Doping Processes for MEMS

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Abstract

Doping processes are utilized to modify electrical properties of semiconductors by making mobile charge carriers available in the material. Doping processes are used in MEMS devices for creating electrically conductive layers for power distribution, heaters, transducers, and other structures. Doped layers are also widely used for controlling specialty etch processes by modification of surface electrochemistry. Typical MEMS doping applications, standard processes for doping MEMS materials, and diagnostic techniques are reviewed.