Skip to main content

Substrates, Varactors and Passive Components

  • Chapter

Part of the book series: Engineering Materials and Processes ((EMP))

Abstract

This chapter looks at basic designs of ferroelectric varactors. Thin film and thick film varactors with coplanar-plate and parallel-plate electrodes on different substrates are considered. The dielectric properties of high resistivity silicon are addressed having in mind the heterogeneous integration possibilities. Special sections are devoted to the aspects of optimization, equivalent circuit models, I-V, C-V, tuning speed and microwave performances. The last sections look at varactors with increased power handling capability and applications of ferroelectrics as non-tunable high permittivity dielectrics in high density capacitors, MEMs and field effect transistors.

This is a preview of subscription content, log in via an institution.

Buying options

Chapter
USD   29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD   169.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD   219.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD   219.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Learn about institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  • Abadei S et al. (2002) Low frequency and Microwave Performances of Laser Ablated Epitaxial Na 0.5 K 0.5 NbO 3 Films on High Resistivity SiO 2 /Si Substrates. J Appl Phys 91:2267–2276

    Article  ADS  CAS  Google Scholar 

  • Acikel B et al. (2001) Phase shifters using (BaSr)TiO 3 thin films on sapphire and glass substrates. IEEE MTT-S’2001 International Microwave Symposium Digest Volume 2:1191–1194

    Google Scholar 

  • Alford N McN et al. (2005) Improving electrical properties of ferroelectric films by ultraviolate radiation. Appl Phys Lett 87: 22204

    Google Scholar 

  • Aspemyr L et al. (2007) 25 GHz and 28 GHz Wide Tuning Range 130 nm CMOS VCOs with Ferroelectric Varactors. The 2nd IEEE International Workshop on RF Integration Technology, Singapore, Dec. 2007

    Google Scholar 

  • Basceri C et al. (1997) The dielectric response as a function of temperature and film thickness of fiber-textured (Ba,Sr)TiO 3 thin films grown by chemical vapor deposition. J Appl Phys 82 (5):2497–2504

    Article  ADS  CAS  Google Scholar 

  • Berland E et al. (2003) 4th Workshop on MEMS for Millimeterwave Communications, Toulouse:F59–F62

    Google Scholar 

  • Bernacki T A et al. (2004) Barium Strontium Titanate Thin-Film Multi-Layer Capacitors. Passive Component Industry, September/October: 11–13

    Google Scholar 

  • Boikov Yu A et al. (2001) Slow capacitance relaxation in BaSrTiO 3 thin films due to the oxygen vacancy redistribution. Appl Phys Lett 78 (24):366–3868

    Google Scholar 

  • Boikov Yu, Claesson T (2002) c-axis oriented epitaxial Ba 0.25 Sr 0.75 TiO 3 films display Curie-Weiss behavior. Physica B 311:250–262

    Article  ADS  CAS  Google Scholar 

  • Carlsson E and Gevorgian S (1999) Conformal Mapping of the Field and Charge Distributions in Multilayered Substrate CPWs. IEEE Trans. Microwave Theory Tech 47:1544–1552

    Article  Google Scholar 

  • Chase D R et al. (2005) Modeling the Capacitive Nonlinearity in Thin Film BST Varactors. IEEE Trans Micr Theory Tech 53 (10):3215–3220

    Article  Google Scholar 

  • Defaÿ E et al. (2003) Deposition and Characterisation of SrTiO 3 Thin Films Deposited by Ion Beam Sputtering on Platinized Silicon Substrates. Ferroelectrics 288:121–132

    Article  CAS  Google Scholar 

  • Deleniv A et al. (2005) LTCC compatible phase shifters. Digest IMS’2005

    Google Scholar 

  • Deleniv A, Abadei S, and Gevorgian S (2003) Microwave Characterization of Thin Ferroelectric Films. Proc. EuMC’2003 1:483–486

    Google Scholar 

  • Deleniv A, Gevorgian S (2008) Modelling of Conductor Losses in Capacitors with Rectangular and Circular Plates. RFMiCAE, Published on-line August 20, 2008

