The first chapter of the monograph summarizes different micro/nanomachining and nanopatterning approaches in historical context. It also emphasizes the importance of thermal transport phenomena for electron-beam based processes and provides a brief outline of the following chapters.
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© 2008 Springer-Verlag Berlin Heidelberg
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(2008). Introduction. In: Thermal Transport for Applications in Micro/Nanomachining. Microtechnology and MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-73607-3_1
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DOI: https://doi.org/10.1007/978-3-540-73607-3_1
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-73605-9
Online ISBN: 978-3-540-73607-3
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