Synopsis
Microelectromechanical Systems such as resonators, accelerometers, gyroscopes, IR sensors, RF filters, electrothermal converters and force sensors can be composed out of beam springs, plate masses, dampers, and electromechanical comb sensors and actuators. MEMS design involves iteratively designing each of these submodules and the entire transducer including the electronics, to meet given design specifications. System-level synthesis helps automate much of this design problem for a fixed MEMS transducer topology. First, geometric layout design variables are identified to describe the topology. Next, functional constraints that map these variables to engineering performance specifications are obtained by static and dynamic mechanical as well as electrostatic analysis. Then, the variables and constraints are used to formulate a mixed-integer non-linear optimization problem, which is solved to synthesize the transducer layout from high-level engineering specifications. A variety of objective functions can be used to automate the exploration of the entire design space given specific user-specified engineering constraints, allowing the designer to understand the complex design trade-offs inherent to the design problem.
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Mukherjee, T., Fedder, G.K. (2003). System-Level Synthesis. In: Optimal Synthesis Methods for MEMS. Microsystems, vol 13. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-0487-0_10
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DOI: https://doi.org/10.1007/978-1-4615-0487-0_10
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