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Applied Parallel Computing. State of the Art in Scientific Computing

Volume 3732 of the series Lecture Notes in Computer Science pp 286-295

Model Reduction for RF MEMS Simulation

  • David S. BindelAffiliated withLancaster UniversityDepartment of Electrical Engineering and Computer Science, University of California at Berkeley
  • , Zhaojun BaiAffiliated withCarnegie Mellon UniversityDepartment of Computer Science, University of California at Davis
  • , James W. DemmelAffiliated withCarnegie Mellon UniversityDepartment of Electrical Engineering and Computer Science and, Department of Mathematics, University of California at Berkeley

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Abstract

Radio-frequency (RF) MEMS resonators, integrated into CMOS chips, are of great interest to engineers planning the next generation of communication systems. Fast simulations are necessary in order to gain insights into the behavior of these devices. In this paper, we discuss two structure-preserving model-reduction techniques and apply them to the frequency-domain analysis of two proposed MEMS resonator designs.