Abstract
As candidate materials for future wiring technologies, carbon nanotubes possess extraordinary physical and electrical characteristics. Carbon nanotubes have high current carrying capacity, excellent thermal conductivity, low thermal expansion coefficients, and are less susceptible to electromigration than conventional interconnect materials such as copper, tungsten and aluminum. It is likely that carbon nanotubes in combination with conventional materials will be implemented as a hybrid solution in on-chip interconnect technologies. Contact resistance at the nanotube–metal interface becomes a primary area for reliability engineering. Recent improvements in plasma based processing have demonstrated that individual, high-length-to-diameter ratio, vertically oriented carbon nanotubes can be fabricated to achieve architectures useful for advanced technologies. In this chapter, we present an overview of carbon nanotubes based electronics and describe our recent works in the development of carbon nanotube as a candidate interconnect material. The overview is limited to the fundamental characteristics of carbon nanotubes as implemented in wiring applications. We address the challenges and opportunities facing carbon nanotube implementation in CMOS semiconductor processing, as well as other possible nanoelectromechanical applications.
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References
B.T. Kelly, Physics of Graphite, Applied Science, 1981.
R. Saito, G. Dresselhaus, and M.S. Dresselhaus, Physical Properties of Carbon Nanotubes, Imperial College Press, London, 1998.
K. Hata, D.N. Futaba, K. Mizuno, T. Namai, M. Yumura, and S. Iijima, Water-assisted highly efficient synthesis of impurity-free single-walled carbon nanotubes, Science, 306, p. 1362 (2004).
K.B.K. Teo, C. Singh, M. Chhowalla, and W.I. Milne, Catalytic synthesis of carbon nanotubes and nanofibers, Encyclopedia of Nanoscience and Nanotechnology, 1, pp. 665–686 (2004).
P.E. Nolan, D.C. Lynch, and A.H. Cutler, Carbon deposition and hydrocarbon formation on group VIII metal catalysts, J. Phys. Chem. B, 102, p. 4165 (1998).
L.M. Viculis, J.J. Mack, and R.B. Kaner, A chemical route to carbon nanoscrolls, Science, 299, p. 1361 (2003).
C.R. Martin, Nanomaterials—a membrane-based synthetic approach, Science, 266, p. 1961 (1994).
M. Dresselhaus, G. Dresselhaus, and P.C. Eklund, Science of Fullerenes and Carbon Nanotubes, Academic Press, San Diego, 1996.
D.H. Robertson, D.W. Brenner, and J.W. Mintmire, Energetics of nanoscale graphitic tubules, Phys. Rev. B, 45, p. 12592 (1992).
S. Sawada and N. Hamada, Energetics of carbon nano-tubes, Solid State Comm., 83, p. 917 (1992).
T.W. Odom, J. Huang, P. Kim, and C.M. Lieber, Structure and electronic properties of carbon nanotubes, J. Phys. Chem. B, 104, p. 2794 (2000).
M. Meyyappan, Carbon Nanotubes: Science and Applications, Boca Raton, CRC Press, 2004.
S.J. Tans, M.H. Devoret, H. Dai, A. Thess, R.E. Smalley, L.J. Geerligs, and C. Dekker, Individual single-wall carbon nanotubes as quantum wires, Nature, 386, p. 474 (1997).
A. Javey, J. Guo, Q. Wang, M. Lundstrom, and H. Dai, Ballistic carbon nanotube field-effect transistors, Nature, 424, p. 654 (2003).
D.J. Thouless, Maximum metallic resistance in thin wires, Phys. Rev. Lett., 39, p. 1167 (1977).
C.T. White and T.N. Todorov, Carbon nanotubes as long ballistic conductors, Nature, 393, p. 240 (1998).
A.G. Rinzler, et al., Large scale purification of single wall carbon nanotubes: process, product and characterization, Appl. Phys. A, 6, p. 29 (1998).
S. Frank, P. Poncharal, Z.L. Wang, and W.A. de Heer, Carbon nanotube quantum resistors, Science, 280, p. 1744 (1998).
P.G. Collins, M.S. Arnold, and P. Avouris, Engineering carbon nanotubes and nanotube circuits using electrical breakdown, Science, 292, p. 706 (2001).
P.J. de Pablo, E. Graugnard, B. Walsh, R.P. Andres, S. Datta, and R. Reifenberger, A simple, reliable technique for making electrical contact to multiwalled carbon nanotubes, Appl. Phys. Lett, 74, p. 323 (1999).
