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Fabrication of Nanometer-Scale Structures by Local Oxidation Nanolithography

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Applied Scanning Probe Methods IV

Part of the book series: NanoScience and Technology ((NANO))

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Authors and Affiliations

  1. Instituto de Microelectrónica de Madrid, CSIC, C/ Isaac Newton 8, 28760, Tres Cantos, Madrid, Spain

    Marta Tello, Fernando García & Ricardo García

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  1. Marta Tello
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  2. Fernando García
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  3. Ricardo García
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Editor information

Editors and Affiliations

  1. Nanotribology Laboratory for Information Storage and MEMS/NEMS (NLIM), The Ohio State University, 650 Ackerman Road, Suite 255, Columbus, OH, 43202-1107, USA

    Bharat Bhushan

  2. Center for Nanotechnology (CeNTech) and Institute of Physics, University of Münster, Gievenbecker Weg 11, 48149, Münster, Germany

    Harald Fuchs

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Tello, M., García, F., García, R. (2006). Fabrication of Nanometer-Scale Structures by Local Oxidation Nanolithography. In: Bhushan, B., Fuchs, H. (eds) Applied Scanning Probe Methods IV. NanoScience and Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-26914-2_4

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