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Applied Scanning Probe Methods X pp 105–130Cite as

Visualization of Fixed Charges Stored in Condensed Matter and Its Application to Memory Technology

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Part of the book series: Nano Science and Technolgy ((NANO))

Abstract

Scanning nonlinear dielectric microscopy (SNDM) with super-high resolution is described. Experimental results for the ferroelectric domain and the visualization of charge stored in flash memories are given, following the description of the theory and principle of SNDM. Next, a higher-order nonlinear dielectric imaging method and noncontact SNDM (NC-SNDM) are proposed. The first achievement of atomic resolution in capacitance measurement is successfully demonstrated using this NC-SNDM technique. In addition to these techniques, a new 3D-type of SNDM to measure the 3D distribution of ferroelectric polarization is developed. Finally, a very high density next-generation ferroelectric data storage device based on SNDM is demonstrated.

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Author information

Authors and Affiliations

  1. Research Institute of Electrical Communication, Tohoku University, 980-8577, Aoba-ku, Sendai, Japan

    Yasuo Cho

Authors
  1. Yasuo Cho
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Editor information

Editors and Affiliations

  1. Nanotribology Laboratory for Information Storage and MEMS/NEMS (NLIM), The Ohio State University, 201W. 19th Avenue, 43210-1142, Columbus, Ohio , USA

    Bharat Bhushan

  2. Advanced Institute of Science & Technology, School of Materials Science, 923-1292, Ishikawa, Japan

    Masahiko Tomitori

  3. Institute of Physics, FB 16, University of Münster, Wilhelm-Klemm-Str. 10, 48149, Münster, Germany

    Harald Fuchs

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© 2008 Springer-Verlag Berlin Heidelberg

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Cho, Y. (2008). Visualization of Fixed Charges Stored in Condensed Matter and Its Application to Memory Technology. In: Bhushan, B., Tomitori, M., Fuchs, H. (eds) Applied Scanning Probe Methods X. Nano Science and Technolgy. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-74085-8_3

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