K.S. Novoselov, A.K. Geim, S.V. Morozov, D. Jiang, Y. Zhang, S.V. Dubonos, I.V. Grigorieva, and A.A. Firsov, Electric field effect in atomically thin carbon films, Science, 306, p. 666 (2004).
J. Lu and J. Han, Carbon nanotubes and nanotube-based nano devices, Int. J. High Speed Electron. Sys., 9, p. 101 (1998).
R.S. Ruoff, D. Qian, and W.K. Liu, Mechanical properties of carbon nanotubes: theoretical predictions and experimental measurements, C.R. Physique, 4, p. 993 (2003).
M.M.J. Treacy, et al., Exceptionally high Young’s modulus observed for individual carbon nanotubes, Nature, 381, pp. 678–680 (1996).
D. Srivastava, M. Menon, and K. Cho, Nanoplasticity of single-walled carbon nanotubes under uniaxial compression, Phys. Rev. Lett., 83, p. 2973 (1999).
J.-P. Salvetat-Delmotte and A. Rubio, Mechanical properties of carbon nanotubes: a fiber digest for beginners, Carbon, 40, pp. 1729–1734 (2002).
D. Qian, G.J. Wagner, W.K. Liu, M.-F. Yu, and R.S. Ruoff, Mechanics of carbon nanotubes, Appl. Mech. Rev., 55, p. 495 (2002).
E.V. Barrera, Key methods for developing single wall nanotube composites, J. Mater., 52, p. 38 (2000).
J. Sandler, et al., Development of a dispersion process for carbon nanotubes in a epoxy matrix and the resulting electrical properties, Polymer, 40, p. 5967 (1999).
C. Park, et al., Dispersion of single wall carbon nanotubes by in situ polymerization under sonication, Chem. Phys. Lett., 364, p. 303 (2002).
J.-M. Benoit, et al., Transport properties of PMMA carbon nanotubes composites, Synth. Metals, 121, p. 1215 (2001).
R. Safdi, R. Andrews, and E.A. Grulke, Multiwalled carbon nanotube polymer composites: synthesis and characterization of thin films, J. Appl. Polymer Sci., 84, p. 2660 (2002).
B.E. Kilbride, et al., Experimental observation of scaling laws for alternating current and direct current conductivity in polymer-carbon nanotube composite thin films, J. Appl. Phys., 92, p. 4024 (2002).
M.S.P. Shaffer and A.H. Windle, Fabrication and characterization of carbon nanotube/poly(vinyl alcohol) composites, Adv. Mater., 11, p. 938 (1999).
G.-D. Zhan, et al., Electrical properties of nanoceramics reinforced with ropes of single-walled carbon nanotubes, Appl. Phys. Lett., 83, p. 1228 (2003).
R.Z. Ma, et al., Processing and properties of carbon nanotubes-nano-SiC ceramics, J. Mater. Sci., 33, p. 5243 (1998).
G.L. Hwang and K.C. Hwang, Carbon nanotube reinforced ceramics, J. Mater. Chem., 11, p. 1722 (2001).
J.-M. Ting and M.L. Lake, Vapor grown carbon fiber reinforced aluminum composites with very high thermal conductivity, J. Mater. Res., 10, p. 247 (1995).
S.R. Dong, et al., An investigation of the sliding wear behavior of Cu-matrix composite reinforced by carbon nanotubes, Mater. Sci. Eng. A, 313, p. 83 (2001).
R. Zong, et al., Fabrication of nano-Al based composites reinforced by single-walled carbon nanotubes, Carbon, 41, p. 848 (2003).
H. Dai, J.H. Hafner, A.G. Rinzler, D.T. Colbert, and R.E. Smalley, Nanotubes as nanoprobes in scanning probe microscopy, Nature, 384, p. 147 (1996).
S.S. Wong, E. Joselevich, A.T. Woolley, C.L. Cheung, and C. M Lieber, Covalently functionalized nanotubes as nanometre- sized probes in chemistry and biology, Nature, 394, p. 52 (1998).
C.V. Nguyen, K. Chao, R.M. Stevens, L. Delzeit, A. Cassell, J. Han, and M. Meyyappan, Carbon nanotube tip probes: stability and lateral resolution in scanning probe microscopy and application to surface science in semiconductors, Nanotechnol., 12, p. 363 (2001).
Q. Ye, A.M. Cassell, H. Liu, K.-J. Chao, J. Han, and M. Meyyappan, Large-scale fabrication of carbon nanotube probe tips for atomic force microscopy critical dimension imaging applications, Nano. Lett., 4, p. 1301 (2004).
