This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
References
Lindhard, J., Nielsen, V., Scharff, M.: Approximation method in classical scattering by screened coulomb fields (notes on atomic collisions I). Mat. Fys. Medd. Dan. Vidensk. Selsk. 36(10) (1968)
Nastasi, M., Mayer, J.W., Hirvonen, J.K.: Ion-Solid Interactions: Fundamentals and Applications. Cambridge University Press, Cambridge (1996)
Ziegler, J.F., Biersack, J.P., Littmark, U.: The Stopping and Range of Ions in Solids. Pergamon Press, New York (1985)
Suggested Reading
Fermi, E., Teller, E.: The capture of negative mesotrons in matter. Phys. Rev. 72, 399 (1947)
Firsov, O.B.: A qualitative interpretation of the mean electron excitation energy in atomic collisions. Sov. Phys. JETP 36, 1076 ( 1959)
Gotz, G., Gartner, K. (eds.): High-Energy Ion Beam Analysis of Solids, chap. 1. Academie Verlag, Berlin (1988)
Lindhard, J., Scharff, M., Schiott, H.E.: 1963Range concepts and heavy ion ranges (notes on atomic collisions II). Mat. Fys. Medd. Dan. Vidensk. Selsk. 33( 14), 3 ()
Mayer, J.W., Eriksson, L., Davies, J.A.: Ion Implantation in Semiconductors. Academic, New York (1970)
Sugiyama, H.: Electronic stopping power formula for intermediate energies. Radiat. Eff. 56, 205 (1956)
Ziegler, J.F. (ed.): Handbook of Ion Implantation Technology. North-Holland, New York (1992)
Rights and permissions
Copyright information
© 2006 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
(2006). Ion Stopping. In: Ion Implantation and Synthesis of Materials. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-45298-0_5
Download citation
DOI: https://doi.org/10.1007/978-3-540-45298-0_5
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-23674-0
Online ISBN: 978-3-540-45298-0
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)