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Homogenous and Heterogeneous Models for Silicon Oxidation

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Dispersive Transport Equations and Multiscale Models

Part of the book series: The IMA Volumes in Mathematics and its Applications ((IMA,volume 136))

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Abstract

Asymptotic methods can be used to derive surface reaction models as limiting cases of bulk reaction formulations, a key issue in such reductions being how the surface reaction kinetics depend on the bulk ones. An analysis is given of certain aspects of such limiting processes, as well as of the resulting heterogeneous formulations (which take the form of moving boundary problems), the focus being on anisotropic reaction effects.

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Refrences

  1. J.D. Evans AND J.R. King. On the derivation of heterogeneous reaction kinetics from a homogeneous reaction model. SI AM J. Appl. Math. 60, 1977–1996, 2000.

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© 2004 Springer Science+Business Media New York

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King, J. (2004). Homogenous and Heterogeneous Models for Silicon Oxidation. In: Abdallah, N.B., et al. Dispersive Transport Equations and Multiscale Models. The IMA Volumes in Mathematics and its Applications, vol 136. Springer, New York, NY. https://doi.org/10.1007/978-1-4419-8935-2_13

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  • DOI: https://doi.org/10.1007/978-1-4419-8935-2_13

  • Publisher Name: Springer, New York, NY

  • Print ISBN: 978-1-4612-6473-6

  • Online ISBN: 978-1-4419-8935-2

  • eBook Packages: Springer Book Archive

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