Chapter

MEMS Materials and Processes Handbook

Volume 1 of the series MEMS Reference Shelf pp 137-191

Date:

Additive Processes for Metals

  • David P. ArnoldAffiliated withDepartment of Electrical and Computer Engineering, University of Florida Email author 
  • , Monika SaumerAffiliated withDepartment of Microsystems Technology, University of Applied Sciences
  • , Yong-Kyu YoonAffiliated withDepartment of Electrical Engineering, University at Buffalo, The State University of New York

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Abstract

Metals are vital building blocks for MEMS. Pure metals and metal alloys are employed in microsystem design to achieve a wide array of functionality. Common examples include electrical conductors, mechanical structures, magnetic elements, thermal conductors, optical reflectors, and more. In this chapter, additive processes for metals are discussed in the context of their application in MEMS. Particular attention is paid to MEMS-centric processing technologies, where thick metal layers are often required. Basic guidelines are given for material selection, and fabrication recipes are provided as a starting point for process development.