Abstract
Recently, RF micromachining technology has received more attention because it can improve the quality factor of on-chip devices, enhance RF power distribution circuits, innovate RF circuit design, and reduce system cost and size significantly. An overview of research and development of micromachined devices for wireless communication subsystems is presented in this Chapter. Specific devices described include micro-machined inductors with high Q factor, tunable micromachined capacitors, low-loss micromechanical switches, microscale vibrating mechanical resonators, thin-film bulk acoustic resonators(FBARs), micromachined low-loss microwave and millimeter wave filters, and miniaturized antennas for millimeter wave applications.
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Lin, YS., Lu, SS. (2004). Micromachined Devices for Wireless Communication. In: Novel Technologies for Microwave and Millimeter — Wave Applications. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-4156-8_7
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DOI: https://doi.org/10.1007/978-1-4757-4156-8_7
Publisher Name: Springer, Boston, MA
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