    Google Scholar 

  • Delpat S et al. (2003) Voltage and Frequency Dependent Dielectric Properties of BST-0.5 Thin films on Alumina Substrate. IEEE Microwave and Wireless Components Letters 13:211213

    Google Scholar 

  • Dillner L, Stake J and Kollberg E (1998) Analysis of symmetric varactor frequency multipliers. Microwave and Optical Technology Letters 15:26–29

    Article  Google Scholar 

  • Eisenbeiser K et al. (2000) Field dielectric in CMOS Field effect transistors with SrTiO 3 gate dielectric on Si. Appl Phys Lett 76 (10):1324–1326

    Article  ADS  CAS  Google Scholar 

  • Erker E G et al. (2000) Monolithic Ka-band phase shifter using voltage tunable BaSrTiO 3  pa rallel-plate capacitors. IEEE Microwave and guided Weave Letters 10:1012

    Google Scholar 

  • Feldman L C et al. (1998) Ultrathin Dielectrics in Silicon Microelectronics. In: Garfunkel E et al. (Ed) Fundamental Aspects of Ultrathin Dielectrics on Si based Devices. Kluwer, Dordrecht

    Google Scholar 

  • Fu J S et al. (2006) A Linearity Improvement Technique for Thin-film Barium Strontium Titanate Capacitors. Dig. IMS 2006:560–563

    Google Scholar 

  • Fusco V F (2000) Topical meeting on silicon integrated circuits in RF systems:5–28

    Google Scholar 

  • Gevorgian S (1998) Surface Impedance of Silicon Substrates and Films. Int Journal of RF and Microwave Computer Aided Design 8:433–440

    Google Scholar 

  • Gevorgian S and Vorobiev A (2007) Tunable Metamaterials Based on Ferroelectric Varactors. Proc. EuMC 2007:404–407

    Google Scholar 

  • Gevorgian S et al. (1997) A Simple and Accurate Dispersion Expression for the Effective Dielectric Constant of Coplanar Waveguides. IEE Proc Antennas and Propagation 144 (2):145–148

    Article  Google Scholar 

  • Gevorgian S et al. (2001) MOS Varactors with Ferroelectric Films. IEEE MTT-S2001 Dig 2:1195–1197

    Google Scholar 

  • Gevorgian S et al. (2006) DC field and temperature dependent acoustic resonances in parallel-plate capacitors based on SrTiO 3 and Ba 0.25 Sr 0.75 TiO 3films. Experiment and modeling. J Appl Phys 99:124112

    Article  ADS  CAS  Google Scholar 

  • Gevorgian S et al. (2006) Electromechanical Modelling and Reduction of the Electroacoustic Losses in Parallel-Plate Ferroelectric Varactors. Proc EuMC:851–853

    Google Scholar 

  • Gevorgian S, Deleniv A, Vorobiev A et al. (2008) CAD Oriented Frequency, temperature and DC bias dependent small-signal, scalable circuit model of parallel-plate paraelectric varactors. RFMiCAE. Published on-line November 3, 2008

    Google Scholar 

  • Guckel H et al. (1967) A Parallel-Plate Waveguide Approach to Microminiaturised, Planar Transmission Linens for Integrated Circuits. IEEE Trans Micr Theory Tech MTT-15:468–476

    Article  Google Scholar 

  • Guillan J et al. (2004) Optimization of surfacic capacitance and leakage currents on Ion Beam Sputtered SrTiO 3-based MIM capacitors for above IC technology. Iteg Ferroelectrics 67:93/1025-102/1034

    Google Scholar 

  • Hansen P J et al. (2004) AlGaN/GaN Metal-oxide-semiconductor Heterostructure Field Effect Transistors using barium strontium titanate. J Vacuum Science and Technology B 22(5): 2479–2485

    Article  ADS  CAS  Google Scholar 

  • Hoffmann F (1996) Grain size effect on the permittivity of CSD prepared BaTiO 3 Thin Films. IWE/RWTH and EKM Report 199:62–63

    Google Scholar 

  • Hu W et al. (2005) Cost effective ferroelectric thick film phase shifter based on screen-printing technology. Dig Int Microwave Symp IMS’2005

