Abstract
Hard hydrogenated amorphous carbon films are presently being used in a wide variety of applications as protective coatings. The properties of the carbon films are essentially controlled by the ratio between the number of carbon atoms in sp 2 and sp 3 hybridization states. The properties of the films, which are closely related to the film microstructure, can be tuned by the deposition technique employed and by the growth conditions, with the energy of the impinging species playing the main role in the control of the carbon bonding hybridization. Another way to improve the properties of carbon films is through the incorporation of several elements. In this work, the attention is focused on films deposited by plasma-enhanced chemical vapor deposition, discussing the effects of nitrogen and fluorine incorporation on the film microstructure and on the mechanical and tribological properties.
Keywords
Preview
Unable to display preview. Download preview PDF.
References
J. Robertson: Mater. Sci. Eng. R 37, 129 (2002)
Y. Lifshitz, S. R. Kasi, J. W. Rabalais: Phys. Rev. Lett. 62, 1290 (1989)
J. Robertson: Diamond Relat. Mater. 14, 942 (2005)
A. Grill: Diamond Relat. Mater. 12, 166 (2003)
C. Casiraghi, A. C. Ferrari, J. Robertson, R. Ohr, M. V. Gradowski, D. Schneider, H. Hikgers: Diamond Relat. Mater. 13, 1480 (2004)
Y. Jun, J. Y. Choi, K. R. Lee, B. K. Jeong, S. K. Kwon, C. H. Hwang: Thin Solid Films 233, 377–378 (2000)
R. G. Lacerda, F. C. Marques: Appl. Phys. Lett. 73, 619 (1998)
S. S. Camargo, A. L. B. Neto, R. A. Santos, F. L. Freire, Jr., R. Carius, F. Finger: Diamond Relat. Mater. 7, 1155 (1998)
G. A. J. Amaratunga, M. Chhowalla, C. J. Kiely, I. Alexandou, R. Aharonov, R. M. Devenish: Nature 383, 321 (1996)
S. Muhl, J. M. Mendez: Diamond Relat. Mater. 8, 1809 (1999)
A. Y. Liu, M. L. Cohen: Science 245, 841 (1989)
M.-L. Wu, M. U. Guruz, W. A. Chiou, V. P. Dravid, Y. W. Chung, S. Anders, F. L. Freire, Jr., G. Mariotto: Appl. Phys. Lett. 76, 2692 (2000)
F. L. Freire, Jr.: Jpn. J. Appl. Phys. 36, 4886 (1997)
D. F. Franceschini, C. A. Achete, F. L. Freire, Jr.: Appl. Phys. Lett. 60, 3229 (1992)
S. R. P. Silva, J. Robertson, G. A. J. Amaratunga, B. Raferty, L. M. Brown, J. Schwan, D. F. Franceschini, G. Mariotto: J. Appl. Phys. 81, 2626 (1997)
D. F. Franceschini, F. L. Freire, Jr., S. R. P. Silva: Appl. Phys. Lett. 68, 2645 (1996)
S. Rodil, N. A. Morrison, W. I. Milne, J. Robertson, V. Stolojan, D. N. Jayawardane: Diamond Relat. Mater. 9, 524 (2000)
A. Grill: Diamond Relat. Mater. 10, 234 (2001)
J. A. Theil: J. Vac. Sci. Technol. B 17, 2397 (1999)
A. Grill, V. Patel, C. Jahnes: J. Electrochem Soc. 145, 1649 (1998)
R. d'Agostino, R. Lamendola, P. Favia, A. Giquel: J. Vac. Sci. Technol. A 12, 308 (1994)
K. Endo, T. Tatsumi: J. Appl. Phys. 78, 1370 (1995)
L. G. Jacobsohn, D. F. Franceschini, M. E. H. M. da Costa, F. L. F. Jr.: J. Vac. Sci. Technol. A 18, 2230 (2000)
L. G. Jacobsohn, M. E. H. M. da Costa, V. J. Trava-Airoldi, F. L. Freire, Jr.: Diamond Relat. Mater. 12, 2037 (2003)
R. Prioli, L. G. Jacobsohn, M. E. H. M. da Costa, F. L. Freire, Jr.: Tribol. Lett. 15, 177 (2003)
F. L. Freire, Jr., M. E. H. M. da Costa, L. G. Jacobsohn, D. F. Franceschini: Diamond Relat. Mater. 10, 125 (2001)
C. M. T. Sanchez, M. E. H. M. da Costa, R. R. M. Zamora, R. Prioli, F. L. Freire, Jr.: Diamond Relat. Mater. 13, 1366 (2004)
L. Valentini, J. M. Kenny, R. M. Montereali, L. Lozzi, R. Santucci: J. Vac. Sci. Technol. A 20, 1210 (2002)
