Abstract
This chapter looks at the circuit applications of intrinsically and extrinsically tuneable FBARs. VCOs seem to be one of the most attractive circuits for applications of the tuneable FBAR. They benefit both from high Q-factor (much higher than LC tanks based on semiconductor varactors) and tuneability. Perhaps tuneable and switchable filters are the most desired devices. The chapter includes several demonstrators of these types of filters. Some specific applications such as amplifiers, sensors and clocks are also considered.
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References
Aberg M, Ylimaula M, Ylilammi M, Pensala T, Rantala (2007) A low noise 0.9 GHz FBAR clock. Analog Integr Circuits Signal Process 50:29–37, doi:10.1007/s10470-006-9616-1
Ahmet SS, Lee V, Phillips JD, Mortazawi A (2012) A DC voltage dependent switchable acoustically coupled BAW filter based on BST-on-silicon composite structure. IEEE IMS2012
Ancey P (2006) Above IC RF MEMS and BAW filters: fact or fiction. IEEE BCTM 31:337–338 In: Proceedings and application to tuneable filter, proceedings of symposium on ultrasonic electronics, pp 186–190
Berge J, Gevorgian S (2011) Tuneable bulk acoustic wave resonators based on Ba0.25Sr0.75TiO3 thin films and a HfO2/SiO2 Bragg reflectors. IEEE Tr Ultrason Ferreoelectrics Freq Control 58:2768–2771
Berge J, Norling M, Vorobiev A, Gevorgian S (2008) Field and temperature dependent parameters of the dc field induced resonances in BaxSr1-xTiO3-based tuneable thin film bulk acoustic resonators. J Appl Phys 103:064508
Berge J, Vorobiev A, Steichen W, Gevorgian S (2007) Tuneable solidly mounted thin film bulk acoustic resonators based on BaxSr1-xTiO3 films. IEEE Microwave Wireless Comp Lett 17:655–657
Caspari ME, Merz WJ (1950) The electromechanical behavior of BaTi03 single-domain crystals. Phys Rev 80:1082–1089
Cathelin A, Razafimandimby S, Kaiser A (2009) BAW-IC CO-integration tuneable filters at GHz frequencies. In: van Roermund Arthur HM et al (ed) Analog circuit design: smart data converters, filters on chip, multimode transmitter, Springer, Berlin
Chandrahalim H et al (2009) A Pb(Zr0.55Ti0.45)O3-transduced fully differential mechanically coupled frequency agile filter. IEEE Electron Device Lett 30:1296–12998
Chee YH, Niknejad MA, Rabaey J (2005) An ultra-low power injection locked transmitter for wireless sensor networks. IEEE 2005 custom integrated circuits conference, pp 28-2-1–28-2-4
Chen D-Y, Phillips J (2006) Electric field dependence of piezoelectric coefficient in ferroelectric thin films. J Electroceram 17:613–617
Cheng Y, Liu XJ, Wu DJ (2011) Temperature Tuneable Lamb wave based on BST. J Acoust Soc Am 129:1157–1160
Conde J, Muralt P (2008) Characterization of Sol-Gel Pb(Zr0.53Ti0.47)O3 in thin film bulk acoustic resonators. IEEE Trans Ultrason Ferroelectr Freq Control 55:1373–1375
El Hassan M, Kerherve E, Deval Y, David JB, Belot D (2010) Tuneability of bulk acoustic wave filters using CMOS transistors: concept, design and implementation. 2010 IEEE radio frequency integrated circuits symposium, pp 241–244
Flatscher M, Dielacher M, Herndl T, Lentsch T, Matischek Rr, Prainsack J, Pribyl W, Theuss H, and Weber W (2010) A bulk acoustic wave (BAW) based transceiver for an in-tire-pressure monitoring sensor node. IEEE J Sol State Circuits 45:167–177
Frank M, Moon KS, Kassegne S (2010) A PMMA coated PMN-PT single crystal resonator for sensing chemical agents. Smart Mater Struct 19:035015
Gevorgian S, Vorobiev A (2005) Tuneable TFBARs based on BaxSr1-xTiO3 films, workshop on ferroelectrically tuneable microwave devices. 35th European microwave conference, Paris, pp 3–7
Gevorgian S, Lewin T, Jacobsson H, Vorobiev A (2008) Tuneable resonator (FBAR), patent, US 2008/0055023 A1, (Filed June 6 2004)
Gevorgian S, Vorobiev A, and Lewin T (2006) DC field and temperature dependent acoustic resonances in parallel-plate capacitors based on SrTiO3 and Ba0.25Sr0.75TiO3 films. Experiment and modelling J Appl Phys 99:124112 (1–11)
Giraud S, Bila S, Chatras M, Cros D, Aubourg M (2010) Bulk acoustic wave filters synthesis and optimization for multi-standard communication terminals. IEEE Trans Ultrason Ferroelectr Freq Control 57:52–58
