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Ion Beam Modification of Solids pp 475–500Cite as

Low Energy Ion Beam Modification of Nanostructures

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Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 61))

Abstract

Nanostructures and nanomaterials with their meso-scopic properties, which can be integrated into functional devices, will enable a variety of new applications in future. They can be grown with specific properties by plenty of physical and chemical methods, and subsequent modification using ion irradiation significantly expands the potpourri of functionality of this important material class. As the ion range becomes comparable to the size of the small structures, important effects must be considered in experimental planning: reduced incorporation of implanted species, morphological changes induced by point defects, as well as strongly enhanced dynamic annealing and sputtering.

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Acknowledgements

We thank Dr. Raphael Niepelt and Dr. Sebastian Geburt for planning, performing and evaluating many of the nanowire implantation experiments presented here. Furthermore, we thank Prof. Dr. Wolfhard Möller for valuable discussion about the simulation codes and Dr.Maria Messing for recording some of the TEM images. We acknowledge financial support for the nanowire implantation experiments by the DFG under grants Ro1198/7-3 and FOR1616.

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  1. Institut für Festkörperphysik, Friedrich-Schiller-Universität Jena, Max-Wien-Platz 1, 07743, Jena, Germany

    Christian Borschel & Carsten Ronning

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  1. Christian Borschel
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  2. Carsten Ronning
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Correspondence to Carsten Ronning .

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  1. Institute of Solid State Physics, Friedrich-Schiller-University Jena, Jena, Germany

    Werner Wesch

  2. Institute of Solid State Physics, Friedrich-Schiller-University, Jena, Germany

    Elke Wendler

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Borschel, C., Ronning, C. (2016). Low Energy Ion Beam Modification of Nanostructures. In: Wesch, W., Wendler, E. (eds) Ion Beam Modification of Solids. Springer Series in Surface Sciences, vol 61. Springer, Cham. https://doi.org/10.1007/978-3-319-33561-2_12

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