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Vacuum Technology pp 175–204Cite as

Phenomena Induced by Electron Irradiation

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Darkening

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Polymerization

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Etching

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    Nagamitsu Yoshimura

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Yoshimura, N. (2008). Phenomena Induced by Electron Irradiation. In: Vacuum Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-74433-7_5

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