Abstract
Capacitive transducers can be thought of as a modification of a standard electrical capacitor that allows at least one electrode to move. In the case of sensing, a mechanical input (pressure, force, or acceleration for example) applied to the transducer changes its electrical characteristics, which constitute the sensed output. Capacitive actuation makes uses the same principle with the input and output switched; that is, an electrical input causes at least one electrode to move, thereby causing actuation.
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Adams, T.M., Layton, R.A. (2010). Capacitive transducers. In: Introductory MEMS. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-09511-0_9
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DOI: https://doi.org/10.1007/978-0-387-09511-0_9
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