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Materials Science with Ion Beams pp 73–111Cite as

Ion-Beam-Induced Amorphization and Epitaxial Crystallization of Silicon

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Part of the book series: Topics in Applied Physics ((TAP,volume 116))

Abstract

Ion-induced collisions produce athermal atomic movements at and around the surface or interface, inducing step formation and modifying growth conditions. The latter may be controlled by varying the temperature and ion-beam characteristics, guiding the system between nonequilibrium and quasiequilibrium states. Silicon is an ideal material to observe and understand such processes. For ion irradiation at or below room temperature, damage due to collision cascades leads to Si amorphization. At temperatures where defects are mobile and interact, irradiation can lead to layer-by-layer amorphization, whereas at higher temperatures irradiation can lead to the recrystallization of previously amorphized layers. This chapter focuses on the role of ion beams in the interface evolution. We first give an overview of ion beam-induced epitaxial crystallization (IBIEC) and ion-beam-induced amorphization as observed in silicon and identify unresolved issues. Similarities and differences with more familiar surface thermal growth processes are emphasized. Theories and computer simulations developed for surface relaxation help us to quantify several important aspects of IBIEC. Recent experiments provide insight into the influence of ion-induced defect interactions on IBIEC, and are also partly interpreted via computer simulations. The case of phase transformations and precipitation at interfaces is also considered.

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References

  1. A. Zangwill, Physics at Surfaces (Cambridge University Press, Cambridge, 1988)

    Google Scholar 

  2. F. Spaepen, D. Turnbull, in Laser Annealing of Semiconductors, ed. by J.M. Poate, J.W. Mayer (Academic Press, New York, 1982), p. 15

    Google Scholar 

  3. B. Strickland, C. Roland, Phys. Rev. B 51, 5061 (1995)

    Article  ADS  Google Scholar 

  4. H. Hensel, H.M. Urbassek, Phys. Rev. B 58, 2050 (1998)

    Article  ADS  Google Scholar 

  5. R.S. Averback, T. Diaz de la Rubia, in Solid State Physics, vol. 51, ed. by H. Ehrenreich, F. Spaepen (Academic Press, New York, 1998), p. 282

