Abstract
In this paper the new measurement method for topography characterization of reflective microoptics is presented. The proposed measurement method is based on digital holographic microscope (DHM) system utilizing spherical wave illumination. The method permits to obtain full characterization of shape parameters of high numerical aperture (NA) microstructures such as micromolds [1]. For numerical reconstruction of topography of high NA micromolds modified Spherical Local Ray Approximation (SLRA) algorithm has been employed. We present results of topography reconstruction of triangular reflective micromolds.
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Mikuła, M., Kozacki, T. (2016). Accurate DHM method for topography characterization of reflective microoptics. In: Jabłoński, R., Brezina, T. (eds) Advanced Mechatronics Solutions. Advances in Intelligent Systems and Computing, vol 393. Springer, Cham. https://doi.org/10.1007/978-3-319-23923-1_79
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DOI: https://doi.org/10.1007/978-3-319-23923-1_79
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