Skip to main content
SpringerLink
Log in

Vapor Deposition Polymerization as a Route to Fluorinated Polymers

  • Chapter
Book cover Fluoropolymers 1: Synthesis

Part of the book series: Topics in Applied Chemistry ((TAPP))

  • 428 Accesses

Conclusions

An overview of the properties of the materials we are studying is presented in Table 18.11. The objective of this work was to find new approaches to the problem of generating new media with low dielectric constants and high thermal stabilities for use as interlayer dielectrics in microelectronic interconnection applications. We have been partially successful in this quest but there is still much more work to be done. The materials we have been able to deposit remain to be characterized in full detail, which includes not only elucidating their molecular structure but also measuring the panoply of physical properties necessary for practical applications.

VDP also provides a route for the synthesis of thin films without the use of toxic solvents, an opportunity not to be overlooked in this era of increased environmental watchfulness. There remains, however, the challenge of preparing potential source materials useful in this methodology. The amazingly productive field of Organic Chemistry will most certainly be able to meet this challenge.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 189.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 249.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 249.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. T.-M. Lu, Personal Communication (1994).

    Google Scholar 

  2. R. R. Tummala and E. J. Rymaszewski, Microelectronics Packaging Handbook, Van Nostrand Reinhold, New York (1989), pp. 673–725.

    Google Scholar 

  3. C. C. Ku and R. Liepins, Electrical Properties of Polymers, Hanser, Munich (1987).

    Google Scholar 

  4. D. S. Soane and Z. Martynenko, Polymers in Microelectronics, Elsevier Science, New York (1989), p. 10.

    Google Scholar 

  5. S. D. Senturia, R. A. Miller, D. D. Denton, E W. Smith, III, and H. J. Neuhaus, in Recent Advances in Polyimide Science and Technology (W. D. Weber and M. R. Gupta, eds.), SPE, Poughkeepsie, NY (1987), pp. 351–361.

    Google Scholar 

  6. G.-R. Yang, S. Dabral, L. You, J. E McDonald, T.-M. Lu, and H. Bakhru, J. Electronic. Mat. 20, 571–576 (1991).

    CAS  Google Scholar 

  7. Chi-I Lang, Synthesis of new, vapor-depositable low dielectric constant materials for use as on-chip dielectrics, Doctoral Dissertation, Rensselaer Polytechnic Institute (1995).

    Google Scholar 

  8. M. L. Hitchman and K. E Jensen. Chemical Vapor Deposition: Principles and Applications, Academic Press, New York (1993).

    Google Scholar 

  9. A. Kruse, C. Thuemmler, A. Killinger, W. Meyer, and M. Grunze, J. Electron. Spectrosc. Relat. Phenom. 60, 193–209 (1992).

    Article  CAS  Google Scholar 

  10. N. Than-Trong, P. Y. Timbrell, and R. N. Lamb, Chem. Phys. Lett. 205, 219–224 (1993).

    Article  CAS  Google Scholar 

  11. R. F. Saraf, C. Dimitrakopoulos, M. F. Toney, and S. P. Kowalczyk, Langmuir 12, 2802–2806 (1996).

    Article  CAS  Google Scholar 

  12. M. J. Szwarc, Discussions Faraday Soc. 2, 46–49 (1947).

    Google Scholar 

  13. W. F. Gorham, J. Polym. Sci. A-1 4, 3027–3039 (1966).

    Google Scholar 

  14. W. F. Gorham, US. Patent 3,342,754 [CA 68, P3320u (1967)].

    Google Scholar 

  15. B. L. Joesten, J. Appl. Polym. Sci. 18, 439–488 (1974).

    Article  CAS  Google Scholar 

  16. W. R. Hertler, J. Org. Chem. 28, 2877–2879 (1963).

    CAS  Google Scholar 

  17. S. A. Fuqua, R. M. Parkhurst, and R. M. Silverstein, Tetrahedron 20, 1625–1632 (1964).

    Article  CAS  Google Scholar 

  18. S. W. Chow, L. A. Pilato, and W. L. Wheelwright, J. Org. Chem. 35, 20–22 (1970).

    Article  CAS  Google Scholar 

  19. S. W. Chow, W. E. Loeb, and C. E. White, J. Appl. Polym. Sci. 13, 2325–2332 (1969).

    CAS  Google Scholar 

  20. W. R. Dolbier, Jr., M. A. Asghar, H.-Q. Pan, and L. Celewicz, J. Org. Chem. 58, 1827–1830 (1993).

    CAS  Google Scholar 

  21. W. R. Dolbier, R., A. Asghar, and H. Q. Pan, U.S. Patent 5,210,341 [CA 119, P116991d (1993)].

    Google Scholar 

  22. L. You, G.-R. Yang, C.-I. Lang, P. Wu, T.-M. Lu, J. A. Moore and J. F. McDonald, J. Vac. Sci. Technol. A 11(6), 3047–3052 (1993).

    Article  CAS  Google Scholar 

  23. L. You, G.-R. Yang, C.-I, Lang, J. A. Moore, J. F. McDonald, and T.-M. Lu, U.S. Patent 5,268,202 [CA 120], P285893z (1994)].

