Abstract
We present a novel chemical sensor based on a micromechanical array of silicon cantilevers sensitized for the detection of analytes using cantilever coatings such as metals, self-assembled monolayers, or polymers. Chemical reactions are transduced into a mechanical response and read out using an optical beam-deflection technique. Detection of primary alcohols, natural flavors, and water vapor is demonstrated.
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© 1998 Springer Science+Business Media Dordrecht
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Lang, H.P. et al. (1998). An Electronic Nose Based on A Micromechanical Cantilever Array. In: Harrison, D.J., van den Berg, A. (eds) Micro Total Analysis Systems ’98. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5286-0_13
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DOI: https://doi.org/10.1007/978-94-011-5286-0_13
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-6225-1
Online ISBN: 978-94-011-5286-0
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