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Planar Techniques for Fabricating X-Ray Diffraction Gratings and Zone Plates

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Book cover X-Ray Microscopy

Part of the book series: Springer Series in Optical Sciences ((SSOS,volume 43))

Abstract

Planar techniques employed in fabricating Fresnel zone plates and diffraction gratings are reviewed briefly, with emphasis on recent developments.

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References

  1. H.I. Smith: Proc. IEEE 62, 1361 (1974)

    Article  ADS  Google Scholar 

  2. D.C. Flanders, D.C. Shaver, A.M. Hawryluk and H.I. Smith: Annals of the New York Academy of Sciences 342, 203 (1980)

    Google Scholar 

  3. H.I. Smith: “Fabrication of Diffractive Optical Elements for X-Ray Diagnostics”, in Low Energy X-Ray Diagnostics - 1981, pp. 223–224, Amer. Inst. Phys., New York, 1981. D.T. Atwood and B.L. Henke, editors

    Google Scholar 

  4. R.E. Howard and D.E. Prober: “Nanometer-Scale Fabrication Techniques”, VLSI Electronics: Microstructure Science, Vol. 5, Chap. 4, Academic Press 1982

    Google Scholar 

  5. Scanned Image Microscopy, ed. E.A. Ash, Academic Press, 1980

    Google Scholar 

  6. M.J. Bowden: J. Electrochem. Soc. 128, 195C (1981)

    Google Scholar 

  7. M. Hatzakis: Solid State Technol. 24, 74 (1981)

    Google Scholar 

  8. M. Hatzakis, D. Hofer, T.H.P. Chang: J. Vac. Sci. Technol. 16, 1631 (1979)

    Article  ADS  Google Scholar 

  9. B.J. Lin and T.H.P. Chang: J. Vac. Sci. Technol. 16, 1669 (1979)

    Article  ADS  Google Scholar 

  10. J.M. Moran and D. Maydan: J. Vac. Sci. Technol. 16, 1620 (1979)

    Article  ADS  Google Scholar 

  11. M. O’Toole, E. Liu and M. Chang: Proc. SPIE Conference on Semiconductor Microlithography VI, San Jose, CA., ed. J. Dey, V275, 128(1981)

    Google Scholar 

  12. D.C. Shaver, D.C. Flanders, N.M. Ceglio and H.Ì. Smith: J. Vac. Sci. Technol. 16, 1626 (1979)

    Article  ADS  Google Scholar 

  13. D.P. Kern P.J. Houzego, P.J. Coane and T.H.P. Chang: J. Vac. Sci. Technol. B, Oct/Dec. 1983

    Google Scholar 

  14. H.I. Smith, S.R. Chinn and P.D. DeGraff: J. Vac. Sci. Technol. 12, 1262 (1975)

    Article  ADS  Google Scholar 

  15. P.J. Coane, D.P. Kern, A.J. Speth and T.H.P. Chang: “An Electron Beam Microfabrication System for Lithography Below 1000A”, Proceedings of 10th International Conference on Electron and Ion Beam Science and Technology, The Electrochemical Society, 83 - 2, 2, (1983)

    Google Scholar 

  16. M. Parikh: J. Appl. Phys. 50, 4371 (1979; M. Parikh: J. Appl. Phys. 50, 4378 (1979); M. Parikh: J. Appl. Phys. 50, 4383 (1979); M. Parikh and D.E. Schreiber: IBM J. Res. Dev. 24, 530T1980)

    Google Scholar 

  17. A.N. Broers: 9th Int. Conf. on Electron and Ion Beam Science and Technology, ed. R. Bakish (The Electrochem. Soc., 1980), p. 396; and A.N. Broers: Proceedings of the International Conference on Microlithography, 1980, ed. R. Kramer ( Delft University Press, The Netherlands, 1981 ), p. 9

    Google Scholar 

  18. R.J. Hawryluk: J. Vac. Sci. Technol. 19, 1 (1981)

    Article  ADS  Google Scholar 

  19. T.H.P. Chang: J. Vac. Sci. Technol. 12, 1271 (1975)

    Article  ADS  Google Scholar 

  20. H.G. Craighead, R.E. Howard, L.D. Jackel and P.M. Mankiewich: Appl. Phys. Lett. 42, 38 (1983)

    Article  ADS  Google Scholar 

  21. S.P. Beaumont, P.G. Bower, T. Tamamura and C.D.W. Wilkinson: Appl. Phys. Lett. 38, 436 (1981)

    Article  ADS  Google Scholar 

  22. G. Schmahl, D. Rudolph and B. Niemann: in Scanning Image Microscopy, ed. E.A. Ash, Academic Press, London 1980, p. 393

    Google Scholar 

  23. G. Schmahl, D. Rudolph and B. Niemann: “X-Ray Microscopy Using Fresnel Zone Plates”. In Low Energy X-Ray Diagnostics - 1981, p. 225–227, Amer. Inst. Physics, New York, 1981, D.T. Atwood and B.L. Henke, eds.