    Google Scholar 

  24. G. Odian, Principles of Polymerization, John Wiley and Sons, New York (1981), pp. 126–140.

    Google Scholar 

  25. S. Iwatsuki, Adv. Polym. Sci. 58, 93–120 (1984).

    CAS  Google Scholar 

  26. L. S. Tan and F. E. arnold, J. Polym. Sci. Pt. A: Polym. Chem. Ed. 26, 1819–1834 (1988).

    CAS  Google Scholar 

  27. R. A. Kirchoff, US. Patent 4,540,763 [CA 104, P34502w (1985)].

    Google Scholar 

  28. T. S. Tan and F. E. hold, U.S. Patent 4,711,964 [CA 108, P132467r (1988)].

    Google Scholar 

  29. K. A. Walker, L. J. Markoski, and J. S. Moore, Macromolecules 26, 3713–3716 (1993).

    Article  CAS  Google Scholar 

  30. D. C. Burdeaux, P. H. Townsend, J. N. Carr, and P. E. Garrou, J. Electronic Mat. 19, 1357–1366 (1990).

    CAS  Google Scholar 

  31. R. A. Kirchoff, C. J. Carriere, K. J. Bruza, N. G. Rondan, and R. L. Sammler, J. Macromol. Sci.—Chem. A28, 1079–1113 (1991).

    Google Scholar 

  32. S. F. Hahn, S. J. Martin, and M. L. McKelvy, Macromolecules 25, 1539–1545 (1992).

    CAS  Google Scholar 

  33. R. A. Kirchoff, and K. J. Bruza, Chemtech 23, 22–25 (1993).

    Google Scholar 

  34. T. Tuschka, K. Naito, and B. Rickborn, J. Org. Chem. 48, 70–76 (1983).

    Article  CAS  Google Scholar 

  35. R. A. Kirchhoff, C. J. Carriere, K. J. Bruza, N. G. Rondan, and R. I. Sammler, J. Macromol. Sci.—Chem. A28, 1709–1113 (1991).

    Google Scholar 

  36. J. G. Eden (ed.), Photochemical Vapor Deposition, John Wiley and Sons, New York (1992), pp 5–8.

    Google Scholar 

  37. L. J. Bellamy, The Infrared Spectra of Complex Molecules, John Wiley and Sons, New York (1975).

    Google Scholar 

  38. D. Lien-Vien, N. B. Colthup, W. G. Fatley, and J. G. Grasseli, The Handbook of lnfrared and Raman Characteristic Frequencies of Organic Molecules, Academic Press, New York (1991).

    Google Scholar 

  39. H. Kudo, R. Shinohara, and M. Yamada, Materials Research Society, Spring Meeting, San Francisco, Personal Communication with R. Shinohara (1995).

    Google Scholar 

  40. J. G. Speight, P. Kovacic, and F. W. Koch, J. Macromol. Sci. Revs.—Macromol. Chem C5(2), 295–386 (1971).

    Google Scholar 

  41. P. Kovacic and F. W. Koch, J. Org. Chem. 30, 3176–3181 (1965).

    CAS  Google Scholar 

  42. M. Sato, K. Kaeriyama, and K. Someno, Makromol. Chem. 184, 2241–2249 (1983).

    CAS  Google Scholar 

  43. J. H. Banning and M. B. Jones, Polym. Preprints 28, 223–224 (1987).

    CAS  Google Scholar 

  44. S. K. Taylor, S. G. Bennett, I. Khouly, and P. Kovacic, J. Polym. Sci.: Polym. Lett. Ed. 19, 85–87 (1986).

    Google Scholar 

  45. M. Satoh, F. Uesugi, M. Tabata, K. Kaneto, and K. Yoshino, J. Chem. Soc., Chem. Commun. 1986, 550–551.

    Google Scholar 

  46. S. Zecchin, R. Tomat, G. Schiavon, and G. Zotti, Synth. Met. 25, 393–399 (1988).

    CAS  Google Scholar 

  47. S. Hara and N. Toshima, Chem. Lett. 1990, 269–272.

    Google Scholar 

  48. R. C. Bergman, Acc. Chem. Res. 6, 25–31 (1973).

    Article  CAS  Google Scholar 

  49. T. P. Lockhart, P. B. Cornita, and R. G. Berman, J. Am. Chem. Soc. 103, 4082–4090 (1981).

    CAS  Google Scholar 

  50. J. A. John and J. M. Tour, J. Am. Chem. Soc. 116, 5011–5012 (1994).

    Article  CAS  Google Scholar 

  51. C. C. Ku and R. Liepins, Electrical Properties of Polymer, Harvel, Munich (1987), p. 173.

    Google Scholar 

  52. D. T. Clark, and A. Dilks, J. Polym. Sci.: Polym. Chem. Ed. 17, 957–976 (1979).

    CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Chemistry, Rensselaer Polytechnic Institute, Troy, New York, 12180-3590

    J. A. Moore & Chi-I. Lanc

Authors
  1. J. A. Moore
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Chi-I. Lanc
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. IBM T. J. Watson Research Center, Yorktown Heights, New York

    Gareth Hougham

  2. Southwest Texas State University, San Marcos, Texas

    Patrick E. Cassidy

  3. Chemical and Polymer, Windlesham, Surrey, England

    Ken Johns

  4. Princeton, New Jersey

    Theodore Davidson

Rights and permissions

Reprints and permissions

Copyright information

© 2002 Kluwer Academic Publishers

About this chapter

Cite this chapter

Moore, J.A., Lanc, CI. (2002). Vapor Deposition Polymerization as a Route to Fluorinated Polymers. In: Hougham, G., Cassidy, P.E., Johns, K., Davidson, T. (eds) Fluoropolymers 1: Synthesis. Topics in Applied Chemistry. Springer, Boston, MA. https://doi.org/10.1007/0-306-46918-9_18

Download citation

  • DOI: https://doi.org/10.1007/0-306-46918-9_18

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-0-306-46060-9

  • Online ISBN: 978-0-306-46918-3

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation