishing, Bristol, Philadelphia, 2004), p. 1165

    Google Scholar 

  48. K. Venkatakrishnan, B. Tan, J. Micromech. Microeng. 16, 2603 (2006)

    Article  ADS  Google Scholar 

  49. R. Dorn, S. Quabis, G. Leuchs, Phys. Rev. Lett. 91, 233901 (2003)

    Article  ADS  Google Scholar 

  50. M.A. Ahmed, M.M. Vogel, A. Austerschulte, F. Sterns, A. Voss, T. Schoder, M. Ubl, M. Pritschow, T. Graf, Proc. SPIE 6998, 69980H (2008)

    Article  Google Scholar 

  51. M.A. Ahmed, A. Voss, M.M. Vogel, T. Graf, Opt. Lett. 32, 3272 (2007)

    Article  ADS  Google Scholar 

  52. H. Kawauchi, Y. Kozawa, S. Sato, T. Sato, S. Kawakami, Opt. Lett. 33, 399 (2008)

    Article  ADS  Google Scholar 

  53. P.B. Phu, W.J. Lai, Y.L. Lim. B.S. Tan, R.F. Wu, K.S. Lai, H.W. Tan, Technical Digest of CLEO/QELS 2008, CMO4 (2008)

    Google Scholar 

  54. F.M. Dickey, S.C. Holswade, in Laser Beam Shaping Applications, ed. by F.M. Dickey, S.C. Holswade, D.L. Shealy (CRC Press, Taylor & Francis Group, Boca Raton, FL, 2006), p. 269

    Google Scholar 

  55. J.P. Sercel, M. von Dadelszen, in Laser Beam Shaping Applications, ed. by F.M. Dickey, S.C. Holswade, D.L. Shealy (CRC Press, Taylor & Francis Group, Boca Raton, FL, 2006), p. 113

    Google Scholar 

  56. C. Dunsky, Proc. SPIE 4443, 135 (2001)

    Article  ADS  Google Scholar 

  57. O. Homburg, F. Toennissen, T. Mitra, V. Lissotschenko, Proc. SPIE 6880, 6880R (2008)

    ADS  Google Scholar 

  58. Y. Chen, D. Li, Y. Sheng, 36, 568 (1997)

    Google Scholar 

  59. K. Kanzler, A. Hoult, Proc. SPIE 6663, 66630B (2007)

    Article  Google Scholar 

  60. O. Homburg, D. Hauschild, P. Harten, L. Aschke, V. Lissotschenko, Proc. SPIE 6663, 66630D (2007)

    Article  Google Scholar 

  61. J. Fruendt, M. Jarcynski, T. Mitra, Proc. SPIE 7062, 70620S (2008)

    Article  ADS  Google Scholar 

  62. J. Amako, E. Fujii, Y. Yamazaki, T. Shimoda, Proc. SPIE 6107, 61070D (2006)

    Article  ADS  Google Scholar 

  63. Y. Matsuoka, Y. Kizuka, T. Inoue, Appl. Phys. A 84, 423 (2006)

    Article  ADS  Google Scholar 

  64. J. Amako, D. Sawaki, E. Fujii, J. Opt. Soc. Am. B 20, 2562 (2003)

    Article  ADS  Google Scholar 

  65. R.P. Aylward, Proc. SPIE 3787, 158 (1999)

    Article  ADS  Google Scholar 

  66. J.S. Ehrmann, Proc. SPIE 1454, 245 (1991)

    ADS  Google Scholar 

  67. M. Muth, Proc. SPIE 2774, 535 (1996)

    Article  ADS  Google Scholar 

  68. D.A. Sabo, D. Brunner, A. Engelmayer, Proc. SPIE 5873, 113 (2005)

    Article  ADS  Google Scholar 

  69. T. Sandström, T. Fillion, U. Ljungblad, M. Rosling, Proc. SPIE 4409, 270 (2001)

    Article  ADS  Google Scholar 

  70. T. Hara, N. Fukuchi, Y. Kobayashi, N. Yoshida, Y. Igarasaki, M.H. Wu, Proc. SPIE 4470, 114 (2001)

    Article  ADS  Google Scholar 

  71. T. Inoue, H. Tanaka, N. Fukuchi, M. Takumi, N. Matsumoto, T. Hara, N. Yoshida, Y. Igasaki, Y. Kobayashi, Proc. SPIE 6487, 64870Y (2007)

