Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Andersen, H.H.: The depth resolution of sputter profiling. Appl. Phys. 18, 131 (1979)
Cheng, Y.-T.: Thermodynamic and fractal geometric aspects of ion-solid interactions. Mater. Sci. Rep. 5, 45 (1990)
Cheng, Y.-T., van Rossum, M. Nicolet, M-A., Johnson, W.L.: Influence of chemical driving forces in ion mixing of metallic bilayers. Appl. Phys. Lett. 45, 185 (1984)
de Boer, F.R., Boom, R., Mattens, W.C.M., Miedema, A.R., Niessen, A.K.: Cohesion in Metals. North-Holland, Amsterdam (1989)
Johnson, W.L., Cheng, Y.-T., Van Rossum, M., Nicolet, M-A.: When is thermodynamics relevant to ion-induced atomic rearrangements in metals? Nucl. Insrut. Meths. B7/8, 657 (1985)
Kittel, C.: Introduction to Solid State Physics, 5th edn. Wiley, New York (1976)
Matteson, S., Paine, B.M., Grimaldi, M.G., Mezey, G., Nicolet, M.-A.: Ion beam mixing in amorphous silicon. I. Experimental investigation. Nucl. Instrum. Meths. 182/183, 43 (1981)
Mayer, J.W., Lau, S.S.: In: Poate, J.M., Foti, G., Jacobson, D.C. (eds.) ‘Ion Beam Mixing’, Surface Modification and Alloying by Laser, Ion, and Electron Beams, p. 241. Plenum, New York (1983)
Mayer, J.W., Lau, S.S., Tsaur, B.Y., Poate, J.M., Hirvonen, J.K.: In: Preece, C.M. Hirvonen, J.K. (eds.) High-Dose Implantation and Ion-Beam Mixing, Ion Implantation Metallurgy, p. 37. The Metallurgical Society of AIME, New York (1980).
Sigmund, P., Gras-Marti, A.: Theoretical aspects of atomic mixing by ion beams. Nucl. Instrum. Meths. 182/183, 25 (1981)
Tsaur, B.Y., Lau, S.S., Liau, Z.L., Mayer, J.W.: Ion-beam induced intermixing of surface layers. Thin Solid Films 63, 31 (1979)
van der Weg, W.F., Sigurd, D., Mayer, J.W.: In: Picraux, S.T. , EerNisse, E.P. , Vook, F.L. (eds.) Ion Beam Induced Intermixing in the Pd/Si System, Applications of Ion Beams to Metals, p. 209. Plenum Press, New York (1974)
van Rossum, M., Shreter, U., Johnson, W.L., Nicolet, M-A.: Amorphization of thin multilayer films by ion mixing and solid state amorphization. Mat. Res. Soc. Symp. Proc. 27, 127 (1984)
Westendorp, H., Wang, Z.-L., Saris, F.W.: Ion-beam mixing of Cu-Au and Cu-W systems. Nucl. Instrum. Meths. 194, 543 (1982)
Suggested Reading
Averback, R.S.: Fundamental aspects of ion beam mixing. Nucl. Instrum. Meths. B15, 675 (1986)
Besenbacher, F., Bottiger, J., Nielsen, S.K., Whitlow, H.J.: Short- and long-range ion-beam mixing in Cu:Al. Appl. Phys. A29, 141 (1982)
Johnson, W.L., Cheng, Y.-T., Van Rossum, M., Nicolet, M.-A.: When is thermodynamics relevant to ion-induced atomic rearrangements in metals? Nucl. Instrum. Meths. B7/8, 657 (1985)
Mayer, J.W., Lau, S.S.: Ion beam mixing. In: Poate, J.M., Foti, G. , Jacobson, D.C. (eds.) Surface Modification and Alloying by Laser, Ion, and Electron Beams, p. 241. Plenum, New York (1983)
Nastasi, M., Mayer, J.W.: Ion beam mixing in metallic and semiconductor materials. Mater. Sci. Rep. R12, 1 (1994)
Rights and permissions
Copyright information
© 2006 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
(2006). Ion-Induced Atomic Intermixing at the Interface: Ion Beam Mixing. In: Ion Implantation and Synthesis of Materials. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-45298-0_13
Download citation
DOI: https://doi.org/10.1007/978-3-540-45298-0_13
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-23674-0
Online ISBN: 978-3-540-45298-0
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)