Skip to main content
SpringerLink
Log in

Characterization of Nano-Crystalline Materials Using Electron Backscatter Diffraction in the Scanning Electron Microscope

  • Chapter
Handbook of Microscopy for Nanotechnology

  • 5479 Accesses

7. Summary

EBSD should now be considered a standard analytical accessory for the SEM. The spatial resolution of EBSD is quite high (as high as a few nm, depending upon material) and is suitable for the study of many nano-crystalline materials. For applications of EBSD where the highest spatial resolution is required, an SEM with a field emission electron source is mandatory as the resolution of the technique is most directly determined by the electron beam size. Further developments the electron optics of the SEM should allow even higher spatial resolutions. For nano-crystalline materials, EBSD is most useful for the mapping of grain orientations and grain boundary misorientations as demonstrated in the examples shown in this chapter.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 169.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Hardcover Book
USD 219.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. J. A. Small and J. R. Michael, J. of Microsc. 201 (2001) 59.

    Article  CAS  MathSciNet  Google Scholar 

  2. J. A. Small, J. R. Michael and D. S. Bright, J. of Microsc. 206 (2002) 170.

    Article  CAS  MathSciNet  Google Scholar 

  3. E. Ma, Scripta Mat. 49 (2003) 663.

    Article  CAS  Google Scholar 

  4. A. J. Schwartz, M. Kumar and B. L. Adams (Eds.), Electron Backscatter Diffraction in Materials Science, Kluwer Academic/Plenum Publishers, New York (2000).

    Google Scholar 

  5. V. Randle, Microtexture Determination and its Application, The Institute of Materials, London (1992).

    Google Scholar 

  6. M. N. Alam, M. Blackman and D. W. Pashley, Proc. Royal Society of London, A221 (1954) 224.

    Article  CAS  ADS  Google Scholar 

  7. J. A. Venable and A. Bin-Jaya, Phil. Mag., 35 (1977) 1317.

    Article  Google Scholar 

  8. D. J. Dingley, Scanning Electron Microscopy IV, 4 (1981) 273.

    Google Scholar 

  9. S. I. Wright and B. L. Adams, Met. Trans. A., 23 (1992) 759.

    Article  Google Scholar 

  10. J. R. Michael and R. P. Goehner, MSA Bulletin, 23 (1993) 168.

    Google Scholar 

  11. R. P. Goehner and J. R. Michael, J. of Res. of the National Institute of Standards and Technology, 101 (1996) 301.

    CAS  Google Scholar 

  12. D. J. Dingley, in: Electron Backscatter Diffraction in Materials Science, A. J. Schwartz, M. Kumar and B. L. Adams (Eds.), pp. 1–19, Kluwer Academic/Plenum Publishers, New York (2000).

    Google Scholar 

  13. O. L. Wells, Scanning, 21 (1999) 368.

    Article  Google Scholar 

  14. V. F. Leavers, Shape Detection in Computer Vision Using the Hough Transform, Springer-Verlag, New York (1992).

    Google Scholar 

  15. S. I. Wright, in: Electron Backscatter Diffraction in Materials Science, A. J. Schwartz, M. Kumar and B. L. Adams (Eds.), pp. 51–64, Kluwer Academic/Plenum Publishers, New York (2000).

    Google Scholar 

  16. J. K. Farrer, M. M. Nowell, D. J. Dingley and D. J. Dingley, Proceedings of Microscopy and Microanalysis 2003, pp. 80–81, Cambridge University Press, New York (2003).

    Google Scholar 

  17. K. Murata, J. Appl. Phys., 45 (1974) 4110.

    Article  CAS  ADS  Google Scholar 

  18. T. C. Isabell and V. P. Dravid, Ultramicroscopy, 67 (1997) 59.

    Article  CAS  Google Scholar 

  19. F. J. Humphreys, Y. Huang, I. Brough and C. Harris, J. of Microsc., 195 (1999) 212.

    Article  CAS  Google Scholar 

  20. S. X. Ren, E. A. Kenik, K. B. Alexander and A. Goyal, Microscopy and Microanalysis, 4 (1998) 15.

    PubMed  CAS  Google Scholar 

  21. F. J. Humphreys and I. Brough, J. of Microsc, 195 (1999) 6.

    CAS  Google Scholar 

  22. D. C. Joy, Proceedings of Microscopy Society of America 1994, pp. 592–593, San Francisco Press, San Francisco, California (1994).

    Google Scholar 

  23. M. W. Phaneuf, Micron, 30 (1999) 277.

    Article  Google Scholar 

  24. M. W. Nowell, J. of Electronic Materials, 31 (2002) 23.

    Article  CAS  Google Scholar 

  25. T. L. Matteson, S. W. Schwartz, E. C. Houge, B. W. Kempshall and L. A. Giannuzzi, J. of Electronic Materials, 31 (2002) 33.

    Article  CAS  Google Scholar 

  26. S. V. Prasad, J. R. Michael and T. R. Christenson, Scripta Mat., 48 (2003) 255.

    Article  CAS  Google Scholar 

  27. J. Goldstein, D. Newbury, D. Joy, C. Lyman, P. Echlin, E. Lifshin, L. Sawyer and J. Michael, Scanning Electron Microscopy and X-ray Microanalysis, pp. 537–564, Kluwer Academic/Plenum Publishers, New York (2003).

    Google Scholar 

  28. R. H. Wang, D. Zubia, T. O’Neil, D. Emin, T. Aselage, W. Zhang and S. D. Hersee, J. of Electronic Materials, 29 (2000) 1304.

    Article  CAS  Google Scholar 

  29. C. P. Flynn and J. A. Eades, Thin Solid Films, 389 (2001) 116.

    Article  CAS  Google Scholar 

  30. T. E. Buchheit, D. A. Lavan, J. R. Michael, T. R. Christenson and S. D. Leith, Metallurgical and Materials Trans. A., 33A (2002) 539.

    Article  Google Scholar 

  31. K. J. Hemker and H. Last, Mat. Sci. and Eng. A., A319 (2000) 882.

    Google Scholar 

  32. P. Lin, G. Palumbo, U. Erb and K. T. Aust, Script Met., 33 (1995) 1387.

    Article  CAS  Google Scholar 

  33. M. Kumar, W. E. King and A. J. Schwartz, Acta Mat., 48 (2000) 2081.

    Article  CAS  Google Scholar 

  34. J. K. MacKenzie, Biometrica, 45 (1958) 229.

    Article  MATH  MathSciNet  Google Scholar 

  35. S. Jararaman, R. L. Edwards and K. J. Hemker, J. of Materials Science, 14 (1999) 688.

    ADS  Google Scholar 

  36. M. Furtsch, M. Offenberg, A. Vila, A. Cornet and J. R. Morante, Thin Solid Films, 296 (1997) 177.

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Sandia National Laboratories Albuquerque, NM, 87185-0886, USA

    J. R. Michael

Authors
  1. J. R. Michael
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Princeton University, Princeton, NJ, USA

    Nan Yao

  2. Georgia Institute of Technology, Atlanta, GA, USA

    Zhong Lin Wang

Rights and permissions

Reprints and permissions

Copyright information

© 2005 Kluwer Academic Publishers

About this chapter

Cite this chapter

Michael, J.R. (2005). Characterization of Nano-Crystalline Materials Using Electron Backscatter Diffraction in the Scanning Electron Microscope. In: Yao, N., Wang, Z.L. (eds) Handbook of Microscopy for Nanotechnology. Springer, Boston, MA. https://doi.org/10.1007/1-4020-8006-9_13

Download citation

Publish with us

Policies and ethics

Search

Navigation