Hashimoto Ken-ya (2009) RF bulk acoustic wave filters for communications. Artech House, London
Hu J, Callaghan L, Ruby R, Otis B (2010) A 50 ppm 600 MHz frequency reference utilizing the series resonance of an FBAR. 2010 IEEE radio frequency integrated circuits symposium, pp 325–328
Hu J, Parkery R, Rubyy Ri, and Otis B (2010) A wide-tuning digitally controlled FBAR-based oscillator for frequency synthesis. IEEE international frequency control symposium (FCS’2010) pp 608–612
Iamsakun K, Wilkinson CDW (1972) Generation of surface acoustic waves using the electrostrictive effect. El Let 8:555–557
Iamsakun K, Elder W, Wilkinson CDW, De La Rue RM (1975) Surface acoustic wave devices using electrostrictive transduction. J Phys D Appl Phys 8:266–282
Ito H, Lakdawala H, Ravi A, Pellerano S, Ruby R, Soumyanath K, Masu K (2008) A 1.7-GHz 1.5-mW digitally-controlled FBAR oscillator with 0.03-ppb resolution. 34th European solid-state circuits conference, pp 98–101
Kadota M and Ogami T, (2010) 5.4 GHz lamb wave resonator using LiNbO3 crystal thin plate and application to tuneable filter. In: Proceedings of symposium on ultrasonic electronics, vol 31, pp 337–338
Kadota, M, Kimura T, Ida Y (2009) Nagaokakyoshi, Japan, ultra wide band resonator composed of grooved Cu-electrode on LiNbO3 and its application to tuneable filter. IEEE international ultrasonics symposium (IUS’2009), pp 2668–2671
Kim JJ, Zhang H, Pang W, Yu H, Kim ES (2005) Low phase noise, FBAR-based voltage controlled oscillator without varactor. 13th international conference on solid-state sensors, actuators and microsystems
Kirby PB et al (2001) PZT thin film bulk acoustic wave resonators and filters. 2001 IEEE international frequency control symposium and PDA exhibition, pp 687–694
Lee H-M, Kim H-T, Choi H-K etc (2006) A highly-sensitive differential-mode microchemical sensor using TFBARs with on-chip microheater for volatile organic compound (VOC) detection. MEM’2006, pp 490–493
Lee H-M, Kim H-T, Choi H-K, Hong H-K, Lee D-H, Park J-Y, Bu J-U and Yoon E (2004) Thermally driven thin film bulk acoustic resonator voltage controlled oscillators integrated with microheater elements. Jpn J Appl Phys 43:L 85–L 87
Lee TH, Hajimiri A (2000) Oscillator phase noise: a tutorial. IEEE J Sol St Circuits 35:326–336
Lee V, Sis SA, Zhu X, Mortazawi A (2010) Intrinsically switchable interdigitated barium titanate thin film contour mode resonators. IEEE IMS’2010, pp 1448–1450
Li M et al (2010) Comparison of low phase noise oscillators topologies using BAW resonator. In: Proceedings of the 5th European microwave integrated circuits conference, pp 345–348
Lin JH, Kao YH (2008) A 2.5 GHz voltage controlled FBAR oscillator. Progress in electromagnetics research symposium, pp 73–76
Mason WP (1948) Electrostrictive effect in barium titanate ceramics. Phys Rev 74:1134–1147
Men´endez O, de Paco P, Villarino R, Parr´on J (2006) Closed form expressions for the design of ladder-type FBAR filters. IEEE Microwave Wireless Compon Lett 16:657–659
Morito K, Iwazaki Y, Suzuki T, Fujimoto M (2003) Electric field induced piezoelectric resonance in the micrometer to millimeter waveband in a thin film SrTiO3 capacitor. J Appl Phys 94:5199
Morrison FD et al (2005) High-field conduction in barium titanate. Appl Phys Lett 86:152903
Mortazawi A (2012) Private communication
Muralt P (2008) Piezoelectric films for innovations in the field of MEMS and biosensors. Chapter 15 in Piezoelectricity Springer series in materials science 114
Noeth A, Yamada T, Tagantsev AK, Setter N (2008) Electrical tuning of dc bias induced acoustic resonances in paraelectric thin films. J Appl Phys 104:094102
Piazza G, Stephanou PJ, Pisano AP (2006) Piezoelectric aluminium nitride vibrating contour-mode MEMS resonators. J Microelectromech Syst 15:1406–1418
Rai S, Otis B (2007) A 1 V 600 μW 2.1 GHz quadrature VCO using BAW, resonators. 2007 IEEE international solid-state circuits conference, pp 13–15
Rai S, Su Y, Pang W, Ruby R, Otis B (2010) A digitally compensated 1.5 GHz CMOS/FBAR frequency reference. IEEE Trans Ultrason Ferroelectr Freq Control 57:552–561