    Google Scholar 

  • Imanaka Y et al. (2002) Decoupling Capacitor with Low Inductance for High-Frequency Digital Applications. Fujitsu Sci Tech J 38 (1):22–30

    CAS  Google Scholar 

  • Kageyama K et al. (2005) Thickness Dependences on Microwave Tunable Properties for (Ba, Sr)TiO3 Thin Films in Planar Capacitor Structure. Dig Int Microwave Symp IMS’2005

    Google Scholar 

  • Katta H et al. (2006) Tunable Power Amplifier Using Thin-Film BST Capacitors. Dig Int Microwave Symp IMS’2006:564–567

    Google Scholar 

  • Kenney J S et al. (2006) Low-Voltage Ferroelectric Phase Shifters from L- to C-Band and Their Applications. Aerospace Conference 2006

    Google Scholar 

  • Kerr D C et al. (2008) Identification of RF harmonic distortion on Si substrates and its reduction using a trap-rich layer. SiRFIC Dig:151–154

    Google Scholar 

  • Kim D S et al. (2003) 2.4 GHz Continuously Variable Ferroelectric Phase Shifters Using All-Pass Networks. IEEE Microwave and Wireless Component Lett 13 (10):434–36

    Article  Google Scholar 

  • Kim D S, Kenney J S (2003) Tunable Ba 0.6 Sr 0.4 TiO 3 Interdigital Capacitors for Microwave Applications. Proc 2003 Asia-Pacific Microwave Conf Nov. 4–7, 2003, Seoul, South Korea

    Google Scholar 

  • Kirchoefer S W et al. (1998) Microwave properties of Sr 0.5 Ba 0.5 TiO 3 thin-film interdigitated capacitors. Microwave and Optical Technology Letters 18(3):169–171

    Article  Google Scholar 

  • Knights A P and Kelly M J (1999) Laterally stacked varactor formed by ion implantation. Electronics Letters 35 (10):846–847

    Article  Google Scholar 

  • Koutsaroff I P et al. (2002) Dielectric Properties of (Ba,Sr)TiO 3 MOD Films Grown on Various Substrates. Proc 13th IEEE Intern Symp on Applications of Ferroelectrics, Nara, Japan, May 28–June 1:347–250

    Google Scholar 

  • Kozyrev A B et al. (2007) Time tuning of ferroelectric film varactors under pulse voltages. Appl Phys Lett 91:022905–022907

    Article  ADS  CAS  Google Scholar 

  • Kozyrev A et al. (2003)14 GHz tunable filter base on ferroelectric films. Itegr Ferr 55:905–913

    Article  CAS  Google Scholar 

  • Kozyrev A, Gagarin A, Kosmin D et al. (2005) Residual polarization in paraphase BSTO structures and its impact on parameters of microwave devices. Workshop, EuMC, 2005 , Paris

    Google Scholar 

  • Kuylenstierna D et al. (2007) Performance of Coplanar Waveguides on Surface Passivated Highly Resistive Silicon Covered by Ferroelectric Thin Film. Dig. Int. Microwave Symp. IMS’2007:2055– 2058

    Google Scholar 

  • Lederer D and Raskin J-P (2005) New Substrate passivation Method Dedicated to SOI Wafer Fabrication with Increased Stability of Resistivity. IEEE Electron Device Lett 26 (11): 805–807

    Article  ADS  CAS  Google Scholar 

  • Lemanov V V et al. (1999) Perovskite CaTiO 3 as an incipient ferroelectric. Solid State Communications 110:611–614

    Article  ADS  CAS  Google Scholar 

  • Liu B et al. (2002) High Isolation BST MEM Switches. Dig Int Microwave Symp IEEE MTT-S 2002

    Google Scholar 

  • Martin I et al. (2001) Surface passivation of p-type crystalline Si by plasma enhanced chemical vapor deposited amorphous SiC x :H films. Appl Phys Lett 79:2199–2201

    Article  ADS  CAS  Google Scholar 

  • Mateu J et al. (2006) Measurement and analysis of microwave nonlinearities in ferroelectric thin film transmission lines. Dig IEEE Int Microwave Symp:1622–1625

