Abstract
We suggest a new technology for the production of low-cost micromechanical devices that is based on the application of microequipment, similar to conventional mechanical equipment, but much smaller. It permits us to use the conventional technology for the mechanical treatment of materials and for the automatic assembly of mechanical and electronic devices for manufacturing micromechanical and microelectromechanical devices of submillimeter sizes. We call it “Microequipment Technology” (MET). MET will use microequipment for manufacturing commercial products and in turn will produce the necessary microequipment units. The decrease in manufacturing costs of microdevices will be achieved on the basis of mass parallel production processes used in MET [1], instead of the batch processes used in Microelectromechanical Systems (MEMS) [2–4]. In accordance with MET, sequential generations of microequipment are to be created (Fig. 8.1) [5, 6].
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Kussul, E., Baidyk, T., Wunsch, D.C. (2010). Micromechanics. In: Neural Networks and Micromechanics. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-02535-8_8
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