Razafimandimby S et al (2006) An electronically tuneable bandpass BAW-filter for a zero-IF WCDMA receiver. In: Proceedings of the 32nd European solid-state circuits conference, pp 142–145
Razafimandimby S et al (2010) Co-Design Considerations for frequency drift compensation in BAW-based time reference application. 2010 IEEE radio frequency integrated circuits symposium, pp 249–252
Saddik GN, York RA (2011) An L-section DC electric field switchable bulk acoustic wave solidly mounted resonator filter based on Ba0.5Sr0.5TiO3, ISAF/PFM2011, pp 1–4
Saddik GN, York RA (2011) Capacitively coupled DC voltage switchable barium strontium titanate solidly mounted resonator filter, IMS’2011
Saddik GN, Boesch D, Stemmer S, York RA (2007) DC electric field tuneable bulk acoustic wave solidly mounted resonator using SrTiO3, Appl Phys Lett 91:043501
Schreiter M et al (2004) Electro-acoustic hysteresis behaviour of PZT thin film bulk acoustic resonators. J Eur Ceram Soc 24:1589–1592
Seyed-Bolorforosh M (1997) Tuneable acoustic resonator for clinical ultrasonic transducers. J Acoust Soc Am 102:17
Tappe S, Böttger U, Waser R (2005) Electrostrictive resonances in Ba0.7Sr0.3TiO3 thin films at microwave frequencies. Appl Phys Lett 85:624
Tilhac C, Razafimandimby S, Cathelin A, Bila S, Madrangeas V, Belot D (2008) A tuneable bandpass BAW-filter architecture using negative capacitance circuitry. 2008 IEEE radio frequency integrated circuits symposium pp 605–608
Turalchuk P, Vendik I, Vendik O, Berge J (2008) Electrically tuneable bulk acoustic filters with induced piezoelectric effect in BSTO film. In: Proceedings of the 1st European wireless technology conference, pp 274–277
Volatier A, Defay E, Aid M, N’hari A, Ancey P, Dubus B (2008) Switchable and tuneable strontium titanate electrostrictive bulk acoustic wave resonator integrated with a Bragg mirror. Appl Phys Lett 92:032906
Vorobiev A, Gevorgian S (2010) Tuneable thin film bulk acoustic wave resonators with improved Q-factor. Appl Phys Lett 96:212904
Vorobiev A, Gevorgian S, Löffler M, Olsson E (2011) Correlations between microstructure and Q-factor of tuneable thin film bulk acoustic wave resonators. J Appl Phys 110:054102
Wang Q-M, Zhang T, Chen Q, Dub X-H (2003) Effect of DC bias field on the complex materials coefficients of piezoelectric resonators. Sens Actuators A 109:149–155
Wasa K et al (2006) Electromechanical coupling factors of single-domain 67PbMg1/3Nb2/3…O3-0.33 PbTiO3 single-crystal thin films. Appl Phys Lett 88:122903
Yasue T, Komatsu T, Nakamura N, Hashimoto K, Hirano H, Esashi M, Tanaka S (2011) Wideband tuneable love wave filter using electrostatically-actuated MEMs variable capacitors integrated on lithium niobate. Transducers’ 2011
Zhang K et al (2011a) Shear-mode PMN-PT piezoelectric single crystal resonator for microfluidic applications. Microelectron Eng 88:1028–1032
Zhang S et al (2011b) Field stability of piezoelectric shear properties in PIN-PMN-PT crystals under large drive field. IEEE Trans Ultrason Ferroelectr Freq Control 58:274–280
Zhu X (2009) Switchable and Tunable ferroelectric thin film radio frequency components. Doctor of Philosophy dissertation, The University of Michigan
Zhu X, Phillips JD, Mortazawi A (2007) A DC voltage dependant switchable thin film bulk wave acoustic resonator using ferroelectric thin film. IEEE IMS2007, pp 671–674
Zinck C, Defay E, Volatier A, Caruyer G, Tanon DP, Figuiere L (2004) Design, integration and characterization of PZT tuneable FBAR. 2004 IEEE international ultrasonics, ferroelectrics, and frequency control joint 50th anniversary conference, pp 29–32
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Gevorgian, S., Tagantsev, A.K., Vorobiev, A. (2013). Circuit Applications of Tuneable FBARs. In: Tuneable Film Bulk Acoustic Wave Resonators. Engineering Materials and Processes. Springer, London. https://doi.org/10.1007/978-1-4471-4944-6_8
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DOI: https://doi.org/10.1007/978-1-4471-4944-6_8
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