    Article  ADS  Google Scholar 

  72. Y. Hayasaki, T. Sugimoto, A. Takita, N. Nishida, Appl. Phys. Lett. 87, 031101 (2005)

    Article  ADS  Google Scholar 

  73. Y. Hayasaki, Proc. SPIE 6831, 683205 (2007)

    Article  Google Scholar 

  74. Z. Kuang, W. Perrie, J. Leach, M. Sharp, S.P. Edwardson, M. Padget, G. Dearden, K. G. Watkins, Appl. Surf. Sci. 255, 2284 (2008)

    Article  ADS  Google Scholar 

  75. W. Koechner, Solid-State Laser Engineering, 6th edn. (Springer, Berlin, Heidelberg, New York, 2006), pp.587–679

    Google Scholar 

  76. P. Zhu, D. Li, B. Qi, A. Schell, P. Shi, C. Haas, S. Fu, N. Wu, K. Du, Opt. Lett. 33, 2248 (2008)

    Article  ADS  Google Scholar 

  77. J.A. Albelo, P.Y. Pirogovsky, J.N. O’Brien, B.W. Baird, Proc. SPIE 6871, 687122 (2008)

    Article  Google Scholar 

  78. H. Kitano, T. Matsui, K. Sato, N. Ushiyama, M. Yoshimura, Y. Mori, T. Sasaki, Opt. Lett. 28, 263 (2003)

    Article  ADS  Google Scholar 

  79. R. Kramer, H. Swede, V. Brandl, S. Wolf, O. Märten, Proc. SPIE 5962, 59622H (2005)

    Article  ADS  Google Scholar 

  80. J.V. Sheldakova, A.V. Kudryashov, V.Y. Zavolva, T.Y. Cherezova, Proc. SPIE 6452, 645207 (2007)

    Article  Google Scholar 

  81. C.B. Roundy, L. Green, Proc. SPIE 5876, 587604 (2005)

    Article  Google Scholar 

  82. L. Sarger, J. Oberlé in Femtosecond Laser Pulses, ed. by C. Rullièle (Springer, Berlin, Heidelberg, New York, 2003), p. 195

    Google Scholar 

  83. X. Gu, S. Akturk, P. Gabolde, Q. Cao, A.P. Shreenath, R. Trebino, Proc. SPIE 6108, 61080A (2006)

    Article  Google Scholar 

  84. M.H. Hong, Y.F. Lu, Proc. SPIE 4426, 51 (2002)

    Article  ADS  Google Scholar 

  85. N. Semmar, J. Martan, O. Cibulka, E. Le Menn, C. B-Leborgne, Proc. SPIE 6261, 626123 (2006)

    Article  ADS  Google Scholar 

  86. E.S. Choi, W. Kwak, Y. Shin, Y. Kim, W. Jung, Y.-C. Ahn, Z. Chen, E.J. Jeong, C.-S. Kim, Proc. SPIE 6847, 68470W (2008)

    Article  ADS  Google Scholar 

  87. H. Schwede, O.W. Märten, R. Kramer, S. Wolf, V. Brandl, Proc. SPIE 6872, 687208 (2008)

    Article  Google Scholar 

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Authors and Affiliations

  1. Paradigm Laser Research Limited, Machida, Tokyo, 195-0072, Japan

    Kunihiko Washio

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  1. Kunihiko Washio
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Correspondence to Kunihiko Washio .

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Editors and Affiliations

  1. Inst. of Phys.a.Chemical Res., Laser Technology Laboratory, RIKEN, Hirozawa 2-1, Wako-shi, Saitama, 351-0198, Japan

    Koji Sugioka

  2. Department of Engineering Physics, Laser Processing Laboratory, École Polytechnique Montréal, Montreal, Canada

    Michel Meunier

  3. Naval Research Laboratory, Overlook Ave. SW., 4555, Washington, 20375, USA

    Alberto Piqué

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Washio, K. (2010). Laser Devices and Optical Systems for Laser Precision Microfabrication. In: Sugioka, K., Meunier, M., Piqué, A. (eds) Laser Precision Microfabrication. Springer Series in Materials Science, vol 135. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-10523-4_3

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  • DOI: https://doi.org/10.1007/978-3-642-10523-4_3

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