    Google Scholar 

  6. L.M. Howe, M.H. Rainville, Nucl. Instrum. Methods Phys. Res. B 19/20, 61 (1987)

    Article  Google Scholar 

  7. F.F. Morehead Jr., B.L. Crowder, Radiat. Eff. 6, 27 (1970)

    Article  ADS  Google Scholar 

  8. J.R. Dennis, E.B. Hale, J. Appl. Phys. 49, 1119 (1978)

    Article  ADS  Google Scholar 

  9. M.L. Swanson, J.R. Parsons, C.W. Hoelke, Radiat. Eff. 9, 249 (1971)

    Article  ADS  Google Scholar 

  10. F.L. Vook, H.J. Stein, Radiat. Eff. 2, 23 (1969)

    Article  ADS  Google Scholar 

  11. L.A. Christel, J.F. Gibbons, T.W. Sigmon, J. Appl. Phys. 52, 7143 (1981)

    Article  ADS  Google Scholar 

  12. J.S. Williams, Unpublished, 1998

    Google Scholar 

  13. J.S. Williams, MRS Bull. 17, 47 (1992)

    Google Scholar 

  14. S. Takeda, M. Kohyama, A. Ibe, Philos. Mag. A 70, 287 (1994)

    Article  ADS  Google Scholar 

  15. R.D. Goldberg, J.S. Williams, R.G. Elliman, Phys. Rev. Lett. 82, 771 (1999)

    Article  ADS  Google Scholar 

  16. R.D. Goldberg, J.S. Williams, R.G. Elliman, Nucl. Instrum. Methods Phys. Res. B 106, 242 (1995)

    Article  ADS  Google Scholar 

  17. J.S. Williams, H.H. Tan, R.D. Goldberg, R.A. Brown, C. Jagadish, Mater. Res. Soc. Symp. Proc. 316, 15 (1994)

    Google Scholar 

  18. J.S. Williams, R.D. Goldberg, M. Petravic, Z. Rao, Nucl. Instrum. Methods Phys. Res. B 84, 199 (1994)

    Article  ADS  Google Scholar 

  19. R.G. Elliman, J. Linnros, W.L. Brown, Mater. Res. Soc. Symp. Proc. 100, 363 (1988)

    Google Scholar 

  20. K.A. Jackson, J. Mater. Res. 3, 1218 (1988)

    Article  ADS  Google Scholar 

  21. J.S. Williams, Trans. Mater. Res. Soc. Jpn. 17, 417 (1994)

    Google Scholar 

  22. R.D. Goldberg, R.G. Elliman, J.S. Williams, Nucl. Instrum. Methods Phys. Res. B 80/81, 596 (1993)

    Article  ADS  Google Scholar 

  23. J. Linnros, R.G. Elliman, W.L. Brown, J. Mater. Res. 3, 1208 (1988)

    Article  ADS  Google Scholar 

  24. R.G. Elliman, J.S. Williams, W.L. Brown, A. Leiberich, D.A. Maher, R.V. Knoell, Nucl. Instrum. Methods Phys. Res. B 19/20, 435 (1987)

    Article  Google Scholar 

  25. J.S. Williams, R.G. Elliman, W.L. Brown, T.E. Seidel, Phys. Rev. Lett. 55, 1482 (1985)

    Article  ADS  Google Scholar 

  26. G.L. Olson, R.A. Roth, Mater. Sci. Rep. 3, 1 (1988)

    Article  Google Scholar 

  27. J. Linnros, G. Holmén, B. Svensson, Phys. Rev. B 32, 2770 (1985)

    Article  ADS  Google Scholar 

  28. F. Priolo, C. Spinella, A. La Ferla, E. Rimini, G. La Ferla, Appl. Surf. Sci. 43, 178 (1989)

    Article  ADS  Google Scholar 

  29. G. Lulli, P.G. Merli, M. Vittori Antisari, Phys. Rev. B 36, 8038 (1987)

    Article  ADS  Google Scholar 

  30. F. Priolo, E. Rimini, Mater. Sci. Rep. 5, 319 (1990)

    Article  Google Scholar 

  31. J.S. Williams, R.G. Elliman, W.L. Brown, T.E. Seidel, Mater. Res. Soc. Symp. Proc. 37, 127 (1985)

    Google Scholar 

  32. J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985)

    Google Scholar 

  33. S. Cannavo, A. La Ferla, S.U. Campisano, E. Rimini, G. La Ferla, L. Gandolfi, J. Liu, M. Servidori, Mater. Res. Soc. Symp. Proc. 51, 329 (1986)

    Google Scholar 

  34. D.M. Maher, R.G. Elliman, J. Linnros, J.S. Williams, R.V. Knoell, W.L. Brown, Mater. Res. Soc. Symp. Proc. 93, 87 (1987)

    Google Scholar 

  35. J.S. Williams, R.G. Elliman, Phys. Rev. Lett. 51, 1069 (1983)

    Article  ADS  Google Scholar 

  36. F. Priolo, C. Spinella, E. Rimini, Phys. Rev. B 41, 5235 (1990)

    Article  ADS  Google Scholar 

  37. E.F. Kennedy, L. Csepregi, J.W. Mayer, T.W. Sigmon, J. Appl. Phys. 48, 4241 (1977)

    Article  ADS  Google Scholar 

  38. J.M. Poate, D.C. Jacobson, J.S. Williams, R.G. Elliman, D.O. Boerma, Nucl. Instrum. Methods B 19/20, 480 (1987)

    Article  Google Scholar 

  39. F. Priolo, C. Spinella, A. La Ferla, A. Battaglia, E. Rimini, G. La Ferla, A. Carnera, A. Gasparotto, Mater. Res. Soc. Symp. Proc. 128, 563 (1989)

