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Handbook of Microscopy for Nanotechnology pp 227–246Cite as

Atom Probe Tomography

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6. Summary and Future Perspectives

Atom probe tomography is a powerful tool for the characterization of the size, morphology and composition of ultrafine features in a variety of materials. With the development of new forms of specimen preparation especially with focused ion beam milling systems, atom probe tomography should be extended to a wider variety of applications in nanotechnology.

The local electrode atom probe is a major advance in atom probe design and has greatly simplified the operation of the instrument. There is considerable scope for its continued improvement through increases in the area of analysis, mass resolution and overall data acquisition speed. New, more efficient and automated methods to analyze the three-dimensional data should be also forthcoming as the user base for atom probe tomography increases.

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Author information

Authors and Affiliations

  1. Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, Building 4500S, MS 6136, Oak Ridge, TN, 37831-6136, USA

    M. K. Miller

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  1. M. K. Miller
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Editor information

Editors and Affiliations

  1. Princeton University, Princeton, NJ, USA

    Nan Yao

  2. Georgia Institute of Technology, Atlanta, GA, USA

    Zhong Lin Wang

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© 2005 Kluwer Academic Publishers

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Miller, M.K. (2005). Atom Probe Tomography. In: Yao, N., Wang, Z.L. (eds) Handbook of Microscopy for Nanotechnology. Springer, Boston, MA. https://doi.org/10.1007/1-4020-8006-9_8

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