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High Spatial Resolution Quantitative Electron Beam Microanalysis for Nanoscale Materials

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VII. Conclusions

Transmission and scanning electron microscopes provide platforms for a powerful arsenal of electron and x-ray spectrometries that yield chemical characterization of nanoscale particles and nanostructured bulk materials. Combined with the imaging and crystallographic measurement functions of TEMs and SEMs, comprehensive characterization of morphology, crystal structure, and composition becomes possible. The advent of more efficient electron optical systems, spectrometers, and digital imaging devices promises to increase the throughput of these instruments, many of which are already capable of automatic, unattended operation, at least in some operational modes, to vastly increase the accumulation of data. Thus, techniques that are capable of isolating a single nanoparticle or nanostructure feature are also becoming capable of accumulating a great deal of information about a particle array or complex bulk nanostructure. Such large scale databases of information themselves pose a challenge to extract relevant information. Parallel developments in “data mining” techniques will increasingly come into play to solve the challenges raised by nanoscale materials.

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Newbury, D.E., Scott, J.H.J., Wight, S., Small, J.A. (2005). High Spatial Resolution Quantitative Electron Beam Microanalysis for Nanoscale Materials. In: Yao, N., Wang, Z.L. (eds) Handbook of Microscopy for Nanotechnology. Springer, Boston, MA. https://doi.org/10.1007/1-4020-8006-9_12

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