M. Desquesnes, S.V. Rotkin, and N.R. Aluru, Calculation of pull-in voltages for carbon-nanotube-based nanoelectromechanical switches, Nanotechnol., 13, p. 120 (2002).
S.W. Lee, D.S. Lee, R.E. Morjan, S.H. Jhang, M. Sveningsson, O.A. Nerushev, Y.W. Park, and E.E.B. Campbell, A three-terminal carbon nanorelay, Nano. Lett., 4, p. 2027 (2004).
J.M. Kinaret, T. Nord, and S. Viefers, A carbon-nanotube-based nanorelay, Appl. Phys. Lett., 82, p. 1287 (2003).
P. Kim, L. Shi, A. Majumdar, and P.L. McCuen, Thermal transport measurements of individual multiwalled nanotubes, Phys. Rev. Lett., 87, p. 215502 (2001).
J. Hone, B. Batlogg, Z. Benes, A.T. Johnson, and J.E. Fischer, Quantized phonon spectrum of single-wall carbon nanotubes, Science, 289, p. 1730 (2000).
J. Hone, M.C. Llagun, M.J. Biercuk, A.T. Johnson, B. Batlogg, Z. Benes, and J.E. Fischer, Thermal properties of carbon nanotubes and nanotube based materials, Appl. Phys. A, 74, p. 339 (2002).
S.U.S. Choi, Z.G. Zhang, W. Yu, F.E. Lockwood, and E.A. Grulke, Anomalous thermal conductivity enhancement in nanotube suspensions, Appl. Phys. Lett., 79, p. 2252 (2001).
M.J. Biercuk, M.C. Llaguno, M. Radosavljevic, J.K. Hyun, A.T. Johnson, and J.E. Fischer, Carbon nanotube composites for thermal management, Appl. Phys. Lett., 80, p. 2767 (2002).
H.F. Chuang, S.M. Cooper, M. Meyyappan, and B.A. Cruden, Improvement of thermal contact resistance by carbon nanotubes and nanofibers, J. Nanosci. Nanotech., 4, p. 964 (2004).
Q. Ngo, B.A. Cruden, A.M. Cassell, G. Sims, M. Meyyappan, J. Li, and C.Y. Yang, Thermal interface properties of Cu-filled vertically aligned carbon nanofiber arrays, Nano. Lett., 4, p. 2403 (2004).
F. Entwisle, Thermal expansion of pyrolytic graphite, Phys. Lett., 2, pp. 236–238 (1962).
E.A. Heintz, The measurement of the coefficient of thermal expansion of graphite artefacts, Carbon, 28, p. 233 (1990).
H. Jiang, B. Liu, Y. Huang, and K.C. Hwang, Thermal expansion of single wall carbon nanotubes, J. Eng. Matr. And Technol., 126, p. 265 (2004).
S. Iijima, Helical microtubules of graphitic carbon, Nature, 354 p. 56 (1991).
T.W. Ebbesen and P.M. Ajayan, Large scale synthesis of carbon nanotubes, Nature, 358, p. 220 (1992).
A. Thess, et al., Crystalline ropes of metallic carbon nanotubes, Science, 273, p. 483 (1996).
R.O. Loutfy, et al., in E. Osawa, Ed., Perspectives Fullerene Nanotechnology, Kluwer, Dordrecht, 2002, p. 35.
J. Kong, H.T. Soh, A.M. Cassell, C.F. Quate, and H. Dai, Synthesis of individual single salled carbon nanotubes on patterned silicon wafers, Nature, 395, p. 878 (1998).
S.S. Fan, M.G. Chapline, N.R. Franklin, T.W. Tombler, A.M. Cassell, and H. Dai, Self-oriented regular arrays of carbon nanotubes and their field emission properties, Science, 283, p. 512 (1999).
A.M. Cassell, J.A. Raymakers, J. Kong, and H. Dai, Large-scale CVD synthesis of single walled carbon nanotubes, J. Phys. Chem. B, 103, p. 6484 (1999).
H. Dai, et al., Single-wall nanotubes produced by metal-catalyzed disproportionation of carbon monoxide, Chem. Phys. Lett., 260, p. 471 (1996).
B.C. Satishkumar, A. Govindraj, R. Sen, and C.N.R. Rao, Single-walled nanotubes by the pyrolysis of acetylene-organometallic mixtures, Chem. Phys. Lett., 293, p. 47 (1998).
P. Nikolaev, et al., Gas-phase catalytic growth of single-walled carbon nanotubes from carbon monoxide, Chem. Phys. Lett., 313, p. 91 (1999).
Y. Avigal and R. Kalish, Growth of aligned carbon nanotubes by biasing during growth, Appl. Phys. Lett., 78, p. 2291 (2001).
Y. Zhang, et al., Electric-field-directed growth of aligned single-walled carbon nanotubes, Appl. Phys. Lett., 79, p. 3155 (2001).
M. Meyyappan, L. Delzeit, A. Cassell, and D. Hash, Carbon nanotube growth by PECVD: a review, Plasma Sources Sci. Technol., 12, p. 205 (2003).
L. Delzeit, et al., Growth of multiwall carbon nanotubes in an inductively coupled plasma reactor, J. Appl. Phys., 91, p. 6027 (2002).
K. Matthews, B. Cruden, B. Chen, M. Meyyappan, and L. Delzeit, Plasma enhanced chemical vapor deposition of multiwalled carbon nanofibers, J. Nanosci. Nanotech., 2, p. 475 (2002).
G.W. Ho, A.T.S. Wee, J. Lin, and W.C. Tjiu, Synthesis of well-aligned multiwalled carbon nanotubes on Ni catalyst using radio frequency plasma-enhanced chemical vapor deposition, Thin Solid Films, 388, p. 73 (2001).
H. Ishida, et al., Experimental study of fullerene-family formation using radio-frequency-discharge reactive plasmas, Thin Solid Films, 407, p. 26 (2002).
N. Satake, et al., Production of carbon nanotubes by controlling radio-frequency glow discharge with reactive gases, Physica B, 323, p. 290 (2002).
Y.H. Wang, et al., Synthesis of large area aligned carbon nanotube arrays from C2H2–H2 mixture by rf plasma-enhanced chemical vapor deposition, Appl. Phys. Lett., 79, p. 680 (2001).
L. Valentini, et al., Formation of carbon nanotubes by plasma enhanced chemical vapor deposition: role of nitrogen and catalyst layer thickness, J. Appl. Phys., 92, p. 6188 (2002).
B.O. Boskovic, et al., Large-area synthesis of carbon nanofibres at room temperature, Nature Mater., 1, p. 165 (2002).
L.C. Qin, D. Zhou, A.R. Krauss, and D.M. Gruen, Growing carbon nanotubes by microwave plasma-enhanced chemical vapor deposition, Appl. Phys. Lett., 72, p. 3437 (1998).
O. Kuttel, et al., Electron field emission from phase pure nanotube films grown in a methane/hydrogen plasma, Appl. Phys. Lett., 73, p. 2113 (1998).
S.H. Tsai, C.W. Chao, C.L. Lee, and H.C. Shin, Bias-enhanced nucleation and growth of the aligned carbon nanotubes with open ends under microwave plasma synthesis, Appl. Phys. Lett., 74, p. 3462 (1999).
Q. Zhang, et al., Carbon films with high density nanotubes produced using microwave plasma assisted CVD, J. Phys. Chem. Solids, 61, p. 1179 (2000).
Y.C. Choi, et al., Growth of carbon nanotubes by microwave plasma-enhanced chemical vapor deposition at low temperature, J. Vac. Sci. Technol. A, 18, p. 1864 (2000).
Y.C. Choi, et al., Effect of surface morphology of Ni thin film on the growth of aligned carbon nanotubes by microwave plasma-enhanced chemical vapor deposition, J. Appl. Phys., 88, p. 4898 (2000).
M. Okai, T. Muneyoshi, T. Yaguchi, and S. Sasaki, Structure of carbon nanotubes grown by microwave-plasma-enhanced chemical vapor deposition, Appl. Phys. Lett., 77, p. 3468 (2000).
C. Bower, W. Zhu, S. Jin, and O. Zhou, Plasma-induced alignment of carbon nanotubes, Appl. Phys. Lett., 77, p. 830 (2000).
H. Cui, O. Zhou, and B.R. Stoner, Deposition of aligned bamboo-like carbon nanotubes via microwave plasma enhanced chemical vapor deposition, J. Appl. Phys., 88, p. 6072 (2000).
Y. Chen, et al., Well-aligned graphitic nanofibers synthesized by plasma-assisted chemical vapor deposition, Chem. Phys. Lett., 272, p. 178 (1997).
