Abstract
The next generation of integrated micro-system technologies can only keep up with increased functionality and performance demands by using the 3rd dimension. The primary drivers for 3D integration are miniaturization, integration of different technologies in a small form-factor, and performance. 3D integration technologies can be grouped into 3 main categories, namely 3D On-chip integration, 3D IC-stacking, and 3D-packaging. This chapter provides a detailed review of each of these categories.
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Chanchani, R. (2009). 3D Integration Technologies – An Overview. In: Lu, D., Wong, C. (eds) Materials for Advanced Packaging. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-78219-5_1
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