Introduction

Abstract

Strictly speaking, MEMS is an acronym for micro-electro-mechanical systems. The first M (micro) indicates the small size of MEMS devices. The micrometer, or micron - one one-millionth of a meter - is the base unit of measure in MEMS. (To gage this length, consider that a human hair, on average, is about 50-70 μm in diameter.) The E (electro) refers to electricity, often in the form of electrostatic forces. The second M (mechanical) refers to the fact that these tiny devices have moving parts. Lastly, S (systems) indicates that “electro” and “mechanical” go together, that the electricity and moving parts are integrated into a single system on a MEMS device. And so, when many people think of MEMS, they think of tiny machines - little gear trains, motors and the like - the largest dimension of which is no more than a millimeter. ure 1.1 shows a MEMS device befitting this description. Also shown in Fig. 1.1 is a spidermite, a creature typically measuring 1 mm or less from end to end, which gives perspective to how small the device really is.