Abstract
If a target is bombarded with chemically reactive species, chemical effects have to be taken into account. Two converse effects can occur. Chemical reactions between target and projectile atoms may form species which are more loosely bound to the surface and more easily sputtered. This causes an increase of the sputtering yield. This process is usually subsumed under the expression chemical sputtering. Otherwise, newly formed compounds may posses an enhanced bond strength to the target atoms and, consequently, a higher surface binding energy. This causes a decrease of the sputtering yield compared with the original target. In this chapter the emphasis is put on sputtering of carbon with hydrogen ions because it is the best studied system. The process of chemical sputtering is defined. The experimental methods to measure it and the available experimental data are discussed. Model conceptions of the basic, microscopic mechanisms developed for chemical sputtering of carbon by hydrogen are reviewed. Finally, several additional species that cause chemical sputtering of carbon materials are presented.
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References
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Jacob, W., Roth, J. (2007). Chemical Sputtering. In: Sputtering by Particle Bombardment. Topics in Applied Physics, vol 110. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-44502-9_6
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