    Google Scholar 

  • McKee R A et al. (1988) Crystalline Oxides on Silicon: The First Five Monolayers. Phys Rev Lett 81:3014–3017

    Article  ADS  Google Scholar 

  • Morrison F D et al. (2005) High-field conduction in barium titanate. Appl Phys Lett 86:152903-152905

    Article  ADS  CAS  Google Scholar 

  • Mueller C H et al. (2001) Ferroelectric thin film and broad-band satellite systems. IEEE Potentials 20:36–39

    Article  Google Scholar 

  • Nagra A. S (2000) (2000) Applications of Ferroelectrics in Military Systems. IMS 2000 Workshop WFE: Ferroelectric Materials and Microwave Applications

    Google Scholar 

  • Nath J et al. (2006) Discrete Barium Strontium Titanate (BST) Thin-Film interdigital Varactors on Alumina: Design, Fabrication, Characterization, and Applications. Dig IEEE Int Microwave Symp:552–555

    Google Scholar 

  • Nicollian E H and Brews J R (1982) MOS physics and technology, Wiley

    Google Scholar 

  • Noeth A et al. (2007) DC bias-dependent shift of the resonant frequencies in BST film membranes. IEEE Utrasonics, Ferroelectrics and Frequency Control 54:2487–2492

    Article  Google Scholar 

  • Norling M et al. (2007) Comparison of High-Resistivity Silicon Surface Passivation Methods. Proc EuMC2007:215–218

    Google Scholar 

  • Ostapchuk T et al. (2007) Far Infrared Spectroscopy of Sr 1−x Ba x TiO 3(0.01≤x≤0.2) Ceramics. Ferroelectrics 353:70–77

    Article  CAS  Google Scholar 

  • Park D. J et al. (2007) Fully Embedded Compact Diplexer into Organic Package Substrate for Dual-mode (GSM/DCS) Handset Applications. ISIF 2007

    Google Scholar 

  • Petrov P Kr et al. (1998) Improved SrTiO 3 multilayers for microwave application: Growth and Properties. J Appl Phys 84: 3134–3140

    Article  ADS  Google Scholar 

  • Robertson J, Chen C W (1999) Schottky barrier height tantalum oxide, barium strontium titanate, lead titanate, and strontium bismuth tantalite. Appl Phys Let 74:1168–1170

    Article  ADS  CAS  Google Scholar 

  • Rundqvist P, Vorobiev A, Gevorgian S (2006) The effect of SiO 2, Pt and Pt/Au templates on microstructure and permittivity of Ba 0:25 Sr 0:75 TiO 3 films. J Appl Phys 100:114116

    Article  ADS  CAS  Google Scholar 

  • Rundqvist P et al. (2003) DC and microwave resistivities of SrRuO 3 films deposited on SrTiO 3. J Appl Phys 92:1291–1297

    Article  ADS  CAS  Google Scholar 

  • Scheele P et al. (2005) Continuously Tunable Impedance Matching Network Using Ferroelectric Varactors. Dig IEEE Int Microwave Symp IMS’2005:6003–6006

    Google Scholar 

  • Setter N et al. (2004) Polar Ceramics in RF-MEMS and Microwave Reconfigurable Electronics: A Brief Review on Recent Issues. Journal of Electroceramics 13:215–222

    Article  CAS  Google Scholar 

  • Shigemitsu M et al. (2000) Effects of Oxygen Vacancy Diffusion on Leakage Characteristics of Pt/(Ba 0.5 Sr 0.5 )TiO 3 /Pt Capacitor. Jap J App Phys 39:L416

    Article  Google Scholar 

  • Soldatenkov O et al. (2006) Nonlinear properties of thin ferroelectric film based capacitors at elevated microwave power. Appl Phys Lett 89:232901

    Article  ADS  CAS  Google Scholar 

  • Spirito M et al. (2005) Surface Passivated Hig-resistivity Silicon as a true Microwave Substrate. IEEE Trans. Microwave Theory Techn 53:2340–2347

    Article  Google Scholar 

  • Stolichnov I and Tagantsev A (1998) Space-charge influenced-injection model for conduction in PbZr x Ti 12x O 3 thin films. J Appl Phys 84:3216

