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Lateral Series Switches

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RF MEMS Switches and Integrated Switching Circuits

Part of the book series: MEMS Reference Shelf ((MEMSRS,volume 5))

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Abstract

The objective of this chapter is to study the lateral RF MEMS series switch [1–14]. The switch consists of a silicon-core (Si-core) transmission line and a cantilever beam. The switch connects or disconnects with the RF circuit by the in-plane motion of the cantilever beam. The Si-core coplanar waveguide (CPW) transmission line is used to configure the switch. The Si-core CPW has the same advantage as the normal CPW, that is, it enables series and shunt elements connection without metal coating. The main advantages of the lateral switch are reliable mechanical performance and simple fabrication process.

Min Tang and Ai Qun Liu

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    Min Tang and Ai Qun Liu

References

  1. A. Q. Liu,M. Tang,A. Agarwal and A. Alphones, “Low-loss lateral micromachined switches for high frequency applications,”J.Micromech. Microeng. Vol. 15,2005,pp. 157–167.

    Article  Google Scholar 

  2. M. Tang, A. Q. Liu, A. Agarwal, Z. S. Liu and C. Lu, “A single-pole double-throw (SPDT) circuit using lateral metal-contact micromachined switches,” Sensor. Actuator.: Phys. A Vol. 121, 2005,pp. 187–196

    Article  Google Scholar 

  3. M. Tang, A. Q. Liu and J. Oberhammer, “A silicon-on-glass single-pole double-throw (SPDT) switching circuit integrated with silicon-core metal-coated transmission line,” J. Micromech. Microeng. Vol. 18, 2008, 095024 (9 pp.).

    Article  Google Scholar 

  4. A. Q. Liu, A. B. Yu, M. F. Karim and M. Tang, “RF MEMS Switches and integrated switching circuits,” J. Semicond. Technol. Sci. Vol. 7(3), 2007, pp. 166–176.

    Article  Google Scholar 

  5. M. Tang, A. Q. Liu and A. Agarwal, “Lateral single-pole-double-throw (SPDT) MEMS switches for 50 MHz-20 GHz wideband applications,” in Asia-Pacific Conference of Transducers and Micro-Nano Technology 2006 (APCOT 2006), Singapore, 25–28 June 2006, Paper No. A-26.

    Google Scholar 

  6. M. Tang, A. Q. Liu, A. Agarwal and Q. X. Zhang, “A new approach of lateral RF MEMS switch,” Analog Integr. Circuits Signal Process. Vol. 40, 2004, pp. 165–173.

    Article  Google Scholar 

  7. A. Q. Liu, W. Palei, M. Tang and A. Alphones, “Microstrip lateral RF MEMS switch integrated with multi-step CPW transition,” Microwave Opt. Technol. Lett. Vol. 44(1), 2005, pp. 93–95.

    Google Scholar 

  8. M. Tang, A. Q. Liu, W. Palei, and A. Agarwal, “A single-pole-double-throw (SPDT) circuit using deep etching lateral metal-contact switches,” IEEE MTT-S International Microwave Symposium Digest (IMS 2004), 6–11 June 2004, pp. 581–584.

    Google Scholar 

  9. M. Tang, A. Agarwal and A. Q. Liu, “A low loss lateral micromachined relay using substrate transfer fabrication process,” in International Conference on Material for Advanced Technologies 2005 (ICMAT 2005).

    Google Scholar 

  10. M. Tang, A. Agarwal, Z. X. Shen and A. Q. Liu, “A high reliability and low loss lateral RF micromachined relay”, in Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2004), 4–7 July 2004, pp. 1042–1047.

    Google Scholar 

  11. W. Palei, M. Tang and A. Q. Liu, “RF MEMS switch integrated with an enhanced back to back microstrip to CPW transition,” in Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2004), 4–7 July 2004, pp. 479–482.

    Google Scholar 

  12. M. Tang, A. Agarwal, J. Li, Q. X. Zhang, P. Win, J. M. Huang and A. Q. Liu, “An approach of lateral RF MEMS switch for high performance,” in Design, Test, Integration, and Packaging of MEMS/MOEMS 2003 (DTIP 2003), 5–7 May 2003, pp. 99–102.

    Google Scholar 

  13. M. Tang, A. Agarwal, P. Win, Q. X. Zhang, J. Li and A. Q. Liu, “A new lateral RF switch using SOI-deep-etching fabrication process,” Int. J. Comput. Eng. Sci. Vol. 4(2), 2003, pp. 369–372.

    Article  Google Scholar 

  14. X. M. Zhang, F. S. Chau, C. Quan and A. Q. Liu, “A study of the static characteristics of a torsional micromirror,” Sensor. Actuator.: Phys. A Vol. 1–2, 2001, pp. 73–81.

    Article  Google Scholar 

  15. Ansoft Corporation, Ansoft Maxwell HFSS, Release 8.0.25, 2001, http://www.ansoft.com

  16. D. M. Pozar, Microwave Engineering, Addison-Wesley Publishing Company, Reading, MA, 1990.

    Google Scholar 

  17. G. B. Rebeiz, “RF MEMS Theory, Design, and Technology,” John Wiley & Sons, Inc., Hoboken, NJ, 2003.

    Book  Google Scholar 

  18. J. M. Gere and S. P. Timoshenko, Mechanics of Material, 4th edn., PWS Publishing Company, Boston, MA, 1997.

    Google Scholar 

  19. S. Rao Singiresu, Mechanical Vibrations, Addison-Wesley Publishing Company, Inc., Reading, MA, 1995.

    Google Scholar 

  20. Wolfram Research, Mathematica, v5.0, 2003.

    Google Scholar 

  21. A. A. Ayon, N. J. Kolias and N. C. MacDonald, “Tunable, micromachined parallel-plate transmission lines,” In IEEE/cornell Conf. on advanced concepts in high speed semiconductor devices and circuits, NY, USA, 7–9 Aug 1995, pp. 201–208.

    Google Scholar 

  22. C. L. Holloway and E. F. Kuester, “Power loss associated with conducting and superconducting rough interfaces,” IEEE Trans. Microwave Theor. Tech. Vol. 48(10), 2000, pp. 1601–1610.

    Article  Google Scholar 

  23. J. J. Yao, “RF MEMS from a device perspective,” J. Micromech. Microeng. Vol. 10, 2000, pp. R9–R38.

    Article  Google Scholar 

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Authors and Affiliations

  1. School of Electrical & Electronic Engineering, Nanyang Technological University, Nanyang Avenue, Singapore, 639798, Singapore

    Dr. Ai Qun Liu

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  1. Dr. Ai Qun Liu
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Correspondence to Ai Qun Liu .

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Liu, A.Q. (2010). Lateral Series Switches. In: RF MEMS Switches and Integrated Switching Circuits. MEMS Reference Shelf, vol 5. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-46262-2_2

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  • DOI: https://doi.org/10.1007/978-0-387-46262-2_2

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  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-0-387-46261-5

  • Online ISBN: 978-0-387-46262-2

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