    Google Scholar 

  24. N.N. Efremow, N.P. Economou, K. Bezjian, S.S. Dana and H.I. Smith: J. Vac. Sci. Technol. 19, 1234 (1981)

    Article  ADS  Google Scholar 

  25. H.J. Lezec, E.H. Anderson and H. I. Smith: J. Vac. Sci. Technol. B, Oct/Dec (1983)

    Google Scholar 

  26. E.H. Anderson, C.M. Horwitz and H.I. Smith: Appl. Phys. Lett., 43, (1983)

    Google Scholar 

  27. G.C. Bjorklund, S.E. Harris and J.F. Young: Appl. Phys. Lett. 25, 451 (1974)

    Article  ADS  Google Scholar 

  28. C.V. Shank and R.V. Schmidt: Appl. Phys. Lett. 23, 154 (1973)

    Article  ADS  Google Scholar 

  29. D.C. Flanders, A.M. Hawryluk and H.I. Smith: J. Vac. Sci. Technol. 16, 1949 (1979)

    Article  ADS  Google Scholar 

  30. A.M. Hawryluk, N.M. Ceglio, R.H. Price, J. Meingailis and H.I. Smith: J. Vac. Sci. Technol. 19, 897 (1981)

    Article  ADS  Google Scholar 

  31. A.M. Hawryluk, H.I. Smith, R.M. Osgood and D.J. Ehrlich: Opt. Lett. 7, 402 (1982)

    Article  ADS  Google Scholar 

  32. A.M. Hawryluk, Ph.D. Thesis, M.I.T. 1981; also republished as VLSI Memo 81–69, Dept. of Electrical Engineering & Computer Science, M.I.T.

    Google Scholar 

  33. A.M. Hawryluk, H. I. Smith and D.J. Ehrlich: J. Vac. Sci. Technol. B., Oct/Dec (1983)

    Google Scholar 

  34. D.C. Flanders: Microcircuit Engineering 81, International Conference on M’crolithography Proc., p.22. Lausanne, Switzerland, Sept. 28–30, 1981. cc 1981 Swiss Fed. Inst. Tech., Lausanne

    Google Scholar 

  35. D.C. Flanders: Appl. Phys. Lett. 36, 93 (1980)

    Article  ADS  Google Scholar 

  36. W.L. Brown, T. Venkatejan and A. Wagner: Nuclear Instruments and Methods 191, 157–168 (1981)

    Article  ADS  Google Scholar 

  37. J.L. Bartelt, et al: J. Vac. Sci. Technol. 19, 1166 (1981)

    Article  ADS  Google Scholar 

  38. J.N. Randall, D.C. Flanders, N.P. Economou, J.P. Donnelly and E. I. Bromley: J. Vac. Sci. Technol. B, Oct/Dec (1983)

    Google Scholar 

  39. M.L. Schattenburg, Ph.D. Thesis, M.I.T., in preparation

    Google Scholar 

  40. T. Barbee, these proceedings

    Google Scholar 

  41. W.H. Safranek: “The Properties of Electrodeposited Metals and Alloys”, American Elsevier, New York, 1974

    Google Scholar 

  42. Occidental Chemical Corp., SEL-REX Plating Systems, 75 River Road, Nutley, N.J. 07710

    Google Scholar 

  43. N.M. Ceglio, A.M. Hawryluk and M.L. Schattenburg: to be published, J. Vac. Sci. Technol., Oct/Dec 1983

    Google Scholar 

  44. G.A. Lincoln, M.W. Geis, S. Pang and N.N. Efremow: J. Vac. Sci. Technol., Oct/Dec (1983)

    Google Scholar 

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© 1984 Springer-Verlag Berlin Heidelberg

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Smith, H.I., Anderson, E.H., Hawryluk, A.M., Schattenburg, M.L. (1984). Planar Techniques for Fabricating X-Ray Diffraction Gratings and Zone Plates. In: Schmahl, G., Rudolph, D. (eds) X-Ray Microscopy. Springer Series in Optical Sciences, vol 43. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-38833-3_8

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  • DOI: https://doi.org/10.1007/978-3-540-38833-3_8

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-13547-1

  • Online ISBN: 978-3-540-38833-3

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