Y. Chen, L.P. Guo, D.J. Johnson, and R.H. Prince, Plasma-induced low-temperature growth of graphitic nanofibers on nickel substrates, J. Cryst. Growth, 193, p. 342 (1998).
Z.F. Ren, et al., Synthesis of large arrays of well-aligned carbon nanotubes on glass, Science, 282, p. 1105 (1998).
J. Han, et al., Growth and emission characteristics of vertically well-aligned carbon nanotubes grown on glass substrate by hot filament plasma-enhanced chemical vapor deposition, J. Appl. Phys., 88, p. 7363 (2000).
Y. Hayashi, T. Negishi, and S. Nishino, Growth of well-aligned carbon nanotubes on nickel by hot-filament-assisted dc plasma chemical vapor deposition in a CH4/H2 plasma, J. Vac. Sci. Technol. A, 19, p. 1796 (2001).
Z.P. Huang, et al., Effect of nickel, iron and cobalt on growth of aligned carbon nanotubes, Appl. Phys. A, 74, p. 387 (2002).
B.A. Cruden, A.M. Cassell, Q. Ye, and M. Meyyappan, Reactor design considerations in the hot filament/direct current plasma synthesis of carbon nanofibers, J. Appl. Phys., 94, p. 4070 (2003).
V.I. Merkulov, et al., Patterned growth of individual and multiple vertically aligned carbon nanofibers, Appl. Phys. Lett., 76, p. 3555 (2000).
V.I. Merkulov, et al., Shaping carbon nanostructures by controlling the synthesis process, Appl. Phys. Lett., 79, p. 1178 (2001).
V.I. Merkulov, et al., Alignment mechanism of carbon nanofibers produced by plasma-enhanced chemical-vapor deposition, Appl. Phys. Lett., 79, p. 2970 (2001).
K.B.K. Teo, et al., Uniform patterned growth of carbon nanotubes without surface carbon, Appl. Phys. Lett., 79, p. 1534 (2001).
M. Chhowalla, et al., Growth process conditions of vertically aligned carbon nanotubes using plasma enhanced chemical vapor deposition, J. Appl. Phys., 90, p. 5308 (2001).
K.B.K. Teo, et al., Characterization of plasma-enhanced chemical vapor deposition carbon nanotubes by Auger electron spectroscopy, J. Vac. Sci. Technol., B, 20, p. 116 (2002).
M. Tanemura, et al., Growth of aligned carbon nanotubes by plasma-enhanced chemical vapor deposition: optimization of growth parameters, J. Appl. Phys., 90, p. 1529 (2001).
J. Han, et al., NH3 effect on the growth of carbon nanotubes on glass substrate in plasma enhanced chemical vapor deposition, Thin Solid Films, 409, p. 120 (2002).
J. Han, et al., Tip growth model of carbon tubules grown on the glass substrate by plasma enhanced chemical vapor deposition, J. Appl. Phys., 91, p. 483 (2002).
Y.Y. Wei, et al., Effect of catalyst film thickness on carbon nanotube growth by selective area chemical vapor deposition, Appl. Phys. Lett., 78, p. 1394 (2001).
F. Kreupl, A.P. Graham, G.S. Duesberg, W. Steinhögl, M. Liebau, E. Unger, and W. Hönlein, Carbon nanotubes in interconnect applications, Microelectronic Engineering, 64, p. 399 (2002).
G.S. Duesberg, et al.Growth of isolated carbon nanotubes with lithographically defined diameter and location, Nano. Lett., 3, p. 257 (2003).
M. Nihei, A. Kawabata, and Y. Awano, Direct diameter-controlled growth of multiwall carbon nanotubes on nickel-silicide layer, Jpn. J. Appl. Phys., 42(6B), pp. L721–L723 (2003).
M. Horibe, M. Nihei, D. Kondo, A. Kawabata, and Y. Awano, Mechanical polishing technique for carbon nanotube interconnects in ULSIs, Jpn. J. Appl. Phys., 43(9A), p. 6499 (2004).
B.Q. Wei, R. Vajtai, and P.M. Ajayan, Reliability and current carrying capacity of carbon nanotubes, Appl. Phys. Lett., 79, p. 1172 (2001).
J. Li, et al., Electronic properties of multiwalled carbon nanotubes in an embedded vertical array, Appl. Phys. Lett., 81, p. 910 (2002).
J. Li, et al., A bottom-up approach for carbon nanotube interconnects, Appl. Phys. Lett., 82, p. 2491 (2003).
International Technology Roadmap For Semiconductors (ITRS), Edition 2003.