    Article  ADS  CAS  Google Scholar 

  • Tagantsev A K et al. (2005) Permittivity, tuneability and losses in ferroelectrics for reconfigurable high frequency electronics. In: Setter N (Ed) Electroceramic Based MEMs. Springer

    Google Scholar 

  • Ueda D (1999) Implementation of GaAs Monolithic Microwave Integrated Circuits with OnChip BST Capacitors. J Electroceramics 3:105–113

    Article  CAS  Google Scholar 

  • Van Keuls F et al. (1999) Ku-Band Gold/Ba x Sr 1−x TiO 3 /LaAlO 3 Conductor/Thin Film Ferroelectric Microstripline Phase Shifter for Room Temperature Operation. Microwave and Optical Tech Lett 20:53–56

    Article  Google Scholar 

  • Van Keuls F W et al. (1997) YBCO, Au/STO/LAO thin film conductor/ferroelectric coupled microstrip phase shifters for phased array applications. Appl Phys Lett 71:3075–3077

    Article  ADS  Google Scholar 

  • Velu G et al. (2007) A 360o phase shifter with moderate bias voltage at 30 GHz. IEEE Trans Micr Theory Techn: 52:438–444

    Article  CAS  Google Scholar 

  • Vendik I B et al. (2000) Commutation quality factor of two-state switchable devices. IEEE Transactions Microwave Theory and Techniques 48:802–808

    Article  Google Scholar 

  • Vorobiev A (2008) Unpublished

    Google Scholar 

  • Vorobiev A et al. (2003) Silicon substrate integrated high Q-factor parallel-plate ferroelectric varactors for microwave/millimeterwave applications. Appl Phys Lett 83:3144–3146

    Article  ADS  CAS  Google Scholar 

  • Vorobiev A et al. (2004) Microwave Loss Mechanisms in Ba 0.25 Sr 0.75 TiO 3 Thin Film Varactors. J Appl Phys 96 (8):4642–4649

    Article  ADS  CAS  Google Scholar 

  • Vorobiev A, Rundqvist P, Khamchane K et al. (2004) Microwave Loss Mechanisms in Ba 0.25 Sr 0.75 TiO 3 Thin Film Varactors. J Appl Phys 96:4642–4649

    Article  ADS  CAS  Google Scholar 

  • Voz C et al. (2003) Surface passivation of crystalline silicon by Cat-CVD amorphous and nanocrystalline thin silicon films. Thin Solid Films 430:270–273

    CAS  Google Scholar 

  • Wang G et al. (2005) A High Performance Tunable RF MEMS Switch Using Barium Strontium Titanate (BST) Dielectrics for Reconfigurable Antennas and Phased Arrays. IEEE Anat Wireless Prop. Lett 4:217–220

    Google Scholar 

  • Xu H et al. (2004) Low Phase-Noise 5 GHz AlGaN/GaN HEMT Oscillator Integrated with Ba x Sr 1−x TiO 3 Thin Films. Digest IEEE International Microwave Symposium IMS2004: 1509–1512

    Google Scholar 

  • Yoon Y K et al. (2003) A Reduced Intermodulation Distortion Tunable Ferroelectric Capacitor—Architecture and Demonstration. IEEE Trans Micr Theory Techn 51:2568–2576

    Article  CAS  Google Scholar 

  • York B (2009) Tunable Dielectrics for RF Circuits. In: Steer M (Ed) Multifunctional Adaptive Microwave Circuits and Systems. Scitech, Raleigh

    Google Scholar 

  • You1 H-W et al. (2007) Simulation and Fabrication of Embedded Capacitors for System on Packaging Applications. ISIF 2007

    Google Scholar 

Download references

Authors

Rights and permissions

Reprints and permissions

Copyright information

© 2009 Springer London

About this chapter

Cite this chapter

Gevorgian, S., Vorobiev, A. (2009). Substrates, Varactors and Passive Components. In: Ferroelectrics in Microwave Devices, Circuits and Systems. Engineering Materials and Processes. Springer, London. https://doi.org/10.1007/978-1-84882-507-9_4

Download citation

Publish with us

Policies and ethics