    Google Scholar 

  40. F. Spaepen, E. Nygren, A.V. Wagner, in Crucial Issues in Semiconductor Materials & Processing Technologies (Kluwer Academic, Boston, 1992), p. 483

    Google Scholar 

  41. J.M. Poate, J. Linnros, F. Priolo, D.C. Jacobson, J.L. Batstone, M.O. Thompson, Phys. Rev. Lett. 60, 1322 (1988)

    Article  ADS  Google Scholar 

  42. J. Linnros, W.L. Brown, R.G. Elliman, Mater. Res. Soc. Symp. Proc. 100, 369 (1988)

    Google Scholar 

  43. A. Kinomura, J.S. Williams, K. Fuji, Phys. Rev. B 59, 15214 (1999)

    Article  ADS  Google Scholar 

  44. V. Heera, T. Henkel, R. Kögler, W. Skorupa, Phys. Rev. B 52, 15776 (1999)

    Article  ADS  Google Scholar 

  45. J. Linnros, G. Hólmen, J. Appl. Phys. 59, 1513 (1986)

    Article  ADS  Google Scholar 

  46. R.G. Elliman, J.S. Williams, D.M. Maher, W.L. Brown, Mater. Res. Soc. Symp. Proc. 51, 319 (1986)

    Google Scholar 

  47. J.S. Williams, I.M. Young, M.J. Conway, Nucl. Instrum. Methods Phys. Res. B 161–163, 505 (2000)

    Article  Google Scholar 

  48. G. de M. Azevedo, J.S. Williams, I.M. Young, M.J. Conway, A. Kinomura, Nucl. Instrum. Methods B 190, 772 (2002)

    Article  ADS  Google Scholar 

  49. M.T. Robinson, I.M. Torrens, Phys. Rev. B 9, 5008 (1974)

    Article  ADS  Google Scholar 

  50. M.T. Robinson, Nucl. Instrum. Methods B 48, 408 (1990)

    Article  ADS  Google Scholar 

  51. G. de M. Azevedo, J.C. Martini, M. Behar, P.L. Grande, Nucl. Instrum. Methods B 149, 301 (1999)

    Article  ADS  Google Scholar 

  52. G. Molière, Z. Naturforschung: Sect. A-A J. Phys. Sci. 2a, 133 (1947)

    ADS  Google Scholar 

  53. W. Eckstein, Computer Simulation of Ion-Solid Interactions (Springer, Berlin, 1991). And references therein

    Google Scholar 

  54. A. Kinomura, A. Chayahara, N. Tsubouchi, C. Heck, Y. Horino, Y. Miyagawa, Nucl. Instrum. Methods B 175–177, 319 (2001)