H. Yokomichi, A. Masuda: J. Non-Cryst. Solids 271, 147 (2000)
M. E. H. M. da Costa, C. M. T. Sanchez, L. G. Jacobsohn, F. L. Freire, Jr.: Thin Solid Films 482, 109 (2005)
F. L. Freire, Jr., D. F. Franceschini, C. A. Achete: Nucl. Instrum. Meth. B 85, 268 (1994)
K. J. Clay, S. P. Speakman, G. A. J. Amaratunga, S. R. P. Silva: J. Appl. Phys. 79, 7227 (1996)
P. Hammer, W. Gissler: Diamond Relat. Mater. 5, 1152 (1996)
F. D. A. Reis, D. F. Franceschini: Phys. Rev. E 61, 3417 (2000)
W. Jacob: Thin Solid Films 326, 1 (1998)
A. von Keudell, T. Schwarz-Selinger, M. Meier, W. Jacob: Appl. Phys. Lett. 76, 676 (2000)
W. Schwarzenbach, G. Cunge, J. P. Booth: J. Appl. Phys. 85, 7562 (1999)
M. E. H. M. da Costa, F. L. Freire, Jr., L. G. Jacobsohn, D. F. Franceschini, G. Mariotto, I. J. R. Baumvol: Diamond Relat. Mater. 10, 910 (2001)
L. G. Jacobsohn, S. S. Camargo, F. L. Freire, Jr.: Diamond Relat. Mater. 11, 1831 (2002)
D. S. Tuinstra, J. L. Koenig: J. Chem. Phys. 53, 1126 (1970)
R. Kalish, Y. Lifshitz, K. Nugent, S. Prawer: Appl. Phys. Lett. 74, 2936 (1999)
R. O. Dillon, J. A. Woollam, V. Katkanant: Phys. Rev. B 74, 2936 (1999)
A. C. Ferrari, S. E. Rodil, J. R. Robertson: Phys. Rev. B 67, 155306 (2003)
G. Mariotto, C. A. Achete, F. L. Freire, Jr.: Thin Solid Films 241, 255 (1994)
S. R. Salis, D. J. Gardiner, M. Bowden, J. Savage, D. Roway: Diamond Relat. Mater. 5, 589 (1996)
T. E. Karis, G. W. Tyndall, D. Fenzel-Alexander, M. S. Crowder: J. Vac. Sci. Technol. A 15, 2382 (1997)
P. Hammer, W. Gissler: Diamond Relat. Mater. 5, 1152 (1996)
S. E. Rodil, W. Beyer, J. Robertson, W. I. Milne: Diamond Relat. Mater. 12, 921 (2003)
F. L. Freire, Jr., C. A. Achete, G. Mariotto, R. Canteri: J. Vac. Sci. Technol. A 12, 3048 (1994)
U. Müller, R. Hauert, B. Oral, M. Tobler: Surf. Coat. Technol. 367, 76–77 (1995)
G. Binning, S. F. Quate, C. Gerber: Phys. Rev. Lett. 56, 930 (1986)
E. Meyer, R. M. Overney, K. Dransfeld, T. Gyalog: Nanoscience: Friction and Rheology on the Nanometer Scale (World Scientific, Singapore 1996)
F. L. Freire, Jr., R. Prioli: Nanotribology of carbon films, in H. Nalwa (Ed.): Encyclopedia of Nanoscience and Nanotechnology (American Scientific, Stevenson Ranch, California 2004) pp. 899–917
J. M. Neumeister, W. A. Ducker: Rev. Sci. Instrum. 65, 2527 (1994)
E. Liu, B. Blanpain, J. P. Celis, J. R. Roos: J. Appl. Phys. 84, 4859 (1998)
M. M. Lacerda, F. L. Freire, Jr., R. Prioli, C. M. Lepinski, G. Mariotto: J. Vac. Sci. Technol. A 17, 2811 (1999)
W. C. Oliver, G. M. Pharr: J. Mater. Res. 7, 1564 (1992)
J. C. Angus, F. Jansen: J. Vac. Sci. Technol. A 6, 1778 (1988)
R. D. van de Grampel, W. Ming, A. Gildenpfennig, J. Laven, H. H. Brongersma, G. de With, R. van der Linde: Langmuir 20, 145 (2004)
S. S. Perry, C. M. Mate, R. L. White, G. A. Somorjai: IEEE Trans. Mag. 32, 115 (1996)
E. Riedo, F. L'evy, H. Brune: Phys. Rev. Lett. 88, 185505–1
P. Ayala, M. E. H. M. da Costa, R. Prioli, F. L. Freire: Surf. Coat. Technol. 182, 335 (2004)
Author information
Authors and Affiliations
Editor information
Rights and permissions
About this chapter
Cite this chapter
Freire, F.L. Hard Amorphous Hydrogenated Carbon Films and Alloys. In: Messina, G., Santangelo, S. (eds) Carbon. Topics in Applied Physics, vol 100. Springer, Berlin, Heidelberg . https://doi.org/10.1007/11378235_11
Download citation
DOI: https://doi.org/10.1007/11378235_11
Published:
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-29531-0
Online ISBN: 978-3-540-35728-5
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)