Abstract
High resolution electron beam lithography (EBL) has been developed to make zone plates on Si3N4 membranes. The highest resolution zone plates to date use gold as the absorber and have nominal outer zone widths as small as 30 nm for use in imaging x-ray microscopy. Their characteristics have been measured in collaboration with the Göttingen x-ray microscopy group at BESSY [1]; small features (≈ 30 nm) in test patterns were resolved. For scanning instruments both gold and nickel zone plates have been made; the latter show improved efficiency due to their phase shift and attenuation characteristics. Nickel zone plates for the water window with nominal outer zone widths as small as 40 nm have been made; an efficiency >10% at λ = 3.6 nm was measured at the SUNY/NSLS microscope. In addition, high efficiency (≈ 15% at 2.5 nm) zone plates for photoelectron microscopy have been made with 100 nm finest zone widths using 300 nm of electroplated nickel.
Keywords
- Scanning Transmission Electron Microscope
- Diffraction Efficiency
- Zone Width
- Electron Beam Lithography
- Fresnel Zone
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
W Meyer-Ilse, P Guttmann, J Thieme, D Rudolph, G Schmahl, E Anderson, P E Batson, D Attwood, N Iskander and D Kern, This Volume.
E Kratschmer, S Rishton, D P Kern and T H P Chang, J. Vac. Sci. Technol. B6 2074 (1988)
E Kratschmer, S Rishton, H E Luhn, D P Kern and T H P Chang, J. Vac. Sci. Technol. B7 1418–1421 (1989)
The efficiency measurements of these nickel zone plates were made by J Kirz et al at the la beamline at NSLS in Brookhaven NY.
H Ade, J Kirz, S L Hulbert, E D Johnson, E Anderson and D Kern, This Volume.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1992 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Anderson, E.H., Kern, D. (1992). Nanofabrication of Zone Plates for X-Ray Microscopy. In: Michette, A.G., Morrison, G.R., Buckley, C.J. (eds) X-Ray Microscopy III. Springer Series in Optical Sciences, vol 67. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-46887-5_14
Download citation
DOI: https://doi.org/10.1007/978-3-540-46887-5_14
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-13894-6
Online ISBN: 978-3-540-46887-5
eBook Packages: Springer Book Archive