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Aktorik in der Mikrosystemtechnik

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Zusammenfassung

In Anlehnung an DIN 19226 (Regelungs- und Steuerungstechnik) werden in diesem Buch unter Aktoren Steller, Stellglieder oder Stellgeräte verstanden. Im engeren Sinne werden hier Aktoren behandelt, die auf einer Wandlung von elektrischer in mechanischer Energie beruhen (Elemente der Leistungselektronik gehören also nicht dazu). Eine weitere Einschränkung des Begriffs betrifft die Möglichkeit zur Miniaturisierung und damit zur Einbindung in ein Mikrosystem. Da Aktoren in Mikrosystemen erst am Beginn der Entwicklung stehen, werden im ersten Abschnitt dieses Kapitels auch solche Aktorkonzepte vorgestellt, für die z. Zt. zwar noch keine marktreifen Mikrosystem-Realisierungen vorhanden sind, bei denen dies jedoch heute schon prinzipiell gezeigt wurde. Günstig sind dabei Aktorprinzipien, bei denen die erforderlichen Aktorelemente bzw. Werkstoffe mit Dünnschichttechniken (vgl. 2.4.1.1) erzeugt werden können.

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Mescheder, U. (2004). Aktorik in der Mikrosystemtechnik. In: Mikrosystemtechnik. Vieweg+Teubner Verlag. https://doi.org/10.1007/978-3-322-84878-9_4

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  • DOI: https://doi.org/10.1007/978-3-322-84878-9_4

  • Publisher Name: Vieweg+Teubner Verlag

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