    Article  Google Scholar 

  55. G.A. Kachurin, Sov. Phys. Semicond. 14, 461 (1980)

    Google Scholar 

  56. H.A. Atwater, C.V. Thompson, H.I. Smith, Phys. Rev. Lett. 60, 112 (1988)

    Article  ADS  Google Scholar 

  57. G. Lulli, P.G. Merli, M. Vittori Antisari, Mater. Res. Soc. Symp. Proc. 100, 375 (1988)

    Google Scholar 

  58. J. Nakata, M. Takahashi, K. Kajiyama, Jpn. J. Appl. Phys. 20, 2211 (1981)

    Article  ADS  Google Scholar 

  59. L.E. Mosley, M.A. Paesler, Appl. Phys. Lett. 45, 86 (1984)

    Article  ADS  Google Scholar 

  60. J.P. Guillemet, B. de Mauduit, R. Sinclair, T.J. Konno, in Int. Conf. Electr. Micros. (ICEM-13), Paris, France, 1994

    Google Scholar 

  61. G.Q. Lu, E. Nygren, M.J. Aziz, J. Appl. Phys. 70, 5323 (1991)

    Article  ADS  Google Scholar 

  62. J.S. Custer, A. Battaglia, M. Saggio, F. Priolo, Phys. Rev. Lett. 69, 780 (1992)

    Article  ADS  Google Scholar 

  63. F. Fortuna, P. Nedellec, M.O. Ruault, H. Bernas, X.W. Lin, P. Boucaud, Nucl. Instrum. Methods B 100, 206 (1995)

    Article  Google Scholar 

  64. A.L. Barabási, H.E. Stanley, Fractal Concepts in Surface Growth (Cambridge University Press, Cambridge, 1995)

    Book  MATH  Google Scholar 

  65. F. Family, T. Vicsek, J. Phys. A 18, L75 (1985)

    Article  ADS  Google Scholar 

  66. S.F. Edwards, D.R. Wilkinson, Proc. R. Soc. Lond. A 381, 17 (1982)

    Article  ADS  MathSciNet  Google Scholar 

  67. M. Kardar, G. Parisi, Y.-C. Zhang, Phys. Rev. Lett. 56, 889 (1986)

    Article  MATH  ADS  Google Scholar 

  68. M. Lohmeier, S. de Vries, J. Custer, F. Vlieg, M.S. Finney, F. Priolo, A. Battaglia, Appl. Phys. Lett. 64, 1803 (1994)

    Article  ADS  Google Scholar 

  69. M.-J. Caturla, T. Diaz de la Rubia, L.A. Marques, G.H. Gilmer, Phys. Rev. B 54(16), 683 (1996)

    Google Scholar 

  70. D.M. Stock, B. Weber, K. Gärtner, Phys. Rev. B 61, 8150 (2000)

    Article  ADS  Google Scholar 

  71. L. Pelaz, L. Marquès, J. Barbolla, J. Appl. Phys. 96, 5947 (2004)

    Article  ADS  Google Scholar 

  72. J. Desimoni, M. Behar, H. Bernas, Z. Liliental-Weber, J. Washburn, Appl. Phys. Lett. 62, 306 (1993)

    Article  ADS  Google Scholar 

  73. X.W. Lin, M. Behar, J. Desimoni, H. Bernas, Z. Liliental-Weber, J. Washburn, Appl. Phys. Lett. 63, 105 (1993)

    Article  ADS  Google Scholar 

  74. X.W. Lin, Z. Liliental-Weber, J. Washburn, H. Bernas, J. Desimoni, J. Appl. Phys. 75, 4686 (1994). And refs. therein

    Article  ADS  Google Scholar 

  75. J.A. Venables, G.D. Spiller, M. Hanbücken, Rep. Prog. Phys. 47, 399 (1984)

    Article  ADS  Google Scholar 

  76. M. Zinke-Allmang, L.C. Feldman, M.H. Grabow, Surf. Sci. Rep. 16, 377 (1992)

    Article  ADS  Google Scholar 

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Author notes

  1. G. de M. Azevedo

    Present address: Brazilian Synchrotron Light Laboratory (LNLS), 6192 CEP, 13084-971, Campinas, SP, Brazil

Authors and Affiliations

  1. Research School of Physical Sciences and Engineering, Australian National University, Canberra, 0200, Australia

    J. S. Williams & G. de M. Azevedo

  2. CSNSM-CNRS, University Paris-Sud 11, 91405, Orsay, France

    H. Bernas & F. Fortuna

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  1. J. S. Williams
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  2. G. de M. Azevedo
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Correspondence to J. S. Williams .

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  1. CSNSM-CNRS, Université Paris-Sud 11, Orsay, 91405, France

    Harry Bernas

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Williams, J.S., de M. Azevedo, G., Bernas, H., Fortuna, F. (2009). Ion-Beam-Induced Amorphization and Epitaxial Crystallization of Silicon. In: Bernas, H. (eds) Materials Science with Ion Beams. Topics in Applied Physics, vol 116. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-88789-8_4

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  • DOI: https://doi.org/10.1007/978-3-540-88789-8_4

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