Abstract
BESSY is a national synchrotron light source, covering the spectrum range down to λc = 2 nm [1.1,2]. Since July 82 it is used in regularly scheduled user shifts for three classes of experiments:
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1)
Basic and applied research in physics, chemistry, biology and medicine performed by universities and research institutions
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2)
Applied research and industrial developments in the semiconductor and microelectronic field performed by the Fraunhofer Gesellschaft and four German semiconductor companies
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3)
Radiometry performed by the PTB.
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References
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W. Gudat, E. Umbach, BESSY TB 39/1983
BMFT-Bericht, Anwendung der Synchrotronstrahlung in der Halbleiter-Lithographie 1977
M. Jahnke et al.: “Klein Erna”, Int. Bericht Techn. Univ. München 1981
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© 1984 Springer-Verlag Berlin Heidelberg
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Mülhaupt, G. (1984). The BESSY Soft X-Ray Source and Future Developments. In: Schmahl, G., Rudolph, D. (eds) X-Ray Microscopy. Springer Series in Optical Sciences, vol 43. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-38833-3_2
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DOI: https://doi.org/10.1007/978-3-540-38833-3_2
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-13547-1
Online ISBN: 978-3-540-38833-3
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