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B. Keiper, H. Exner, U. Löschner, T. Kunze: J. Laser Applications 12(5), 189–193 (2000)
B. Keiper, R. Ebert, R. Böhme, H. Exner: Proceedings of SPIE 5116, 20–27 (2003)
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© 2005 Springer-Verlag Berlin Heidelberg
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Keiper, B., Petsch, T., Exner, H. (2005). Micro-Processing of Borosilicate Glass and Polymers. In: Basting, D., Marowsky, G. (eds) Excimer Laser Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-26667-4_17
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DOI: https://doi.org/10.1007/3-540-26667-4_17
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-20056-7
Online ISBN: 978-3-540-26667-9
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