P. Kapur, J.P. McVittie, and K.C. Saraswat, Technology and reliability constrained future copper interconnects. I. Resistance modeling, IEEE Trans. Elect. Dev., 49, p. 590 (2002).
P. Kapur, G. Chandra, J.P. McVittie, and K.C. Saraswat, Technology and reliability constrained future copper interconnects. II. Performance implications, IEEE Trans. Elect. Dev., 49, p. 598 (2002).
H. Hwang, M. Meyyappan, G.S. Mathad, and R. Ranade, Simulations and experiments of etching of silicon in HBr plasmas for high aspect ratio features, J. Vac. Sci. Technol. B, 20, p. 2199 (2002).
M.S. Dresselhaus, G. Dresselhaus, K. Sugihara, I.L. Spain, and H.A. Goldberg, in M. Cardona, Ed., Graphite Fibers and Filaments, Springer Series in Materials Science, Vol. 5, New York, 1988, pp. 188–202.
L. Zhang, D. Austin, V.I. Merkulov, A.V. Meleshko, K.L. Klein, M.A. Guillorn, D.H. Lowndes, and M.L. Simpson, Four-probe charge transport measurements on individual vertically aligned carbon nanofibers, Appl. Phys. Lett., 84, p. 3972 (2004).
M.P. Anantram, S. Datta, and Y. Xue, Coupling of carbon nanotubes to metallic contacts, Phys. Rev. B, 61, p. 14219 (2000).
N. Mingo and J. Han, Conductance of metallic carbon nanotubes dipped into metal, Phys. Rev. B, 64, p. 201401 (2001).
R. Rosen, W. Simendinger, C. Debbault, H. Shimoda, L. Fleming, B. Stoner, and O. Zhou, Application of carbon nanotubes as electrodes in gas discharge tubes, Appl. Phys. Lett., 76, p. 1668 (2000).
K.B.K. Teo, et al., Plasma enhanced chemical vapour deposition carbon nanotubes/nanofibres—how uniform do they grow?, Nanotechnology, 14, p. 204 (2003).
A. Rochefort, P. Avouris, F. Lesage, and D.R. Salahub, Electrical and mechanical properties of distorted carbon nanotubes, Phys. Rev. B, Condens. Matter, 60, p. 13824 (1999).
A. Bachtold, M. Henny, C. Terrier, C. Strunk, C. Schonenberger, J.-P. Salvetat, J.-M. Bonard, and L. Forro, Contacting carbon nanotubes selectively with low-ohmic contacts for four-probe electric measurements, Appl. Phys. Lett., 73, p. 274 (1998).
J. Appenszeller, R. Martel, P. Avouris, H. Stahl, and B. Lengeler, Optimized contact configuration for the study of transport phenomena in ropes of single-wall carbon nanotubes, Appl. Phys. Lett., 78, p. 3313 (2001).
Q. Ngo, D. Petranovic, S. Krishnan, A.M. Cassell, Q. Ye, J. Li, M. Meyyappan, and C.Y. Yang, Electron transport through metal-multiwall carbon nanotube interfaces, IEEE Trans. Nanotechnol., 3, p. 311 (2004).
J. Tersoff, Contact resistance of carbon nanotubes, Appl. Phys. Lett., 74, p. 2122 (1999).
M.P. Anantram, Which nanowire couples better electrically to a metal contact: armchair or zigzag nanotube? Appl. Phys. Lett., 78, p. 2055 (2001).
S.-H. Rhee, Y. Du, and P.S. Ho, Thermal stress characteristics of Cu/oxide and Cu/low-k submicron interconnect structures, J. Appl. Phys., 93, p. 3926 (2003).
H.J. Qi, K.B.K. Teo, K.K.S. Lau, M.C. Boyce, W.I. Milne, J. Robertson, and K.K. Gleason, Determination of mechanical properties of carbon nanotubes and vertically aligned carbon nanotube forests using nanoindentation, J. Mech. Phys. Solids, 51, p. 2213 (2003).
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Cassell, A.M., Li, J. (2007). Carbon Nanotube Based Interconnect Technology: Opportunities and Challenges. In: Suhir, E., Lee, Y.C., Wong, C.P. (eds) Micro- and Opto-Electronic Materials and Structures: Physics, Mechanics, Design, Reliability, Packaging. Springer, Boston, MA. https://doi.org/10.1007/0-387-32989-7_5
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