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Scanning Transmission Electron Microscopy pp 353–392Cite as

STEM Tomography

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Abstract

We discuss how electron tomography can be implemented using the STEM imaging mode and how 3D reconstructions can be obtained from nanoscale objects. The theory of tomographic reconstruction and how the STEM HAADF signal is ideal for tomographic acquisition are described. Practical issues are highlighted including the acquisition of tilt series, image alignment and choice of reconstruction algorithm. The visualisation and analysis of the reconstruction is also discussed. Problems and advantages specific to STEM tomography are highlighted and a number of examples of STEM tomography across the field of materials science are presented.

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Acknowledgements

The authors thank all those with whom they have worked in this area including Jonathan Barnard, Juan-Carlos Hernandez, Ana Hungria, Joanne Sharp, Jenna Tong, John Meurig Thomas, Edmund Ward and Tim Yates.

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Authors and Affiliations

  1. Department of Materials Science and Metallurgy, University of Cambridge, Cambridge, UK

    Paul A. Midgley

  2. Monash Centre for Electron Microscopy, Monash University, Melbourne, VIC, Australia

    Matthew Weyland

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Correspondence to Paul A. Midgley .

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Editors and Affiliations

  1. Oak Ridge National Laboratory, 1 Bethel Valley Road, Oak Ridge, 37831-6056, Tennessee, USA

    Stephen J. Pennycook

  2. , Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH, United Kingdom

    Peter D. Nellist

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Midgley, P.A., Weyland, M. (2011). STEM Tomography. In: Pennycook, S., Nellist, P. (eds) Scanning Transmission Electron Microscopy. Springer, New York, NY. https://doi.org/10.1007/978-1-4419-7200-2_8

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