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Machining pp 271–297Cite as

Micro and Nanomachining

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Abstract

Recent advances in miniaturization have led to the development of microscale components, usually in silicon. However, components made from engineering materials require shaping processes other than those established for processing silicon. Therefore, traditional machining processes require further development in order to machine components that are fit for purpose at the micro and nanoscales. This chapter provides a timely review of the current developments and recent advances in the area of micro and nanomachining.

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Authors and Affiliations

  1. Center for Advanced Manufacturing, College of Technology, Purdue University, 401 North Grant Street, 47907, Indiana, IN, USA

    M.J. Jackson

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  1. M.J. Jackson
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© 2008 Springer London

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Jackson, M. (2008). Micro and Nanomachining. In: Machining. Springer, London. https://doi.org/10.1007/978-1-84800-213-5_10

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  • DOI: https://doi.org/10.1007/978-1-84800-213-5_10

  • Publisher Name: Springer, London

  • Print ISBN: 978-1-84800-212-8

  • Online ISBN: 978-1-84800-213-5

  • eBook Packages: EngineeringEngineering (R0)

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